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    • 4. 发明授权
    • Hybrid cascade model-based predictive control system
    • 基于混合级联模型的预测控制系统
    • US07006900B2
    • 2006-02-28
    • US10619383
    • 2003-07-14
    • Liu ZhenduoFrank Huussen
    • Liu ZhenduoFrank Huussen
    • G05G23/00
    • G05B13/0275G05B11/42G05B13/04
    • A hybrid cascade Model-Based Predictive control (MBPC) and conventional control system for thermal processing equipment of semiconductor substrates, and more in particular for vertical thermal reactors is described. In one embodiment, the conventional control system is based on a PID controller. In one embodiment, the MBPC algorithm is based on both multiple linear dynamic mathematical models and non-linear static mathematical models, which are derived from the closed-loop modeling control data by using the closed-loop identification method. In order to achieve effective dynamic linear models, the desired temperature control range is divided into several temperature sub-ranges. For each temperature sub-range, and for each heating zone, a corresponding dynamic model is identified. During temperature ramp up/down, the control system is provided with a fuzzy control logic and inference engine that switches the dynamic models automatically according to the actual temperature. When a thermocouple (TC) temperature measurement is in failure, a software soft sensor based on dynamic model computing is used to replace the real TC sampling in its place as a control system input. Consequently, when a TC failure occurs during a process, the process can be completed without the loss of the semiconductor substrate(s) being processed.
    • 描述了用于半导体衬底的热处理设备的混合级联基于模型的预测控制(MBPC)和用于热处理设备的常规控制系统,并且更特别地用于垂直热反应器。 在一个实施例中,传统的控制系统基于PID控制器。 在一个实施例中,MBPC算法基于通过使用闭环识别方法从闭环建模控制数据导出的多线性动态数学模型和非线性静态数学模型。 为了实现有效的动态线性模型,期望的温度控制范围被分为几个温度子范围。 对于每个温度子范围,并且对于每个加热区,识别相应的动态模型。 在温度上升/下降期间,控制系统提供了一个模糊控制逻辑和推理机,可根据实际温度自动切换动态模型。 当热电偶(TC)温度测量失败时,使用基于动态模型计算的软件软传感器代替其作为控制系统输入的实际TC采样。 因此,当在处理期间发生TC故障时,可以完成该过程而不会损坏被处理的半导体衬底。
    • 6. 发明授权
    • Resilient control link assembly
    • 弹性控制连杆总成
    • US4375771A
    • 1983-03-08
    • US228764
    • 1981-01-27
    • Jacob Kobelt
    • Jacob Kobelt
    • F16H35/10G05G23/00G05G1/04
    • G05G23/00F16H35/10Y10T403/11Y10T403/32393Y10T74/20006Y10T74/20582
    • A resilient control link assembly for a control system for transmitting a mechanical signal from a transmitter to a receiver so as to prevent component damage resulting from force overload situations due to response differences of components, fluid pressure failure, etc. The assembly includes two link elements which cooperate with the receiver and transmitter and are hinged together at a main hinge for relative swinging thereabouts from a datum relationship. Two following members are hinged to the first link element for rotation about a follower hinge spaced from the main hinge and are adapted to contact the second link element. A resilient member interconnects the two following members to force the members to cooperate with the second link element to maintain the link element in the datum relationship. When the datum relationship is disturbed, the following members are moved apart and the resilient means opposes this movement tending to draw the link elements back into the datum relationship.
    • 一种用于控制系统的弹性控制链路组件,用于将机械信号从发射器发送到接收器,以便防止由于部件的响应差异,流体压力故障等而由于力过载状况而导致的部件损坏。该组件包括两个连接元件 其与接收器和发射器配合,并且在主铰链处铰接在一起,以从基准关系相对摆动。 两个跟随构件铰接到第一连杆元件上,用于围绕与主铰链间隔开的从动铰链旋转并且适于接触第二连杆元件。 弹性构件将两个随后的构件互连,以迫使构件与第二连杆构件协作以将连杆构件保持在基准关系中。 当基准关系受到干扰时,以下构件被移开并且弹性装置反对这种移动趋向于将连接元件拉回到基准关系中。
    • 7. 发明授权
    • Positioning device with a pivotable positioning member
    • 具有可枢转定位构件的定位装置
    • US4266441A
    • 1981-05-12
    • US952333
    • 1978-10-18
    • Yves A. H. Stordeur
    • Yves A. H. Stordeur
    • G05G23/00B60H1/00G05G1/04G05G5/06
    • G05G1/04B60H1/0065Y10T74/20612Y10T74/2063Y10T74/2066
    • A positioning device with a pivotable positioning member. The positioning member comprises a guide lug spaced from and parallel to its pivot axis, the guide lug having a head portion which may be introduced into an enlarged end of a guideway in a support but which maintains the positioning member parallel to the pivot axis. An abutment prevents the guide lug from re-entering the enlarged end of the guideway. A strip integrally formed with the positioning member has a protruding portion which bears against one side of the support tensioning the strip. The pivotal mounting is afforded by co-operable detents including a pivot pin (e.g. on the support) with a tapered end which snaps into an aperture defined by a pair of integrally formed flexible strips (e.g. on the positioning member). The oblong aperture permits the pivot pin to shift therein as the pointer at the other end of the positioning member undergoes substantially rectilinear displacement. The positioning device may be used to control the position of a motor vehicle air conditioning vent flap.
    • 具有可枢转定位构件的定位装置。 定位构件包括与其枢转轴线间隔开并平行于其枢转轴线的导向凸耳,该导向凸耳具有头部,该头部可以被引入到支撑件中的导轨的扩大端中,但是其保持定位构件平行于枢转轴线。 支座防止引导片重新进入导轨的扩大端。 与定位构件一体形成的条带具有突出部分,该突出部分抵靠支撑件的一侧张紧该条带。 枢轴安装由包括枢轴销(例如在支撑件上)的可共同操作的棘爪提供,锥形端部卡入到由一对整体形成的柔性条(例如定位构件)限定的孔中。 当定位构件的另一端的指示器经历基本上直线位移时,椭圆形孔允许枢轴销在其中移动。 定位装置可用于控制机动车辆空调通风口的位置。
    • 9. 发明授权
    • Linkage quick-connect device
    • 连接快速连接设备
    • US3832074A
    • 1974-08-27
    • US38262473
    • 1973-07-25
    • FORD MOTOR CO
    • DEHAR D
    • F16B7/04E05B65/20F16B5/12G05G1/00G05G23/00F16C11/00
    • F16B5/123G05G23/00Y10T403/32967
    • A linkage quick-connect device for coupling a threaded link rod to a lever member having an aperture therein. The quick-connect device comprises a swivel pin having a cylindrical head and a shank, the latter being adapted to have snap-fit into the aperture in the lever and to be retained therein. The swivel pin is axially slotted through its head into the shank, the slot terminating short of the shank end remote from the cylindrical head whereby the symmetrical body portions are hingedly connected for flexing movement toward and away from each other. The cylindrical head has a cylindrical recess extending in a direction normal to the swivel pin axis and has gripping means engageable with the threaded link rod to prevent axial disengagement of the latter from the swivel pin head in a direction axially of the longitudinal axis of the link rod.
    • 一种连接快速连接装置,用于将螺纹连杆连接到其中具有孔的杆构件。 快速连接装置包括具有圆柱形头部和柄部的旋转销,后者适于具有卡扣配合到杆中的孔中并保持在其中。 旋转销轴向地穿过其头部开口插入柄中,该狭槽终止于远离圆柱形头部的柄端部,这样对称的主体部分被铰接地连接起来以使彼此朝向和远离的方向移动。 圆柱形头部具有沿着垂直于旋转销轴线的方向延伸的圆柱形凹部,并且具有可与螺纹连杆接合的夹持装置,以防止其沿着连杆的纵向轴线的轴向方向从旋转销头部轴向脱离 竿。