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    • 6. 发明授权
    • Method of isolating semiconductor devices and arrays of memory
integrated circuitry
    • 隔离半导体器件和存储器集成电路阵列的方法
    • US5292683A
    • 1994-03-08
    • US71752
    • 1993-06-09
    • Charles H. DennisonTrung T. Doan
    • Charles H. DennisonTrung T. Doan
    • H01L21/76H01L21/108H01L21/762H01L21/8234H01L21/8242H01L27/108H01L29/78H01L21/304
    • H01L27/10852H01L21/76224H01L21/823481Y10S148/05
    • A semiconductor processing device isolation method includes: a) providing non-LOCOS insulating device isolation blocks by trench and refill technique on a substrate to define recessed moat volume therebetween; b) providing gate dielectric within the moat volume; c) providing a layer of electrically conductive material over the substrate and gate dielectric to a thickness sufficient to completely fill the moat volume between adjacent isolation blocks; d) chemical-mechanical polishing the layer of electrically conductive material to provide a planarized upper electrically conductive material surface; e) photopatterning and etching the layer of electrically conductive material to provide an electrically conductive runner which overlies a plurality of the isolation blocks and to selectively remove the electrically conductive material from within selected regions of moat volume to define field effect transistor gates within the moat volume; and f) providing conductivity enhancing impurity through the selected regions of moat volume into the substrate to define source/drain regions adjacent the field effect transistor gates. The invention also includes an array of memory integrated circuitry.
    • 半导体处理器件隔离方法包括:a)通过沟槽和再填充技术在衬底上提供非LOCOS绝缘器件隔离块,以在其间限定凹陷的沟槽体积; b)在护城河容积内提供栅极电介质; c)在衬底和栅极电介质上提供一层导电材料,其厚度足以完全填充相邻隔离块之间的护城河体积; d)化学机械抛光导电材料层以提供平坦化的上导电材料表面; e)对导电材料层进行光图案化和蚀刻,以提供覆盖在多个隔离块上的导电浇道,并且选择性地从导流槽体积的选定区域内去除导电材料,以在护城河体积内限定场效应晶体管栅极 ; 以及f)通过所选择的沟槽体积的区域提供导电性增强杂质到衬底中以限定与场效应晶体管栅极相邻的源极/漏极区域。 本发明还包括一组存储器集成电路。