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    • 6. 发明授权
    • Extreme ultraviolet light generation apparatus
    • 极紫外光发生装置
    • US08710474B2
    • 2014-04-29
    • US13532365
    • 2012-06-25
    • Takeshi KodamaOsamu Wakabayashi
    • Takeshi KodamaOsamu Wakabayashi
    • G21K5/00G01K5/00B41C3/02
    • H05G2/008H05G2/006
    • An apparatus used with an external laser apparatus for generating extreme ultraviolet light includes a target storage unit for storing a target material, a nozzle unit having a through-hole in communication with the interior of the storage unit through which the target material is outputted, an electrode having a through-hole facing the nozzle unit, and a target detector for detecting a target formed of the target material and outputting a detection signal. A direct current voltage adjuster applies and adjusts a direct current between the target material and the electrode, a pressure adjuster applies and adjusts a pressure to the target material through gas, and a controller controls at least one of the direct current voltage adjuster and the pressure adjuster based on the detection signal from the target detector.
    • 与用于产生极紫外光的外部激光装置一起使用的装置包括用于存储目标材料的目标存储单元,具有与被输送目标材料的存储单元的内部连通的通孔的喷嘴单元, 电极,其具有面向喷嘴单元的通孔,以及目标检测器,用于检测由目标材料形成的目标并输出检测信号。 直流电压调节器施加并调节目标材料和电极之间的直流电流,压力调节器通过气体施加和调节对目标材料的压力,并且控制器控制至少一个直流电压调节器和压力 基于来自目标检测器的检测信号的调节器。
    • 8. 发明授权
    • Temperature sensor
    • 温度感应器
    • US08632245B2
    • 2014-01-21
    • US13243197
    • 2011-09-23
    • Seizo Fujimoto
    • Seizo Fujimoto
    • G01K7/00G01K5/00G01K9/00H01C3/04H01C7/02
    • G01K1/08G01K1/16
    • A temperature sensor is provided that can easily make possible stuffing with the filler or burying of the temperature detector element so that faster temperature response can be achieved. A temperature sensor has a closed-bottom tubular shaped case, a temperature detector element inserted and accommodated in the case, and a filler filled in the case and sealing the temperature detector element. The temperature sensor is provided with a filler flowing portion formed in a relative gap between the case and the temperature detector element along an insertion direction of the temperature detector element and having a gap relative to the temperature detector element larger than that relative to the remainder portion of the gap.
    • 提供了一种温度传感器,其可以容易地用填料填充或温度检测器元件的掩埋,从而可以实现更快的温度响应。 温度传感器具有封闭的底部管状壳体,插入并容纳在壳体中的温度检测器元件和填充在壳体中的填充物并密封温度检测器元件。 温度传感器设置有沿着温度检测器元件的插入方向形成在壳体和温度检测器元件之间的相对间隙中并且相对于温度检测器元件具有大于相对于其余部分的温度检测器元件的间隙的填充物流动部分 的差距。
    • 10. 发明授权
    • Micro-electro-mechanical-system temperature sensor
    • 微机电系统温度传感器
    • US08480302B2
    • 2013-07-09
    • US12892406
    • 2010-09-28
    • Jason P. GillDavid L. HarmonTimothy D. Sullivan
    • Jason P. GillDavid L. HarmonTimothy D. Sullivan
    • G01K5/00G01K7/00
    • G01K5/52
    • The present invention provides a micro-electro-mechanical-system (MEMS) temperature sensor that employs a suspended spiral comprising a material with a positive coefficient of thermal expansion. The thermal expansion of the suspended spiral is guided to by a set of guideposts to provide a linear movement of the free end of the suspended spiral, which is converted to an electrical signal by a set of conductive rotor azimuthal fins that are interdigitated with a set of conductive stator azimuthal fins by measuring the amount of capacitive coupling therebetween. Real time temperature may thus be measured through the in-situ measurement of the capacitive coupling. Optionally, the MEMS temperature sensor may have a ratchet and a pawl to enable ex-situ measurement.
    • 本发明提供了一种微电子机械系统(MEMS)温度传感器,其采用悬浮螺旋,其包括具有正的热膨胀系数的材料。 悬挂螺旋的热膨胀由一组导轨引导以提供悬挂螺旋的自由端的线性运动,其被一组导电转子方位角翅片转换成电信号,所述导电转子方位角翅片与组相互指向 通过测量导电定子方位翅片之间的电容耦合量。 因此可以通过电容耦合的原位测量来测量实时温度。 可选地,MEMS温度传感器可以具有棘轮和棘爪以使得能够进行非原位测量。