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1. 发明授权

US06810602B2 Drier module 有权
标题翻译：干燥器模块
公开(公告)号：US06810602B2
公开(公告)日：2004-11-02
申请号：US10718029
申请日：2003-11-21
申请人： Sang Doo Kim , Jae Suk Yang
发明人： Sang Doo Kim , Jae Suk Yang
IPC分类号： F26B2100
CPC分类号： D06F58/26 , D06F58/28 , D06F2058/289
摘要： A drier module, for use in a drier having a drier motor and one of two heat generation devices, namely gas or electric, is an interchange module of a drier of a gas or electric type and may be connected to a drier motor and to a gas control circuit of a gas drier or to an electric heater of an electric drier. During drier assembly, the module is adaptively modified, for example, by setting a switch position according to a desired mode, i.e., the intended drier type. The module includes a selection switch for selecting one of a gas mode and an electric mode; a first connector providing a connection to the drier motor and to a first heat generation device; a second connector providing a connection to the first heat generation device and to a second heat generation device; a microprocessor, electrically connected to the first and second connectors, for detecting a presence of an error condition with respect to the selected mode of the selection switch, based on the connections of the first and second connectors; a first relay, electrically connected between the microprocessor and first connector, for controlling power to the drier motor; a second relay, electrically connected between the microprocessor and first connector, for controlling power to the one of the two heat generation devices; a power supply for providing, under control of the microcomputer, operational power for the drier motor and first and second heat generation devices; and a display for displaying a message indicating the presence of the error condition.
摘要翻译：用于具有干燥电机和两个发热装置（即气体或电气）中的一个的干燥器的干燥器模块是气体或电气类型的干燥器的交换模块，并且可以连接到干燥器马达和气体干燥器的气体控制回路或电动干燥器的电加热器。在干燥器组装期间，模块被自适应地修改，例如，通过根据期望的模式设定开关位置，即预期的干燥器类型。模块包括用于选择气体模式和电气模式之一的选择开关; 第一连接器，其提供与所述干燥电动机和第一发热装置的连接; 第二连接器，其提供与第一发热装置和第二发热装置的连接; 电连接到第一和第二连接器的微处理器，用于基于第一和第二连接器的连接来检测相对于选择开关的选定模式的错误状态的存在; 第一继电器，电连接在微处理器和第一连接器之间，用于控制干燥电机的电力; 电连接在微处理器和第一连接器之间的第二继电器，用于控制两个发热装置之一的电力; 用于在微型计算机的控制下提供用于干燥电动机和第一和第二发热装置的操作功率的电源; 以及显示器，用于显示指示出现错误状况的消息。

2. 发明授权

US06722056B2 Drying vapor generation 有权
标题翻译：干燥蒸汽产生
公开(公告)号：US06722056B2
公开(公告)日：2004-04-20
申请号：US10098847
申请日：2002-03-15
申请人： Lawrence J. Myland
发明人： Lawrence J. Myland
IPC分类号： F26B2100
CPC分类号： H01L21/02052 , H01L21/67034
摘要： Drying semiconductor wafers or substrates by introducing an polar organic compound in liquid form into or onto means for enhancing evaporation within a process chamber and allowing the liquid to evaporate and form a drying vapor within the process chamber.
摘要翻译：通过将液体形式的极性有机化合物引入或加入到用于增强处理室内的蒸发的装置上并允许液体蒸发并在处理室内形成干燥蒸汽来干燥半导体晶片或基板。

3. 发明授权

US06834443B2 Full heat moving target grain drying system 有权
标题翻译：全热移目标谷物干燥系统
公开(公告)号：US06834443B2
公开(公告)日：2004-12-28
申请号：US10364249
申请日：2003-02-11
申请人： Brent J. Bloemendaal
发明人： Brent J. Bloemendaal
IPC分类号： F26B2100
CPC分类号： F26B25/22 , F26B17/126
摘要： A grain dryer control system uses the grain dryer discharge temperature to account for moisture reduction in the grain as it cools after discharge from the dryer. The control system includes moisture and temperature sensors and a means to control the discharge of grain from the grain dryer. Given a grain discharge temperature, a control temperature and a moisture reduction factor as a function of temperature, the control system calculates an expected moisture reduction in the grain as the grain cools. Grain is discharged from the dryer when the target moisture content after cooling added to the expected moisture reduction in the grain as the grain cools meets the measured grain moisture content in the dryer.
摘要翻译：谷物干燥器控制系统使用谷物干燥机排出温度来解释在从干燥器排放后冷却的谷物中的水分减少。控制系统包括水分和温度传感器以及控制谷物干燥机排出谷物的方法。给出颗粒排放温度，控制温度和湿度减少因子作为温度的函数，控制系统计算当谷物冷却时谷物的预期水分减少。当冷却时的目标含水量加入到谷物冷却后的谷物中的预期水分减少时，颗粒从干燥器排出，满足测量的干燥器中的谷物含水量。

4. 发明授权

US06298579B1 Fluidized-bed drying and classifying apparatus 有权
标题翻译：流化床干燥和分级装置
公开(公告)号：US06298579B1
公开(公告)日：2001-10-09
申请号：US09581898
申请日：2000-06-20
申请人： Noboru Ichitani , Isao Hayashi , Mikio Murao
发明人： Noboru Ichitani , Isao Hayashi , Mikio Murao
IPC分类号： F26B2100
CPC分类号： B03B4/00 , F26B3/08 , F26B21/12
摘要： A fluidized-bed drying and classifying apparatus is provided with a main body (10) in which a fluidized bed is formed to dry a granular material and to classify the same into fine particles and coarse particles. A perforated gas-distributing plate (12) is disposed in a lower part of a region in which a fluidized bed (14) is formed in the main body (10), a wind box having the shape of a hopper is disposed below the perforated gas-distributing plate. A dropped material discharge device (29) is connected to the lower end of the hopper-shaped wind box (16) to discharge the material dropped into the wind box (16). A gas supply system (110) is connected to the wind box (16) to supply a fluidizing gas that serves as a drying hot gas and a classifying gas into the wind box. A material supply opening portion (20) is mounted to the main body (10) to feed the granular material. A discharge chute (24) is connected to the main body (10) to discharge dried coarse particles. A gas discharge opening portion (56) is connected to the main body (10) to discharge an exhaust gas containing fine particles. The gas supply system (110) includes a flow controller (111) to control classification particle size by controlling the flow rate of the gas supplied into the wind box (16), and a temperature controller (112) to control drying degree through the adjustment of temperature of the hot gas supplied into the wind box (16) according to the adjusted flow rate.
摘要翻译：流化床干燥和分级装置设有主体（10），其中形成流化床以干燥颗粒材料并将其分类为细颗粒和粗颗粒。穿孔气体分布板（12）设置在主体（10）中形成有流化床（14）的区域的下部，具有料斗形状的风箱设置在穿孔气体分布板。下料装置（29）连接到料斗形风箱（16）的下端，以排放落入风箱（16）中的材料。气体供给系统（110）连接到风箱（16），以将用作干燥热气体和分级气体的流化气体供应到风箱中。材料供给开口部分（20）安装到主体（10）上以供给颗粒材料。卸料槽（24）连接到主体（10）以排出干燥的粗颗粒。气体排出开口部（56）与主体（10）连接，排出含有微粒子的废气。气体供给系统（110）包括通过控制供给到风箱（16）的气体的流量来控制分级粒子的流量控制器（111），以及通过调整来控制干燥程度的温度控制器（112）根据调节后的流量供给到风箱（16）中的热气的温度。

5. 发明授权

US06681497B2 Web dryer with fully integrated regenerative heat source and control thereof 有权
标题翻译：具有完全集成的再生热源的Web烘干机及其控制
公开(公告)号：US06681497B2
公开(公告)日：2004-01-27
申请号：US10295797
申请日：2002-11-15
申请人： Michael P. Bria , Alan D. Fiers , Andreas C. H. Rühl
发明人： Michael P. Bria , Alan D. Fiers , Andreas C. H. Rühl
IPC分类号： F26B2100
CPC分类号： F23G7/068 , F26B13/104 , F26B23/022
摘要： Integrated web dryer and regenerative heat exchanger, as well as a method of drying a web of material using the same. The apparatus and method of the present invention provides for the heating of air and the converting of VOCs to harmless gases in a fully integrated manner via the inclusion of a regenerative combustion device as an integral element of the drying apparatus.
摘要翻译：集成的网式干燥机和再生式热交换器，以及使用该干燥机的干燥材料的方法。本发明的装置和方法通过将再生燃烧装置作为干燥装置的整体元件，包括空气的加热和将VOC转化成无害气体，以完全集成的方式。

6. 发明授权

US06408535B1 Ozone conversion in semiconductor manufacturing 有权
公开(公告)号：US06408535B1
公开(公告)日：2002-06-25
申请号：US09384077
申请日：1999-08-26
申请人： Ralph Wayne Thomas
发明人： Ralph Wayne Thomas
IPC分类号： F26B2100
CPC分类号： H01L21/67017
摘要： A machine for processing semiconductor wafers and similar articles has an ozone remover connected to a processing chamber. The ozone remover has a light chamber surrounded by reflectors. Ozone and other processing gases and vapors flow out of the processing chamber and into the light chamber. Ultraviolet lights in the ozone remover flood the light chamber with ultraviolet light, converting ozone into oxygen. The amount of ozone released into the environment is reduced. A recirculation line receives the gases and vapors flowing out of the ozone remover. Oxygen and any remaining ozone are separated from other gas and vapor components and are recycled back to an ozone generator, to increase the ozone generator efficiency in supplying the machine with ozone.

7. 发明授权

US06253465B1 Multi-chamber fluidized bed-carrying classifier 有权
标题翻译：多室流化床载体分选机
公开(公告)号：US06253465B1
公开(公告)日：2001-07-03
申请号：US09582585
申请日：2000-06-28
申请人： Noboru Ichitani , Isao Hayashi , Mikio Murao
发明人： Noboru Ichitani , Isao Hayashi , Mikio Murao
IPC分类号： F26B2100
CPC分类号： F26B3/08 , B01J8/36 , B03B4/00
摘要： A multi-chamber fluidized bed classifying apparatus comprising; a main chamber having a fluidized bed arranged on wind boxes, through a perforated gas distributing plate is divided into a drying chamber and a classifying chamber by a partition plate, and a communication passage is defined under the plate. The wind boxes have respective lower ends connected to discharge devices respectively. The wind box is connected to a processing fluidization gas supply system for supplying the fluidization gas into the box, while the wind box is connected to a classifying fluidization gas supply system for supplying the fluidization gas into the box. The classifying fluidization gas supply system is provided with a flow control unit which adjusts the quantity of gas supplied into the classifying chamber to control the size of classified particles. The processing fluidization gas supply system is provided with a control unit, which adjusts the gas quantity and/or the temperature of gas supplied into the drying chamber.
摘要翻译：一种多室流化床分选装置，包括：通过穿孔气体分配板将具有设置在风箱上的流化床的主室通过隔板分成干燥室和分级室，并且在板下方形成连通通道。风箱具有各自的下端分别连接到排放装置。风箱连接到用于将流化气体供应到箱中的处理流化气体供应系统，同时风箱连接到用于将流化气体供应到箱中的分级流化气供应系统。分级流化气供给系统设有流量控制单元，该流量控制单元调节供给到分级室的气体量，以控制分级颗粒的尺寸。处理流化气体供给系统设置有控制单元，其调节供应到干燥室中的气体的气体量和/或温度。

8. 发明授权

US06598316B2 Apparatus to reduce contaminants from semiconductor wafers 失效
标题翻译：减少半导体晶圆污染物的设备
公开(公告)号：US06598316B2
公开(公告)日：2003-07-29
申请号：US10139062
申请日：2002-05-02
申请人： Alan Hiroshi Ouye
发明人： Alan Hiroshi Ouye
IPC分类号： F26B2100
CPC分类号： H01L21/67017
摘要： A line for processing semiconductor wafers into integrated circuits (ICs) is provided with an input-output (I-O) chamber to help purge residual contamination from the wafers before they are transferred into a processing line. After a cassette containing semiconductor wafers is placed in the chamber, it is sealed from the line and from the atmosphere. Then a dry inert gas such as nitrogen is dispersed into the top of the chamber to form a covering blanket around the wafers to displace and sweep away contaminants such as air-borne particles, moisture and organic vapors. While the purge gas is flowing, gasses and residual contamination are exhausted from the bottom of the chamber at a relatively slow rate until an intermediate pressure level is reached at which pressure droplets of liquid from residual moisture and vapor can no longer condense. Then the flow of purge gas is stopped and the pressure within the chamber is relatively quickly reduced to a base operating value (e.g., a fraction of a Torr), after which the wafers can be transferred to the line for processing into ICs.
摘要翻译：用于将半导体晶片处理成集成电路（IC）的线路设置有输入 - 输出（I-O）室，以在晶片被转移到处理线之前帮助清除晶片的残留污染物。将含有半导体晶片的盒放置在室中之后，将其从管线和大气中密封。然后将干燥的惰性气体如氮气分散到室的顶部，以在晶片周围形成覆盖毯，以移除和扫除诸如空气传播的颗粒，水分和有机蒸气之类的污染物。当吹扫气体流动时，气体和残留污染物以相对较慢的速率从室底部排出，直到达到中间压力水平，在该中间压力水平下，来自残余水分和蒸汽的液体的液滴不再能够冷凝。然后停止吹扫气体的流动，并且将腔室内的压力相对快速地降低到基本操作值（例如，Torr的一部分），之后将晶片转移到用于处理成IC的管线。

9. 发明授权

US06564473B2 High efficiency heat transfer using asymmetric impinging jet 失效
标题翻译：使用不对称冲击射流的高效热传递
公开(公告)号：US06564473B2
公开(公告)日：2003-05-20
申请号：US10037121
申请日：2001-10-22
申请人： Savas Aydore
发明人： Savas Aydore
IPC分类号： F26B2100
CPC分类号： F26B13/10 , F26B21/004
摘要： A method and apparatus for impingement of fluid onto a moving surface. The apparatus includes an asymmetric slot nozzle having an opening formed between an upstream wall and a downstream wall. The nozzle is disposed generally adjacent the surface onto which the fluid is to be impinged forming an impingement distance between each of the walls of the nozzle and the surface. The impingement distance of the upstream wall is greater than the impingement distance of the downstream wall such that at least a portion of the fluid is delivered through the nozzle in a direction that is counter to the machine direction.
摘要翻译：一种用于将流体冲击到移动表面上的方法和装置。该装置包括不对称狭缝喷嘴，其具有形成在上游壁和下游壁之间的开口。喷嘴大体上邻近流体所要撞击的表面设置，在喷嘴的每个壁和表面之间形成冲击距离。上游壁的冲击距离大于下游壁的冲击距离，使得至少一部分流体沿着与机器方向相反的方向通过喷嘴输送。

10. 发明授权

US06427360B1 Method for convectively heating permeable material 失效
标题翻译：对流加热可渗透材料的方法
公开(公告)号：US06427360B1
公开(公告)日：2002-08-06
申请号：US09769865
申请日：2001-01-25
申请人： Sunil K. Gupté
发明人： Sunil K. Gupté
IPC分类号： F26B2100
CPC分类号： B29B13/023 , B29C35/04 , B29C35/045 , B29K2067/00 , B29K2105/04 , B29K2105/0854 , B29K2995/0065 , B29L2031/3005
摘要： A method for preheating a permeable, thermoformable material having first and second sides includes supplying heated fluid to a fluid distribution system; regulating flow of the fluid such that fluid having a first temperature flows at a first velocity, and fluid having a second temperature less than the first temperature flows at a second velocity greater than the first velocity; introducing the fluid onto the first side of the material; and developing a suction on the second side of the material sufficient to draw the fluid through the material thereby convectively heating the material; wherein the flow of the fluid is regulated so as to transfer substantially uniform energy flux to the material.
摘要翻译：用于预热具有第一和第二侧面的可渗透的可热成形材料的方法包括将加热的流体供应到流体分配系统; 调节流体的流动，使得具有第一温度的流体以第一速度流动，并且具有小于第一温度的第二温度的流体以大于第一速度的第二速度流动; 将流体引入材料的第一侧; 并且在所述材料的第二侧上形成足以将流体吸引通过所述材料的吸力，从而对所述材料进行对流加热; 其中调节流体的流动以便将大致均匀的能量通量转移到材料上。

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