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    • 7. 发明授权
    • Pressure sensor, acceleration sensor, and method for manufacturing pressure sensor
    • 压力传感器,加速度传感器和制造压力传感器的方法
    • US09322726B2
    • 2016-04-26
    • US14565755
    • 2014-12-10
    • Kabushiki Kaisha Toshiba
    • Hideaki FukuzawaYoshihiko FujiYoshihiro HigashiMichiko Hara
    • G01L1/12G01L1/22G01P15/105G01L9/16
    • G01L1/2287G01L1/12G01L1/125G01L5/16G01L9/16G01P15/105
    • According to one embodiment, a pressure sensor includes a base and a sensor unit provided on the base. The sensor unit includes a transducing thin film having a first surface, a first strain sensing element provided on the first surface, and a second strain sensing element provided on the first surface. The first strain sensing element includes a first magnetic layer, a first film having a first oxygen concentration, a second magnetic layer provided between the first magnetic layer and the first film, and a first intermediate layer provided between the first and the second magnetic layer. The second strain sensing element includes a third magnetic layer, a second film having a second oxygen concentration different from the first concentration, a fourth magnetic layer provided between the third magnetic layer and the second film, and a second intermediate layer provided between the third and the fourth magnetic layer.
    • 根据一个实施例,压力传感器包括设置在基座上的底座和传感器单元。 传感器单元包括具有第一表面的转换薄膜,设置在第一表面上的第一应变感测元件和设置在第一表面上的第二应变感测元件。 第一应变传感元件包括第一磁性层,具有第一氧浓度的第一膜,设置在第一磁性层和第一膜之间的第二磁性层以及设置在第一和第二磁性层之间的第一中间层。 第二应变传感元件包括第三磁性层,具有不同于第一浓度的第二氧浓度的第二膜,设置在第三磁性层和第二膜之间的第四磁性层,以及设置在第三和第二膜之间的第二中间层 第四磁性层。
    • 10. 发明申请
    • Acceleration sensor and/or tilt sensor
    • 加速度传感器和/或倾斜传感器
    • US20120137777A1
    • 2012-06-07
    • US12960152
    • 2010-12-03
    • Gilbert ErdlerJoerg Franke
    • Gilbert ErdlerJoerg Franke
    • G01P15/105
    • G01P15/105
    • Acceleration and/or tilt sensor having a ferromagnetic fluid that is located in a receptacle, and the receptacle constitutes a neutral position for the fluid, and the fluid is permanently magnetized, and a magnetic field detector arrangement is located at the receptacle to detect a displacement of the fluid, wherein a portion of the fluid can be displaced relative to the receptacle from the neutral position to an operating position by an external force while maintaining a continuous surface with the portion of the fluid remaining in the neutral position, and the fluid returns to the neutral position after removal of the external force.
    • 具有位于容器中的铁磁流体的加速度和/或倾斜传感器,并且容器构成用于流体的中性位置,并且流体被永久磁化,并且磁场检测器装置位于容器处以检测位移 的流体,其中流体的一部分可以通过外力从中性位置移动到操作位置,同时保持与部分流体保持在中立位置的连续表面,并且流体返回 去除外力后到中立位置。