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    • 10. 发明授权
    • System and method for making Si2H6 and higher silanes
    • 制备Si2H6及更高硅烷的体系及方法
    • US08163261B2
    • 2012-04-24
    • US11099097
    • 2005-04-05
    • Bruce Hazeltine
    • Bruce Hazeltine
    • C01B33/04C01B33/02C01B6/00B32B9/00B32B25/00B32B9/04D02G3/00
    • C01B33/04Y10T428/2962Y10T428/2995Y10T428/31663
    • A method for making a higher silane from a lower silane comprises heating a lower silane containing stream without exposing it to temperatures more than 20° C. more than the maximum temperature of a first reaction temperature range. The heated lower silane containing stream is introduced into a first reaction zone and allowed to react. The method further comprises mixing a first gaseous mixture from the first reaction zone with a higher silane containing stream and introducing the mixed streams into a second reaction zone operating within a second reaction temperature range. A second gaseous mixture exiting the second reaction zone is separated into various streams. One stream containing unreacted lower silanes is recycled to an earlier heating step and first reaction zone. The higher silane containing stream is mixed with the first gaseous mixture. Average residence time is low to prevent decomposition and formation of undesired silane byproducts.
    • 从下硅烷制备高级硅烷的方法包括加热含硅烷的流,而不将其暴露于比第一反应温度范围的最高温度高20℃以上的温度。 将加热的含较低硅烷的流引入第一反应区并使其反应。 该方法还包括将来自第一反应区的第一气体混合物与较高含硅烷的物流混合,并将混合物流引入在第二反应温度范围内操作的第二反应区。 离开第二反应区的第二气体混合物被分离成各种流。 含有未反应的下硅烷的一股料流再循环至较早的加热步骤和第一反应区。 将较高含硅烷的物流与第一气体混合物混合。 平均停留时间低,以防止不希望的硅烷副产物分解和形成。