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1. 发明授权

US10134570B2 Radiofrequency adjustment for instability management in semiconductor processing 有权
公开(公告)号：US10134570B2
公开(公告)日：2018-11-20
申请号：US14714576
申请日：2015-05-18
申请人： Lam Research Corporation
发明人： Arthur Sato
IPC分类号： H01J37/32 , H01L21/67 , H01L21/3065 , H01L21/66 , H05B41/292
摘要： Methods, systems, and computer programs are presented for reducing chamber instability while processing a semiconductor substrate. One method includes an operation for identifying a first recipe with steps having an operating frequency equal to the nominal frequency of a radiofrequency (RF) power supply. Each step is analyzed with the nominal frequency, and the analysis determines if any step produces instability at the nominal frequency. The operating frequency is adjusted, for one or more of the steps, when the instability in the one or more steps exceeds a threshold. The adjustment acts to find an approximate minimum level of instability. A second recipe is constructed after the adjustment, such that at least one of the steps includes a respective operating frequency different from the nominal frequency. The second recipe is used to etch the one or more layers disposed over the substrate in the semiconductor processing chamber.

2. 发明授权

US10123389B2 Light device deriving condition of storage circuit 有权
公开(公告)号：US10123389B2
公开(公告)日：2018-11-06
申请号：US15549259
申请日：2016-02-09
申请人： PHILIPS LIGHTING HOLDING B.V.
发明人： Hongxin Chen , Hong Chen
IPC分类号： H05B33/08 , H05B41/04 , G01R27/26 , G01R31/02 , H05B41/288 , H05B41/292 , G01R31/26
摘要： A device for providing power to a light arrangement (1) having a current conducting state and a current blocking state. The device comprises a storage circuit (2) with a capacitor (21) coupled to the light arrangement (1) and a resistor (22) located in parallel to the capacitor, a first determination circuit (3) for determining the state of the lighting arrangement, a second determination circuit (4) for, in the current blocking state, determining points of two discharging curves of the storage circuit, a derivation circuit (5) for deriving a condition of the storage circuit, such as life-end, from the discharging curves, a switch circuit (6) comprising an element (61), wherein the switch circuit is configured to switch the element (61) in parallel to the capacitor (21), whereby a first discharging curve is determined with the element being disconnected from the capacitor and a second discharging curve is determined with the element being connected to the capacitor, the capacitor discharging via both the resistor (22) and the element (61). The element (61) may comprise a resistor, a capacitor or an inductor.

3. 发明授权

US10070506B2 Ignitor-arrangement 有权
公开(公告)号：US10070506B2
公开(公告)日：2018-09-04
申请号：US15128072
申请日：2015-04-07
申请人： KONINKLIJKE PHILIPS N.V.
发明人： Gennadi Tochadse
IPC分类号： H05B37/02 , H05B41/292 , H05B41/288
摘要： The invention describes an ignitor arrangement (1) for a high-intensity discharge lamp (2), which ignitor arrangement (1) comprises a first pair of input terminals (101, 102) for applying an ignition voltage to the ignitor arrangement (1); a second pair of input terminals (101, 103) for applying an input drive voltage to the ignitor arrangement (1); and a discharge resistor (10) arranged in the interior (100) of the ignitor arrangement (1) and connected across the first input terminal pair (101, 102), which discharge resistor (10) is realized as a temperature-dependent resistor (10). The invention also describes a lamp driver (3) realized to drive a high-intensity discharge lamp (2); a lighting arrangement (4); and a method of driving a high-intensity discharge lamp (2).

4. 发明授权

US09939717B2 Projector and control method for projector 有权
公开(公告)号：US09939717B2
公开(公告)日：2018-04-10
申请号：US15387283
申请日：2016-12-21
申请人： SEIKO EPSON CORPORATION
发明人： Tomoya Mizutani , Takaaki Ozawa
IPC分类号： G03B21/16 , G03B21/20 , H04N9/31 , H05B41/292 , G03B21/00 , G03B33/12 , H05B41/288
CPC分类号： G03B21/16 , G03B21/006 , G03B21/2026 , G03B21/2046 , G03B21/2053 , G03B21/2066 , G03B33/12 , H04N9/3155 , H05B41/2885 , H05B41/2887 , H05B41/292 , Y02B20/202
摘要： A projector which configured to project a horizontally long image and a vertically long image, includes a cooling unit configured to cool a discharge lamp according to an installation attitude of the projector, a detection unit configured to detect the installation attitude, and a controller configured to control a discharge lamp driving unit and the cooling unit, in which the installation attitude includes a first attitude for projecting the horizontally long image and a second attitude for projecting the vertically long image, and in which the controller is configured to put out the discharge lamp in a case where the installation attitude detected by the detection unit is a third attitude which is different from both of the first attitude and the second attitude.

5. 发明授权

US09632398B2 Discharge lamp driving device, projector, and discharge lamp driving method 有权
公开(公告)号：US09632398B2
公开(公告)日：2017-04-25
申请号：US14543148
申请日：2014-11-17
申请人： SEIKO EPSON CORPORATION
发明人： Satoshi Kito
IPC分类号： H05B37/02 , G03B21/00 , G03B21/20 , H05B41/292
CPC分类号： G03B21/006 , G03B21/2026 , G03B21/2053 , H05B41/2928 , Y02B20/208
摘要： A discharge lamp driving device includes a discharge lamp driving section configured to supply a driving current to a discharge lamp, the driving current being an alternating current for driving the discharge lamp, and a control section configured to control the discharge lamp driving section. The control section controls the discharge lamp driving section such that the driving current having a driving frequency different from a natural frequency of the discharge lamp and a frequency of 1/2n (n is a natural number) times the natural frequency is supplied to the discharge lamp.

6. 发明授权

US09603228B2 Discharge lamp lighting apparatus 有权
公开(公告)号：US09603228B2
公开(公告)日：2017-03-21
申请号：US14940295
申请日：2015-11-13
申请人： Murata Manufacturing Co., Ltd.
发明人： Tsuyoshi Umemoto , Takafumi Toda
IPC分类号： H05B41/288 , H05B41/292 , H05B41/38
CPC分类号： H05B41/2887 , H05B41/2928 , H05B41/388 , Y02B20/202 , Y02B20/204
摘要： A discharge lamp lighting apparatus includes an inverter circuit supplying an AC voltage to a discharge lamp and a resonant circuit that increases a supply voltage supplied to the discharge lamp. The inverter circuit is driven using a first frequency including a resonant frequency of the resonant circuit during a first period in which breakdown and a glow discharge are generated, driven using a second frequency including a resonant frequency of the resonant circuit, lower than the first frequency, during a second period in which an arc discharge is generated, and driven using a third frequency lower than the second frequency, during a third period. Further, a dead time is set in which both of a high-side switching device and a low-side switching device are turned off so that the dead time is longer in the second period than in the first period and the third period.

7. 发明授权

US09553482B2 Lighting power supply 有权
标题翻译：照明电源
公开(公告)号：US09553482B2
公开(公告)日：2017-01-24
申请号：US14376207
申请日：2013-02-01
申请人： TRIDONIC UK LTD
发明人： Ian Wilson
IPC分类号： H05B37/02 , H02J9/02 , H05B41/285 , H05B41/292
CPC分类号： H02J9/02 , H05B37/0254 , H05B37/0263 , H05B41/2853 , H05B41/2923 , Y10T307/625
摘要： Lighting power supply system (1) including a mains input converter (11) operable to provide power, a controller (17) operable to control at least one element of the lighting system, a controller bus (26) and a controller interface (25) operable to provide control signals from the bus to the lighting system. An auxiliary converter (43) powers the lighting system from the bus and it may allow the controller to continue to be powered when the mains input is absent and an emergency battery (19) is depleted.
摘要翻译：照明电源系统（1）包括可操作以提供电力的电源输入转换器（11），可操作以控制所述照明系统的至少一个元件的控制器（17），控制器总线（26）和控制器接口（25）可操作地提供从总线到照明系统的控制信号。辅助转换器（43）从总线为照明系统供电，并且当电力输入不存在并且紧急电池（19）耗尽时，它可以允许控制器继续供电。

8. 发明申请

US20160278190A1 HID LAMP ACOUSTIC RESONANCE SUPPRESSION METHOD AND BALLAST 有权
标题翻译： HID灯声学谐振抑制方法和压力
公开(公告)号：US20160278190A1
公开(公告)日：2016-09-22
申请号：US14413463
申请日：2014-03-12
申请人： Shixue CAI , Zhongwei JIANG , SHENZHEN TECHONE TECH CO., LTD.
发明人： Shixue CAI , Zhongwei JIANG
IPC分类号： H05B41/36 , B01J19/12 , H05B41/292
CPC分类号： H05B41/36 , B01J19/123 , B01J2219/0801 , B01J2219/1203 , H05B41/2887 , H05B41/2928 , Y02B20/208
摘要： The invention provides a High Intensity Discharge (HID) lamp acoustic resonance suppression method. Whether acoustic resonance is produced or not is judged, and a frequency-modulated current frequency provided by a ballast when the acoustic resonance is produced to fulfill the aim of suppressing the acoustic resonance. The ballast includes an acoustic resonance elimination module. The invention has the beneficial effects that due to the additional arrangement of the acoustic resonance elimination module, acoustic resonance is maximally suppressed, and the optimal stability of a discharge arc is ensured. These characteristics enable the product to stably run for each type of lamp tube and different power.
摘要翻译：本发明提供了一种高强度放电（HID）灯声共振抑制方法。判断是否产生声共振，以及当产生声共振时由镇流器提供的频率调制电流频率以达到抑制声共振的目的。镇流器包括声共振消除模块。本发明具有这样的有益效果：由于声共振消除模块的附加配置，最大限度地抑制了声共振，并且确保了放电电弧的最佳稳定性。这些特性使产品能够稳定地运行各种类型的灯管和不同的功率。

9. 发明申请

US20160262247A1 LIGHTING DEVICE AND ILLUMINATING DEVICE 有权
标题翻译：照明装置和照明装置
公开(公告)号：US20160262247A1
公开(公告)日：2016-09-08
申请号：US15014216
申请日：2016-02-03
申请人： Panasonic Intellectual Property Management Co., Ltd.
发明人： Kazuya KATO
IPC分类号： H05B41/292 , H01J61/54 , H05B41/288
CPC分类号： H05B41/2926 , H01J61/54 , H05B41/2887 , Y02B20/202
摘要： The lighting device of one aspect according to the present disclosure calculates, based on a voltage value of an AC voltage applied to a discharge lamp and a current value of AC current flowing through the discharge lamp, a first power value defined as a value of power supplied to the discharge lamp in a first half period of the AC voltage and a second power value defined as a value of power supplied to the discharge lamp in a second half period of the AC voltage. The lighting device determines that a ground fault has occurred, when an imbalance state in which a difference between the first power value and the second power value is equal to or greater than a threshold value continues for a predetermined time period.
摘要翻译：根据本公开的一个方面的照明装置基于施加到放电灯的AC电压的电压值和流过放电灯的AC电流的电流值来计算定义为功率值的第一功率值在交流电压的前半个周期中提供给放电灯，以及在交流电压的后半个周期中被定义为提供给放电灯的功率值的第二功率值。当第一功率值和第二功率值之间的差等于或大于阈值的不平衡状态持续预定时间段时，照明装置确定发生接地故障。

10. 发明申请

US20160192462A1 DISCHARGE LAMP LIGHTING DEVICE 审中-公开
标题翻译：放电灯照明装置
公开(公告)号：US20160192462A1
公开(公告)日：2016-06-30
申请号：US14650728
申请日：2013-12-18
申请人： USHIO DENKI KABUSHIKI KAISHA
发明人： Yoichi KONO
IPC分类号： H05B41/292 , H01J61/073 , H01J61/16 , H05B41/04
CPC分类号： H05B41/2921 , H01J61/0732 , H01J61/0735 , H01J61/16 , H01J61/26 , H01J61/86 , H05B41/04 , H05B41/2925 , Y02B20/208
摘要： Disclosed herein a discharge lamp lighting device capable of suppressing an occurrence of a flicker and obtaining a longer life till flicker even when the discharge lamp lights up for a long time. The device comprises a short arc type discharge lamp; a lighting circuit for supplying power to the discharge lamp; and a controller for controlling the lighting circuit. The discharge lamp has: an arc tube; an anode and a cathode disposed in the arc tube with the anode and the cathode facing each other; and a xenon gas enclosed in the arc tube, and the cathode includes an electron emissive material and a carbon component. The controller includes a short time lighting circuit for carrying out a short time lighting operation that lights up the discharge lamp at least once in a short time during an idle period in which the discharge lamp does not constantly light up.
摘要翻译：这里公开了一种放电灯点亮装置，其能够抑制闪烁的发生，并且即使当放电灯长时间点亮时也能获得更长的使用寿命，直到闪烁。该装置包括短弧型放电灯; 用于向放电灯供电的照明电路; 以及用于控制点亮电路的控制器。放电灯具有：电弧管; 设置在电弧管中的阳极和阴极，阳极和阴极彼此面对; 和包围在电弧管中的氙气体，阴极包括电子发射材料和碳组分。控制器包括短时间点亮电路，用于在放电灯不持续点亮的空闲时段期间在短时间内执行使放电灯至少一次点亮的短时间点亮操作。

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