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    • 6. 发明授权
    • Austenitic stainless steel valve
    • 奥氏体不锈钢阀门
    • US6047726A
    • 2000-04-11
    • US108222
    • 1998-07-01
    • Noritsugu Kaneshige
    • Noritsugu Kaneshige
    • F16K1/00F16K1/10F16K1/32F16K27/02F16K17/38
    • F16K1/10F16K27/02Y10T137/7036Y10T137/7737
    • An austenitic stainless steel valve which is used at 100.degree. C. or higher is easy to operate at the beginning of use. The valve of the present invention has a valve body made from an austenitic stainless steel, and a stem adapted to be reciprocated to open and close the valve. The stem is made from a metal having a thermal expansion coefficient that is ten-thirteenths or less of that of an austenitic stainless steel. Such a metal may be a ferritic or martensitic stainless steel. With this arrangement, it is possible to restrict the compressive stress applied to the stem within an allowable stress for the material of the stem and thus to prevent the destruction of the seat or the bending of the stem. The valve can thus be used easily.
    • 在100℃以上使用的奥氏体不锈钢阀在使用开始时易于操作。 本发明的阀具有由奥氏体不锈钢制成的阀体和适于往复运动以使阀门打开和关闭的阀杆。 该杆由具有比奥氏体不锈钢的热膨胀系数的十分之三或更少的热膨胀系数的金属制成。 这种金属可以是铁素体或马氏体不锈钢。 通过这种布置,可以将施加到杆上的压缩应力限制在用于杆的材料的允许应力内,从而防止阀座的破坏或阀杆的弯曲。 因此可以容易地使用阀。
    • 8. 发明授权
    • High Cv bulk process valve, control system and method
    • 高Cv体积过程阀,控制系统和方法
    • US6026835A
    • 2000-02-22
    • US102625
    • 1998-06-23
    • Richard L. MartinHarry Clay NesbittDavid Edward DwellyJohn F. Schoeppel
    • Richard L. MartinHarry Clay NesbittDavid Edward DwellyJohn F. Schoeppel
    • F16K1/10F16K41/10F16K31/126
    • F16K41/106F16K1/10Y10T137/0318Y10T137/3109
    • A high Cv bulk process valve, control system and method convey a process gas or liquid for manufacturing semiconductors through a fluid passage. The fluid passage contains an aerodynamically shaped expansion chamber within which a valve seat and a moveable poppet are arranged for opening and closing the fluid passage. The aerodynamically shaped expansion chamber includes a conically expanding entry and a conically contracting exit and is shaped such that the resistance to flow of the process gas or liquid through the fluid passage of the valve is very nearly the same as through a straight tubing having a cross-sectional area of an inlet to the valve and a length of the fluid passage through the valve. The valve can be added or subtracted from a gas or liquid control system with virtually no changes in pressure drop of flow restriction, when the valve is in the open position. The valve minimizes the energy consumed by valves in semiconductor gas systems.
    • 高Cv体积过程阀,控制系统和方法通过流体通道输送用于制造半导体的工艺气体或液体。 流体通道包含空气动力学形状的膨胀室,在该膨胀室中布置有用于打开和关闭流体通道的阀座和可移动提升阀。 空气动力学形状的膨胀室包括锥形膨胀入口和锥形收缩出口,并且成形为使得通过阀的流体通道的工艺气体或液体的流动阻力与通过具有十字形的直管非常接近相同 阀的入口的截面面积和通过阀的流体通道的长度。 当阀门处于打开位置时,可以从气体或液体控制系统中添加或减少阀门,实际上流量限制压降几乎没有变化。 该阀将半导体气体系统中的阀消耗的能量最小化。
    • 9. 发明授权
    • Hermetically sealed valve with fixed diffuser
    • 密封阀,带固定扩散器
    • US3955794A
    • 1976-05-11
    • US551260
    • 1975-02-20
    • Andrew Hankosky
    • Andrew Hankosky
    • F16K1/10F16K1/38F16K41/12F16K47/00F16K47/16
    • F16K1/38F16K1/10F16K41/12
    • A hermetically sealed valve includes a valve body having an annular seat adjacent the valve inlet with a frusto-conical surface diverging outwardly therefrom toward the valve outlet and a fixed diffuser assembly including a fixed disc guide and a slidable spring biased closure disc. The disc guide has a diverging frusto-conical surface spaced from the first surface to define a high efficiency annular diffuser flow passage. The fluid exposed surfaces of the disc are located upstream of the passage. The closure disc is actuated between an open position and a closed position by an axially movable valve stem acting on a flexible diaphragm. The pressure drop in the diffuser passage at high flow conditions establishes a force differential on the diffuser assembly acting toward the valve seat which is borne entirely by the disc guide thereby eliminating any pull down forces on the closure disc.
    • 气密密封阀包括阀体,该阀体具有邻近阀入口的环形座,其具有从其向外朝向阀出口向外扩散的截头圆锥形表面,以及固定扩散器组件,其包括固定盘引导件和可滑动弹簧偏压闭合盘。 盘导向件具有与第一表面间隔开的发散的截头圆锥形表面,以限定高效的环形扩散器流动通道。 盘的流体暴露表面位于通道的上游。 闭合盘通过作用在柔性隔膜上的可轴向移动的阀杆在打开位置和关闭位置之间被致动。 在高流量条件下,扩散器通道中的压降在扩散器组件上形成力,该扩散器组件朝向阀座完全由盘导向器承载,从而消除了封闭盘上的任何下拉力。