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1. 发明授权

US11911808B2 System for cleaning semiconductor wafers 有权
公开(公告)号：US11911808B2
公开(公告)日：2024-02-27
申请号：US18181074
申请日：2023-03-09
申请人： ACM Research (Shanghai) Inc.
发明人： Hui Wang , Fufa Chen , Fuping Chen , Jian Wang , Xi Wang , Xiaoyan Zhang , Yinuo Jin , Zhaowei Jia , Liangzhi Xie , Jun Wang , Xuejun Li
IPC分类号： B08B3/12 , B08B1/00 , H01L21/67 , B06B3/02 , B06B1/02 , B08B3/08 , H01L21/02 , H01L21/687 , G08B25/08 , B06B1/06 , B06B3/00 , G08B21/18
CPC分类号： B08B3/12 , B06B1/0284 , B06B3/02 , B08B1/007 , B08B3/08 , H01L21/02052 , H01L21/67051 , H01L21/68764 , B06B1/0644 , B06B3/00 , G08B21/182 , G08B25/08
摘要： A system for controlling damages in cleaning a semiconductor wafer comprising features of patterned structures, the system comprising: a wafer holder for temporary restraining a semiconductor wafer during a cleaning process; an inlet for delivering a cleaning liquid over a surface of the semiconductor wafer; a sonic generator configured to alternately operate at a first frequency and a first power level for a first predetermined period of time and at a second frequency and a second power level for a second predetermined period of time, to impart sonic energy to the cleaning liquid, the first predetermined period of time and the second predetermined period of time consecutively following one another; and a controller programmed to provide the cleaning parameters, wherein at least one of the cleaning parameters is determined such that a percentage of damaged features as a result of the imparting sonic energy is lower than a predetermined threshold.

2. 发明授权

US11752529B2 Method for cleaning semiconductor wafers 有权
公开(公告)号：US11752529B2
公开(公告)日：2023-09-12
申请号：US15814246
申请日：2017-11-15
申请人： ACM Research (Shanghai) Inc.
发明人： Hui Wang , Fufa Chen , Fuping Chen , Jian Wang , Xi Wang , Xiaoyan Zhang , Yinuo Jin , Zhaowei Jia , Liangzhi Xie , Jun Wang , Xuejun Li
IPC分类号： B08B3/12 , B06B3/02 , B06B1/02 , H01L21/02 , B06B1/06 , B06B3/00 , G08B21/18 , B08B1/00 , H01L21/67 , B08B3/08 , H01L21/687
CPC分类号： B08B3/12 , B06B1/0284 , B06B3/02 , B08B1/007 , B08B3/08 , H01L21/02052 , H01L21/67051 , H01L21/68764 , B06B1/0644 , B06B3/00 , G08B21/182
摘要： A method for controlling damages in cleaning a semiconductor wafer comprising features of patterned structures, the method comprising: delivering a cleaning liquid over a surface of a semiconductor wafer during a cleaning process; and imparting sonic energy to the cleaning liquid from a sonic transducer during the cleaning process, wherein power is alternately supplied to the sonic transducer at a first frequency and a first power level for a first predetermined period of time and at a second frequency and a second power level for a second predetermined period of time, the first predetermined period of time and the second predetermined period of time consecutively following one another, wherein at least one of the cleaning parameters is determined such that a percentage of damaged features as a result of the imparting sonic energy is lower than a predetermined threshold.

3. 发明授权

US07270132B2 Washer 有权
标题翻译：垫圈
公开(公告)号：US07270132B2
公开(公告)日：2007-09-18
申请号：US10203746
申请日：2001-02-09
申请人： Hiroaki Inui , Makoto Oyama , Masaki Yura
发明人： Hiroaki Inui , Makoto Oyama , Masaki Yura
IPC分类号： B06B3/02
CPC分类号： A47L15/4223 , A47L15/4221
摘要： A washer includes a plurality of washing devices for spraying washing water to an object to be washed from various directions of a washing tub, and a washing water feeding device for feeding the washing water. The washing water is sequentially sprayed from respective washing devices. Thus, the washing water can be sprayed to eating utensils from the various directions without increasing fed water, and a washing effect is improved. Speedy washing, energy saving, and water saving can be also achieved.
摘要翻译：垫圈包括多个用于将洗涤水从洗涤桶的各个方向喷射到待洗涤物体上的洗涤装置和用于供给洗涤水的洗涤水供给装置。洗涤水从相应的洗涤装置顺序喷射。因此，洗涤水可以从各个方向喷洒到餐具，而不增加给水，并且提高洗涤效果。也可以实现快速洗涤，节能，节水。

4. 发明申请

US20050147260A1 Device for actuating a membrane and a vehicle comprising a device a device for actuating a membrane 有权
标题翻译：用于致动膜和车辆的装置，包括用于致动膜的装置的装置
公开(公告)号：US20050147260A1
公开(公告)日：2005-07-07
申请号：US10511738
申请日：2003-04-14
申请人： Mats Gustavsson
发明人： Mats Gustavsson
IPC分类号： B06B1/06 , B06B3/02 , B60R11/00 , B60R11/02 , G10K9/12 , G10K9/22 , G10K11/178 , H04B1/00 , H04R1/02
CPC分类号： H04R7/045 , B06B1/0607 , B06B3/02 , B60R11/0223 , B60R2011/0026 , G10K9/12 , G10K9/121 , G10K9/22 , G10K11/178 , G10K2210/102 , G10K2210/1282 , G10K2210/321 , G10K2210/3212 , G10K2210/3214 , G10K2210/3219 , G10K2210/3229 , H04R2440/05 , H04R2499/13
摘要： The invention refers to a device (3) for actuating a membrane arranged in an opening to a space, and a vehicle having such a device. The membrane (1) has a first surface (1′) and a second opposite surface (1″), and is limited by and edge area. The device includes a first strip (5) to be attached to the first surface of the membrane in the edge area, and a second strip (6) to be attached to a surface of a frame portion extending around the opening. An exchanging member (8) is arranged between and connecting the first strip with the second strip. An actuating member (20) is arranged to transfer a reciprocating primary movement to the exchanging member converting the primary movement to a reciprocating secondary movement, which has a longer length of stroke than the primary movement and acts on the strips to move towards and away from each other.
摘要翻译：本发明涉及一种用于致动布置在空间开口中的膜的装置（3）和具有这种装置的车辆。膜（1）具有第一表面（1'）和第二相对表面（1“），并且受到边缘区域的限制。该装置包括要附接到边缘区域中的膜的第一表面的第一条带（5）和附接到围绕开口延伸的框架部分的表面的第二条带（6）。交换构件（8）布置在第一条带之间并将第一条带与第二条带连接。致动构件（20）被布置成将往复运动的初级运动传递到交换构件，其将主运动转换成具有比主运动更长的行程长度的往复次要运动，并且作用在带上以朝向和远离运动彼此。

5. 发明授权

US6078125A Ultrasonic apparatus 失效
标题翻译：超声波设备
公开(公告)号：US6078125A
公开(公告)日：2000-06-20
申请号：US898625
申请日：1997-07-22
申请人： Allan J. Roberts
发明人： Allan J. Roberts
IPC分类号： B06B1/02 , B06B3/02 , B23K20/10 , H01L41/08
CPC分类号： B23K20/106 , B06B3/02
摘要： An ultrasonic apparatus useable for welding metal by vibrations in the ultrasonic frequency range, employs a horn dimensioned to be resonant as a full wavelength resonator for vibrations of a predetermined frequency traveling longitudinally therethrough. To increase the energy available, the horn is coupled to a pair of transducers, one transducer coupled to each of the radially disposed end surfaces of the horn. During operation, one transducer must be in its longitudinal expansion mode when the other transducer is in its longitudinal contraction mode and vice versa. In order to accomplish this, two substantially identical transducers are used, but the orientation of the piezoelectric disc or discs in one of the transducers is reversed with respect to the orientation of the disc or discs in the other transducer.
摘要翻译：一种用于通过超声波频率范围内的振动焊接金属的超声波设备，采用一个尺寸为共振的喇叭作为全波长谐振器，用于纵向穿过其中的预定频率的振动。为了增加可用能量，喇叭耦合到一对换能器，一个换能器耦合到喇叭的每个径向设置的端表面。在操作期间，当另一个换能器处于其纵向收缩模式时，一个换能器必须处于其纵向膨胀模式，反之亦然。为了实现这一点，使用两个基本上相同的换能器，但是其中一个换能器中的压电盘或盘的取向相对于另一换能器中的盘或盘的取向反转。

6. 发明授权

US6015449A Rain drop detecting device 失效
标题翻译：雨滴检测装置
公开(公告)号：US6015449A
公开(公告)日：2000-01-18
申请号：US22631
申请日：1998-02-12
申请人： Koichi Hirota , Kohki Ohara , Kazuyoshi Mori
发明人： Koichi Hirota , Kohki Ohara , Kazuyoshi Mori
IPC分类号： G01N29/00 , B60S1/08 , G01N29/04 , G01N29/22 , G01W1/14 , G01N29/20 , B06B3/02
CPC分类号： B60S1/0822 , B60S1/0855 , G01N29/041 , G01N29/22 , G01N2291/015 , G01N2291/02827 , G01N2291/02845 , G01N2291/0427 , G01N2291/044 , Y10S318/02
摘要： A rain drop detecting device includes an oscillation element disposed on a plate member such as a windshield for generating an ultrasonic wave on the plate member, an ultrasonic wave receiving element disposed on the plate member for receiving the ultrasonic wave generated by the oscillation element, a detecting device connected to the ultrasonic wave receiving element for detecting an amplitude of the ultrasonic wave, and an ultrasonic wave absorbing member disposed on the plate member. The absorbing member is designed to absorb a portion of the ultrasonic wave generated by the oscillation element to prevent the downwardly travelling portion of the ultrasonic wave from travelling beyond a desired region of the plate member. In the case of a windshield, the absorbing member can be used to prevent the ultrasonic wave from travelling to the resting location of the wiper so that inadvertent rain drop detection does not occur.
摘要翻译：雨滴检测装置包括设置在诸如挡风玻璃的板构件上的用于在板构件上产生超声波的振动元件，设置在板构件上用于接收由振荡元件产生的超声波的超声波接收元件，连接到超声波接收元件的检测装置，用于检测超声波的振幅;以及超声波吸收部件，设置在该板部件上。吸收构件被设计成吸收由振动元件产生的超声波的一部分，以防止超声波的向下行进部分行进超过板构件的期望区域。在挡风玻璃的情况下，吸收构件可以用于防止超声波行进到擦拭器的静止位置，从而不会发生无意的雨滴检测。

7. 发明授权

US5921457A Ultrasonic welder including anvil with angled sidewalls 失效
标题翻译：超声波焊机包括具有倾斜侧壁的砧座
公开(公告)号：US5921457A
公开(公告)日：1999-07-13
申请号：US938256
申请日：1997-09-26
申请人： Michael Patrikios
发明人： Michael Patrikios
IPC分类号： B06B3/00 , B06B3/02 , B23K20/10 , G10K11/02
CPC分类号： B23K20/106 , B06B3/00 , B06B3/02 , B23K20/10 , G10K11/025 , B23K2201/32
摘要： An ultrasonic welder is provided which comprises a base, a transducer, a tip, an anvil, a gathering tool, and an actuator for moving both the anvil and gathering tool. The anvil has angled sidewalls to improve weld efficiency.
摘要翻译：提供了一种超声波焊接机，其包括基座，换能器，尖端，砧座，收集工具和用于移动砧座和收集工具的致动器。砧座具有成角度的侧壁以提高焊接效率。

8. 发明授权

US5879364A Internal ultrasonic tip amplifier 失效
标题翻译：内部超声波尖端放大器
公开(公告)号：US5879364A
公开(公告)日：1999-03-09
申请号：US941554
申请日：1997-09-30
申请人： George Bromfield , Jeffrey J. Vaitekunas
发明人： George Bromfield , Jeffrey J. Vaitekunas
IPC分类号： G01N29/00 , A61B8/12 , A61B17/32 , A61B17/34 , A61B18/00 , A61J3/00 , B06B3/02 , B29C65/08
CPC分类号： B06B3/02 , A61B17/320068 , A61B17/3476 , A61B2017/320072
摘要： An ultrasonic energy amplifier. The amplifier comprises a delivery horn having a solid proximal portion and a hollow distal portion. The hollow distal portion has substantially less cross-sectional area than the solid proximal portion. Ultrasonic energy is transmitted sequentially through the proximal and distal portions and its velocity is amplified because of the lower cross-sectional area of the distal portion.
摘要翻译：超声能量放大器。放大器包括具有固体近端部分和中空远端部分的输送喇叭。中空的远侧部分具有比固体近端部分具有更小的横截面面积。超声能量依次通过近端部分和远端部分传播，并且由于远端部分的横截面积较小，其速度被放大。

9. 发明授权

US5210577A Edge effect compensation in high frequency vibratory energy producing devices for electrophotographic imaging 失效
标题翻译：用于电子照相成像的高频振动能产生装置中的边缘效应补偿
公开(公告)号：US5210577A
公开(公告)日：1993-05-11
申请号：US887037
申请日：1992-05-22
申请人： William J. Nowak
发明人： William J. Nowak
IPC分类号： B06B3/02 , G03G15/08 , G03G15/16 , G03G21/00 , G03G21/06
CPC分类号： B06B3/02 , G03G15/0813 , G03G15/16 , G03G21/0005 , G03G2221/0021
摘要： An imaging device includes a non-rigid member with a charge retentive surface moving along an endless path, an arrangement for creating a latent image on the charge retentive surface, a developer to develop the latent image with toner, a transfer arrangement electrostatically transferring the developed toner image to a copy sheet, and a resonator for enhancing toner release from the charge retentive surface, producing relatively high frequency vibratory energy and having a portion adapted for contact across the non-rigid member, generally transverse to the direction of movement of the non-rigid member. The resonator includes an energy transmitting horn having a platform portion and a horn portion including a set of linearly arranged horn elements, each horn element having a contacting portion for contacting the non-rigid member; a voltage source producing a voltage signal; a plurality of vibratory energy producing devices, each corresponding to a horn element to drive the horn elements to vibrate, each vibratory energy producing device producing a vibration responsive to an applied voltage signal directed to each from the voltage source. The plurality of vibratory energy producing devices includes at least two groups, each group having a vibration response to the applied voltage signal directed thereto distinct from the other, to provide a substantially uniform vibration response to the applied voltage signal across the resonator.
摘要翻译：一种成像装置包括具有沿着环形路径移动的电荷保持表面的非刚性构件，用于在电荷保持性表面上产生潜像的装置，用调色剂显影潜像的显影剂，静电转印显影剂调色剂图像到复印纸，以及用于增强调色剂从电荷保持表面释放的共振器，产生相对高频率的振动能量，并具有适于接触穿过非刚性部件的部分，大体横向于非磁性部件的运动方向刚果会员谐振器包括具有平台部分的能量传递喇叭，喇叭部分包括一组线性排列的喇叭元件，每个喇叭元件具有用于接触非刚性构件的接触部分; 产生电压信号的电压源; 多个振动能产生装置，每个振动能产生装置对应于喇叭元件以驱动喇叭元件振动，每个振动能产生装置响应于从每个电压源施加的施加电压信号产生振动。所述多个振动能产生装置包括至少两组，每组对所引导的施加的电压信号的振动响应彼此不同，以对谐振器两端施加的电压信号提供基本均匀的振动响应。

10. 发明授权

US4651043A Resonator exhibiting uniform motional output 失效
标题翻译：谐振器表现出均匀的运动输出
公开(公告)号：US4651043A
公开(公告)日：1987-03-17
申请号：US790380
申请日：1985-10-23
申请人： Everett A. Harris , John Jugler
发明人： Everett A. Harris , John Jugler
IPC分类号： H04R1/30 , B06B3/02 , H04R17/10 , H01L41/08
CPC分类号： B29C65/08 , B06B3/02 , B29C66/40 , B29C66/80 , B29C66/9512 , B29C66/9516 , B29C66/729 , B29C66/73921 , B29C66/9513 , B29C66/9517
摘要： The invention concerns resonators of rectangular or blade like configuration providing substantially uniform motional output along the output surface. The improvement is achieved by disposing the change in cross-sectional area for producing increased motional amplitude at the output surface in relation to the nodal region of the resonator in such a manner as to cause the lateral portions of the resonator to exhibit a greater motional amplitude gain than that of the central portion.
摘要翻译：本发明涉及矩形或叶片状结构的谐振器，其提供沿着输出表面的基本均匀的运动输出。通过将相对于谐振器的节点区域在输出表面产生增加的运动幅度的截面积的变化设置成使得谐振器的横向部分呈现更大的运动幅度来实现改进增益高于中央部分。

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