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    • 2. 发明授权
    • Method for controlling an EUV source
    • 用于控制EUV源的方法
    • US09455586B2
    • 2016-09-27
    • US14135177
    • 2013-12-19
    • USHIO Denki Kabushiki Kaisha
    • Mohamad Hussein El-HusseiniSven Walter Probst
    • H02J7/00H05G2/00H05B41/30G03F7/20
    • H02J7/0052G03F7/70033H02J7/007H02J7/0072H05B41/30H05G2/001
    • A method for triggering a resonant charging circuit for a device for generating short-wavelength radiation based on discharge plasma is described. Switching times of the resonant charging circuit are determined in a non-time-critical method segment by simulation and are stored to be repeatedly retrievable. Measurement values of the resonant charging circuit are determined in real time in a time-critical method segment. At least one second switching time (t2) at which a discharging switch of the resonant charging circuit is triggered in order to supply at a firing time (t3) a discharge voltage (Uwanted), and the firing time (t3) are calculated. The device has a first input unit, a first simulation unit, a first regression unit, a first measurement value unit, a first evaluation unit and a control unit for triggering a discharging switch of the resonant charging circuit.
    • 描述了用于触发用于基于放电等离子体产生短波长辐射的装置的谐振充电电路的方法。 谐振充电电路的切换时间通过模拟在非时间关键的方法段中确定,并被存储以被重复检索。 谐振充电电路的测量值在时间关键的方法段中实时确定。 至少一个第二切换时间(t2),其中触发谐振充电电路的放电开关以在点火时间(t3)提供放电电压(Uwanted),并且计算点火时间(t3)。 该装置具有第一输入单元,第一模拟单元,第一回归单元,第一测量值单元,第一评估单元和用于触发谐振充电电路的放电开关的控制单元。