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    • 9. 发明申请
    • METHOD OF PRODUCING CURED PRODUCT AND METHOD OF FORMING PATTERN
    • 生产固化产品的方法和形成图案的方法
    • US20140363584A1
    • 2014-12-11
    • US14366250
    • 2012-12-12
    • CANON KABUSHIKI KAISHA
    • Tatsuya SuzukiToshiki ItoChieko Mihara
    • H05K3/00
    • H05K3/00H01L21/3086H05K2203/0502
    • The present invention provides a photo-curable composition that requires a small mold-releasing force in a method of producing a cured product and also provides a method of producing a cured product with a small mold-releasing force. The method of producing a cured product includes applying a photo-curable composition onto a base material; pressing a mold to the photo-curable composition to form a pattern in the photo-curable composition; irradiating the photo-curable composition provided with the pattern with first light to generate a cured product having the pattern; and releasing the mold from the cured product, wherein a gas-generating region is formed from a gas-generating agent between the cured product and the mold; the gas-generating region is irradiated with second light to generate a gas in the gas-generating region; and the mold is released from the cured product after the generation of the gas or simultaneously with the generation of the gas.
    • 本发明提供了在固化物的制造方法中需要小的脱模力的光固化性组合物,还提供了具有小的脱模力的固化物的制造方法。 固化物的制造方法包括将光固化性组合物涂布在基材上; 将模具压制到光固化组合物上以在光固化组合物中形成图案; 用第一光照射设置有图案的光固化性组合物,生成具有图案的固化物; 从固化物中脱模,其中在固化物与模具之间由气体发生剂形成气体发生区域; 用第二光照射气体产生区域,以在气体产生区域中产生气体; 并且在产生气体之后或同时产生气体时,模具从固化产物中释放出来。