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    • 1. 发明申请
    • DC HIGH-VOLTAGE SUPER-RADIANT FREE-ELECTRON BASED EUV SOURCE
    • 直流高压超级免射电子基于EUV源
    • US20140239805A1
    • 2014-08-28
    • US13779331
    • 2013-02-27
    • TOMAS PLETTNER
    • TOMAS PLETTNER
    • G21K5/04
    • G21K5/04H01S3/0903H05G2/00H05H5/04H05H7/04H05H2007/045
    • An array of spatially separated beamlets is produced by a corresponding array of charged particle emitters. Each emitter is at an electrostatic potential difference with respect to an immediately adjacent emitter in the array. The beamlets are converged laterally to form an charged particle beam. The beam is modulated longitudinally with infrared radiation to form a modulated beam. The charged particles in the modulated beam are bunched longitudinally to form a bunched beam. The bunched beam may be modulated with an undulator to generate a coherent radiation output. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.
    • 空间分离的子束阵列由相应的带电粒子发射体阵列产生。 每个发射器相对于阵列中紧邻的发射器处于静电势差。 子束横向会聚以形成带电粒子束。 光束用红外辐射纵向调制以形成调制光束。 调制束中的带电粒子纵向聚束以形成束状束。 聚束光束可以用波动器调制以产生相干辐射输出。 提供该摘要以符合要求抽象的规则,允许搜索者或其他读者快速确定技术公开内容的主题。 提交它的理解是,它不会用于解释或限制权利要求的范围或含义。
    • 3. 发明授权
    • Magnetic field control apparatus and dipole magnet
    • 磁场控制装置和偶极磁铁
    • US08598971B2
    • 2013-12-03
    • US13304958
    • 2011-11-28
    • Takahiro YamadaFumiaki Noda
    • Takahiro YamadaFumiaki Noda
    • H05H15/00H01F7/00H01F3/12
    • H05H7/04H05H2007/045
    • To provide a magnetic field control apparatus capable of reducing a width of a correcting plate. The magnetic field control apparatus includes a conductive vacuum duct 1 disposed between dipole magnet magnetic poles 3 and a conductive correcting plate 2. The correcting plate 2 is formed of a material having an electric conductivity higher than that of the vacuum duct 1. A plurality of conductive correcting plates 2 are disposed in each of four areas, the four areas being formed by dividing a cross section of a vacuum duct 1 extending perpendicularly to a direction in which a charged particle beam travels by a symmetrical surface having each of both magnetic poles of the dipole magnet defined as a mirror image and a plane which extends perpendicularly to the symmetrical surface and through which a center of gravity of the charged particle beam passes.
    • 提供能够减小校正板的宽度的磁场控制装置。 磁场控制装置包括设置在偶极子磁极3和导电校正板2之间的导电真空管道1.校正板2由导电率高于真空管道1的导电性的材料形成。多个 导电校正板2设置在四个区域中的每一个中,四个区域通过将垂直于带电粒子束行进的方向延伸的真空管道1的横截面划分为具有两个磁极的对称表面的对称表面 定义为镜像的偶极子磁体和垂直于对称表面延伸并且带电粒子束的重心通过该平面的平面。
    • 4. 发明申请
    • MAGNETIC FIELD CONTROL APPARATUS AND DIPOLE MAGNET
    • 磁场控制装置和DIPOLE MAGNET
    • US20120133305A1
    • 2012-05-31
    • US13304958
    • 2011-11-28
    • Takahiro YAMADAFumiaki NODA
    • Takahiro YAMADAFumiaki NODA
    • H05H13/04
    • H05H7/04H05H2007/045
    • To provide a magnetic field control apparatus capable of reducing a width of a correcting plate. The magnetic field control apparatus includes a conductive vacuum duct 1 disposed between dipole magnet magnetic poles 3 and a conductive correcting plate 2. The correcting plate 2 is formed of a material having an electric conductivity higher than that of the vacuum duct 1. A plurality of conductive correcting plates 2 are disposed in each of four areas, the four areas being formed by dividing a cross section of a vacuum duct 1 extending perpendicularly to a direction in which a charged particle beam travels by a symmetrical surface having each of both magnetic poles of the dipole magnet defined as a mirror image and a plane which extends perpendicularly to the symmetrical surface and through which a center of gravity of the charged particle beam passes.
    • 提供能够减小校正板的宽度的磁场控制装置。 磁场控制装置包括设置在偶极子磁极3和导电校正板2之间的导电真空管道1.校正板2由导电率高于真空管道1的导电性的材料形成。多个 导电校正板2设置在四个区域中的每一个中,四个区域通过将垂直于带电粒子束行进的方向延伸的真空管道1的横截面划分为具有两个磁极的对称表面的对称表面 定义为镜像的偶极子磁体和垂直于对称表面延伸并且带电粒子束的重心通过该平面的平面。
    • 7. 发明授权
    • DC high-voltage super-radiant free-electron based EUV source
    • 直流高压超辐射自由电子基EUV源
    • US09053833B2
    • 2015-06-09
    • US13779331
    • 2013-02-27
    • Tomas Plettner
    • Tomas Plettner
    • H01J29/98G21K5/04
    • G21K5/04H01S3/0903H05G2/00H05H5/04H05H7/04H05H2007/045
    • An array of spatially separated beamlets is produced by a corresponding array of charged particle emitters. Each emitter is at an electrostatic potential difference with respect to an immediately adjacent emitter in the array. The beamlets are converged laterally to form an charged particle beam. The beam is modulated longitudinally with infrared radiation to form a modulated beam. The charged particles in the modulated beam are bunched longitudinally to form a bunched beam. The bunched beam may be modulated with an undulator to generate a coherent radiation output. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.
    • 空间分离的子束阵列由相应的带电粒子发射体阵列产生。 每个发射器相对于阵列中紧邻的发射器处于静电势差。 子束横向会聚以形成带电粒子束。 光束用红外辐射纵向调制以形成调制光束。 调制束中的带电粒子纵向聚束以形成束状束。 聚束光束可以用波动器调制以产生相干辐射输出。 提供该摘要以符合要求抽象的规则,允许搜索者或其他读者快速确定技术公开内容的主题。 提交它的理解是,它不会用于解释或限制权利要求的范围或含义。