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    • 9. 发明授权
    • Methods of forming capacitors
    • 形成电容器的方法
    • US08528175B2
    • 2013-09-10
    • US13339692
    • 2011-12-29
    • Vassil AntonovVishwanath BhatChris M. Carlson
    • Vassil AntonovVishwanath BhatChris M. Carlson
    • H01G7/00
    • H01G4/1272H01G4/1209H01G4/1218H01G4/1227H01G4/1245H01G4/1254H01G4/33
    • Some embodiments include methods of forming capacitors. A metal oxide mixture may be formed over a first capacitor electrode. The metal oxide mixture may have a continuous concentration gradient of a second component relative to a first component. The continuous concentration gradient may correspond to a decreasing concentration of the second component as a distance from the first capacitor electrode increases. The first component may be selected from the group consisting of zirconium oxide, hafnium oxide and mixtures thereof; and the second component may be selected from the group consisting of niobium oxide, titanium oxide, strontium oxide and mixtures thereof. A second capacitor electrode may be formed over the first capacitor electrode. Some embodiments include capacitors that contain at least one metal oxide mixture having a continuous concentration gradient of the above-described second component relative to the above-described first component.
    • 一些实施例包括形成电容器的方法。 可以在第一电容器电极上形成金属氧化物混合物。 金属氧化物混合物可以具有相对于第一组分的第二组分的连续浓度梯度。 连续浓度梯度可以对应于与第一电容器电极的距离增加时第二组分的浓度降低。 第一组分可以选自氧化锆,氧化铪及其混合物; 并且第二组分可以选自氧化铌,氧化钛,氧化锶及其混合物。 可以在第一电容器电极上形成第二电容器电极。 一些实施方案包括相对于上述第一组分含有至少一种具有上述第二组分的连续浓度梯度的金属氧化物混合物的电容器。
    • 10. 发明申请
    • HIGH DIELECTRIC FILM
    • 高介电膜
    • US20120293909A1
    • 2012-11-22
    • US13522442
    • 2011-01-11
    • Mayuko TatemichiNanako TakanoMiharu OtaKouji YokotaniNobuyuki KomatsuEri MukaiMeiten Koh
    • Mayuko TatemichiNanako TakanoMiharu OtaKouji YokotaniNobuyuki KomatsuEri MukaiMeiten Koh
    • C08L27/16C08K3/22C08L1/00H01G4/30
    • H01B3/445C08J5/18C08J2327/16H01G4/1209H01G4/1254H01G4/18H01G4/186H01G4/20H01G4/206
    • The present invention provides a high dielectric film comprising: a film-forming resin (A); and inorganic particles (B), wherein the film-forming resin (A) contains a vinylidene fluoride resin (a1), an amount of the inorganic particles (B) is not less than 0.01 parts by mass and less than 10 parts by mass for each 100 parts by mass of the film-forming resin (A), and the inorganic oxide particles (B) is at least one selected from the group consisting of: (B1) inorganic oxide particles of a metallic element of Group 2, 3, 4, 12, or 13 of the Periodic Table, or inorganic oxide composite particles of these; (B2) inorganic composite oxide particles represented by formula (1): M1a1Nb1Oc1 wherein M1 represents a metallic element of Group 2, N represents a metallic element of Group 4, a1 represents 0.9 to 1.1, b1 represents 0.9 to 1.1, c1 represents 2.8 to 3.2, and the numbers of M1 and N each may be more than 1; and (B3) inorganic oxide composite particles of an oxide of a metallic element of Group 2, 3, 4, 12, or 13 of the Periodic Table and silicon oxide. The film has improved volume resistivity while maintaining a high dielectric constant owing to a VdF resin.
    • 本发明提供一种高介电膜,包括:成膜树脂(A); 和无机粒子(B),其中,成膜树脂(A)含有偏二氟乙烯树脂(a1),无机粒子(B)的量为0.01质量份以上且小于10质量份,对于 每100质量份成膜树脂(A)和无机氧化物颗粒(B)是选自以下组中的至少一种:(B1)第2,3组金属元素的无机氧化物颗粒, 4,12或13,或这些的无机氧化物复合颗粒; (B2)式(1)表示的无机复合氧化物颗粒:M1a1Nb1Oc1其中M1表示第2族的金属元素,N表示第4族的金属元素,a1表示0.9〜1.1,b1表示0.9〜1.1,c1表示2.8〜 3.2,M1和N的数量可能大于1; 和(B3)元素周期表第2,3,4,12或13族金属元素的氧化物的无机氧化物复合颗粒和氧化硅。 该膜具有改善的体积电阻率,同时由于VdF树脂而保持高的介电常数。