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    • 5. 发明授权
    • Magnetostatic wave device including magnetic garnet layer having an
inclined side face
    • 静电波装置,包括具有倾斜侧面的磁性石榴石层
    • US6091313A
    • 2000-07-18
    • US222348
    • 1998-12-29
    • Hitoyoshi Kurata
    • Hitoyoshi Kurata
    • H01F10/24H03H2/00H01P7/00
    • H01F10/245H03H2/001
    • For patterning a magnetic garnet layer formed on the surface of a non-magnetic garnet substrate, the magnetic garnet layer, an intermediate layer and a resist layer are formed in this order from the substrate side, the intermediate layer and the resist layer are shaped in the state of an island, and then the magnetic garnet layer is etched in a hot phosphoric acid solution, the intermediate layer being composed of a material which is more soluble in the hot phosphoric acid solution than the resist layer so that the etched magnetic garnet layer side face is formed as a gently inclined face and that a conductor pattern extending on both the non-magnetic garnet substrate and magnetic garnet layer surfaces can be formed without breaking, or a protective resist layer being formed on the reverse surface of the substrate so that the application angle of a magnetic field to the magnetic garnet layer surface can be accurately controlled.
    • 为了对形成在非磁性石榴石基板表面上的磁性石榴石层进行图案化,从基板侧,中间层和抗蚀剂层的顺序形成磁性石榴石层,中间层和抗蚀剂层 岛状态,然后在热磷酸溶液中蚀刻磁性石榴石层,中间层由比抗蚀剂层更易溶于热磷酸溶液的材料构成,使得蚀刻的磁性石榴石层 侧面形成为轻轻的倾斜面,并且可以在不破坏的状态下形成在非磁性石榴石基板和磁性石榴石层表面上延伸的导体图案,或者在基板的背面上形成保护性抗蚀剂层,使得 可以精确地控制磁场对磁性石榴石层表面的施加角度。