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1. 发明授权

US08629384B1 Photomultiplier tube optimized for surface inspection in the ultraviolet 有权
标题翻译：光电倍增管优化用于紫外线的表面检测
公开(公告)号：US08629384B1
公开(公告)日：2014-01-14
申请号：US12910230
申请日：2010-10-22
申请人： Stephen Biellak , Daniel Kavaldjiev , Stuart Friedman
发明人： Stephen Biellak , Daniel Kavaldjiev , Stuart Friedman
IPC分类号： H01J40/14 , H01J40/00 , H01J40/06
CPC分类号： H01J43/28
摘要： Disclosed herein is a PhotoMultiplier Tube (PMT) designed for use with a surface inspection system such as the Surfscan system, which operates at 266 nm wavelength. The inventive PMT is high efficiency, low noise, and low gain, a combination of features that is specific to the application and contrary to the features of PMT's in the art. The inventive PMT is designed to be tuned to a specific narrow band wavelength of incident light, thereby optimizing the QE at that wavelength. It is further designed to combine a small number of dynodes each having substantially higher secondary electron gain than typical dynodes. By designing the PMT in this way, the excess noise factor is dramatically reduced, yielding a much improved S/N, while still maintaining the overall PMT gain in the lower range suitable for use in a surface inspection system.
摘要翻译：本文公开了一种设计用于诸如Surfscan系统的表面检查系统的光电倍增管（PMT），其在266nm波长下操作。本发明的PMT具有高效率，低噪声和低增益，这是特定于应用并且与本领域的PMT的特征相反的特征的组合。本发明的PMT被设计成调谐到入射光的特定窄带波长，从而优化该波长处的QE。它还被设计成组合少量的具有比典型倍增电极具有显着更高的二次电子增益的倍增电极。通过以这种方式设计PMT，过多的噪声系数大大降低，产生了大大改善的S / N，同时仍将PMT增益保持在适用于表面检测系统的较低范围内。

2. 发明授权

US08546768B2 Device for generating an ion beam with magnetic filter 有权
标题翻译：用磁性过滤器生成离子束的装置
公开(公告)号：US08546768B2
公开(公告)日：2013-10-01
申请号：US13063749
申请日：2009-09-14
申请人： Jacques Gierak , Ralf Jede
发明人： Jacques Gierak , Ralf Jede
IPC分类号： H01J40/00 , H01J47/00
CPC分类号： H01J27/26 , H01J37/08
摘要： A device for generating an ion beam includes a support; a liquid metal ion source connected to the support at the lower end of the ion source and surrounded by a cryogenic trap which is capable of preventing volatile chemicals from reaching the ion source; an ion extraction means for extracting the ions emitted by the source through an opening disposed near the upper end of the ion source; and means for generating a magnetic field in the opening of the extraction means, the generated magnetic field capable of preventing charged particles from reaching the ion source.
摘要翻译：用于产生离子束的装置包括支撑件; 液体金属离子源连接到离子源下端的支撑体，并被能够防止挥发性化学物质到达离子源的低温陷阱围绕; 离子提取装置，用于通过设置在离子源的上端附近的开口提取由源发射的离子; 以及用于在提取装置的开口中产生磁场的装置，所产生的磁场能够防止带电粒子到达离子源。

3. 发明授权

US08478373B2 Optical element and apparatus comprising transparent superconducting material 有权
标题翻译：包括透明超导材料的光学元件和设备
公开(公告)号：US08478373B2
公开(公告)日：2013-07-02
申请号：US12937133
申请日：2009-04-09
申请人： Daniel Brandt
发明人： Daniel Brandt
IPC分类号： H01J40/00
CPC分类号： G02F1/0009 , B82Y20/00 , G02F1/218 , G02F1/29 , G02F1/31 , G02F1/3556 , G02F2001/0152 , G02F2001/213 , G02F2203/05 , Y10T428/31678
摘要： An optical element is disclosed which includes transparent superconductor material.
摘要翻译：公开了一种包括透明超导体材料的光学元件。

4. 发明授权

US08411183B2 Solid-state imaging device and driving method as well as electronic appartus 有权
标题翻译：固态成像装置和驱动方法以及电子配件
公开(公告)号：US08411183B2
公开(公告)日：2013-04-02
申请号：US13064371
申请日：2011-03-22
申请人： Akihiko Kato , Yusuke Oike
发明人： Akihiko Kato , Yusuke Oike
IPC分类号： H04N3/14 , H04N5/335 , H01J40/00 , C12Q1/68
CPC分类号： H04N5/357 , H01L27/14609 , H01L27/14643 , H01L27/14656 , H04N5/3532 , H04N5/3592 , H04N5/361
摘要： A solid-state imaging device includes: a CMOS image sensor including a plurality of pixels disposed in an array and each including a light reception element, a discharging unit, a charge accumulation section, a transfer unit, a reset unit, an amplification unit, and a selection unit; and a control unit adapted to generate a selection pulse for rendering the selection unit operative to control operation of the CMOS image sensor.
摘要翻译：一种固态成像装置，包括：CMOS图像传感器，包括排列成阵列的多个像素，每个像素包括光接收元件，放电单元，电荷累积部，转印单元，复位单元，放大单元，和选择单元; 以及控制单元，其适于产生用于使所述选择单元操作以控制所述CMOS图像传感器的操作的选择脉冲。

5. 发明授权

US08373122B2 Spheroidal charged particle energy analysers 有权
标题翻译：球形带电粒子能量分析仪
公开(公告)号：US08373122B2
公开(公告)日：2013-02-12
申请号：US12739513
申请日：2008-03-31
申请人： Nikolay Alekseevich Kholine , Dane Cubric , Ikuo Konishi
发明人： Nikolay Alekseevich Kholine , Dane Cubric , Ikuo Konishi
IPC分类号： H01J40/00
CPC分类号： H01J49/484
摘要： Charged particle energy analysers enabling simultaneous high transmission and energy resolution are described. The analysers have an electrode structure (11) comprising coaxial inner and outer electrodes (14, 15) having inner and outer electrode surfaces (IS, OS) respectively. The inner and outer electrode surfaces are defined, at least in part, by spheroidal surfaces having meridonal planes of symmetry orthogonal to a longitudinal axis of the electrode structure (11). The inner and outer electrode surfaces are generated by rotation, about the longitudinal axis, of arcs of two non-concentric circles having different radii R2 and R1 respectively, R2 being greater than R1. The distance of the outer electrode surface from the longitudinal axis in the respective meridonal plane is R01 and the distance of the inner electrode surface from the longitudinal axis in the respective plane is R02 and R1, R2, R01 and R02 have a defined relationship.
摘要翻译：描述了实现同时高传输和能量分辨率的带电粒子能量分析器。分析仪具有分别具有内外电极表面（IS，OS）的同轴内外电极（14,15）的电极结构（11）。内电极表面和外电极表面至少部分地由具有与电极结构（11）的纵向轴线正交的对称面对称平面的球形表面限定。内电极表面和外电极表面分别通过具有不同半径R2和R1的两个非同心圆的圆弧的纵轴旋转产生，R2大于R1。外电极表面与各个子午线平面中纵轴的距离为R01，内平面与纵轴的距离为R02，R1，R2，R01，R02为关系。

6. 发明申请

US20110012009A1 IMAGE SENSOR 有权
标题翻译：图像传感器
公开(公告)号：US20110012009A1
公开(公告)日：2011-01-20
申请号：US12561277
申请日：2009-09-17
申请人： Ming-Hung Chuang
发明人： Ming-Hung Chuang
IPC分类号： H01L31/113 , H01J40/00
CPC分类号： H01L27/14609 , H04N5/3741 , H04N5/3745
摘要： An image sensor includes a light-sensing element, a first transistor, and a second transistor. The light-sensing element has a first end and a second end electrically connected to a select line. The first transistor has a first end electrically connected to a first control line, a control end electrically connected to the first end, and a second end electrically connected to the first end of the light-sensing element. The second transistor has a first end electrically connected to a voltage source, a control end electrically connected to the first end of the light-sensing element, and a second end electrically connected to an output line. The light-sensing element uses the material of silicon rich oxide so that the light-sensing element can sense the luminance variance and have the characteristic of the capacitor for the level boost.
摘要翻译：图像传感器包括光感测元件，第一晶体管和第二晶体管。光感测元件具有电连接到选择线的第一端和第二端。第一晶体管具有电连接到第一控制线的第一端，与第一端电连接的控制端，以及电连接到光感测元件的第一端的第二端。第二晶体管具有电连接到电压源的第一端，与光感测元件的第一端电连接的控制端，以及电连接到输出线的第二端。感光元件使用富硅氧化物的材料，使得感光元件可以感测亮度方差，并具有用于电平提升的电容器的特性。

7. 发明授权

US07795601B2 Method and apparatus to improve lithography throughput 有权
标题翻译：提高光刻产量的方法和装置
公开(公告)号：US07795601B2
公开(公告)日：2010-09-14
申请号：US11421590
申请日：2006-06-01
申请人： Chin-Hsiang Lin , Jui-Chung Peng , Yung-Cheng Chen , Shy-Jay Lin
发明人： Chin-Hsiang Lin , Jui-Chung Peng , Yung-Cheng Chen , Shy-Jay Lin
IPC分类号： C12Q1/68 , H01J40/00
CPC分类号： G03F7/70991 , G03F7/70466
摘要： The present disclosure provides a lithography apparatus with improved lithography throughput. The lithography apparatus includes a first lens system; a first substrate stage configured to receive a first radiation energy from the first lens system, and designed operable to move a substrate during an exposing process; a second lens system, having a higher resolution than that of the first lens system; and a second substrate stage approximate to the first substrate stage and configured to receive a second radiation energy from the second lens system, and designed operable to receive the substrate from the first substrate stage and move the substrate.
摘要翻译：本公开提供了具有改进的光刻产量的光刻设备。光刻设备包括第一透镜系统; 第一衬底台，被配置为从所述第一透镜系统接收第一辐射能量，并且被设计为可操作以在曝光过程期间移动衬底; 第二透镜系统，具有比第一透镜系统更高的分辨率; 以及第二衬底台，其近似于所述第一衬底台并且被配置为从所述第二透镜系统接收第二辐射能量，并且被设计为可操作以从所述第一衬底台接收所述衬底并移动所述衬底。

8. 发明申请

US20100111580A1 LIGHT ABSORPTION DEVICE, FIXING UNIT COMPRISING THE LIGHT ABSORPTION DEVICE AND IMAGE FORMING APPARATUS COMPRISING THE FIXING UNIT 有权
标题翻译：光吸收装置，包含光吸收装置的固定装置和包含固定装置的图像形成装置
公开(公告)号：US20100111580A1
公开(公告)日：2010-05-06
申请号：US12604105
申请日：2009-10-22
申请人： Sun-Rock CHOI , Dae-Hwan Kim , Seung-Jin Oh , Joo-Ho Kim , Woo-Kyu Kim
发明人： Sun-Rock CHOI , Dae-Hwan Kim , Seung-Jin Oh , Joo-Ho Kim , Woo-Kyu Kim
IPC分类号： G03G15/20 , H01J40/00
CPC分类号： G03G15/2007 , G03G2215/2048
摘要： Disclosed are a light absorption device, a fixing unit including the same and an image forming apparatus including such fixing unit. The light absorption device includes a plurality of dielectric layers containing nano-rods. Surface plasmon resonance generated in response to certain wavelengths corresponding to the dielectric constants of the dielectric layers can result in an improvement in the light absorption efficiency. Further improvements can be realized by adjusting the dielectric constants of the dielectric layers.
摘要翻译：公开了一种光吸收装置，包括该光吸收装置的定影单元和包括该定影单元的图像形成装置。光吸收装置包括多个包含纳米棒的电介质层。响应于与电介质层的介电常数相对应的某些波长产生的表面等离子体共振可导致光吸收效率的改善。可以通过调节介电层的介电常数来实现进一步的改进。

9. 发明授权

US07683317B2 Method and system for detecting hidden defects 有权
标题翻译：检测隐藏缺陷的方法和系统
公开(公告)号：US07683317B2
公开(公告)日：2010-03-23
申请号：US11532465
申请日：2006-09-15
申请人： Dror Shemesh
发明人： Dror Shemesh
IPC分类号： H01J40/00 , H01J47/00
CPC分类号： H01J37/28 , H01J2237/057
摘要： A method for detecting hidden defects and patterns, the method includes: receiving an object that comprises an opaque layer positioned above an intermediate layer; defining an energy band in response to at least one characteristic of the opaque layer and at least one characteristic of a scanning electron microscope; illuminating the object with a primary electron beam; and generating images from electrons that arrive to a spectrometer having an energy within the energy band. A scanning electron microscope that includes a stage for supporting an object that comprises an opaque layer positioned above an intermediate layer; a controller, adapted to receive or define an energy band in response to at least one characteristic of the opaque layer and at least one characteristic of a scanning electron microscope; illumination optics adapted to illuminate the object with a primary electron beam; an electron spectrometer, controlled by the controller such as to selectively reject electrons in response to the defined energy band; and a processor, coupled to the spectrometer, adapted to generate images from detection signals provided by the spectrometer.
摘要翻译：一种用于检测隐藏的缺陷和图案的方法，所述方法包括：接收包含位于中间层上方的不透明层的对象; 响应于不透明层的至少一个特性和扫描电子显微镜的至少一个特征限定能带; 用一次电子束照射物体; 以及从到达具有能带内的能量的光谱仪的电子产生图像。一种扫描电子显微镜，其包括用于支撑物体的台，所述台包括位于中间层上方的不透明层; 控制器，适于响应于所述不透明层的至少一个特性和扫描电子显微镜的至少一个特性接收或限定能带; 适于用一次电子束照射物体的照明光学器件; 由控制器控制的电子光谱仪，以便响应于限定的能带选择性地拒绝电子; 以及耦合到所述光谱仪的处理器，适于从由所述光谱仪提供的检测信号产生图像。

10. 发明申请

US20090295960A1 PHOTODIODE, PHOTODIODE ARRAY AND IMAGE PICKUP DEVICE 审中-公开
标题翻译：光电子，光电子阵列和图像拾取器件
公开(公告)号：US20090295960A1
公开(公告)日：2009-12-03
申请号：US12473919
申请日：2009-05-28
申请人： Hiroshi INADA , Youichi NAGAI
发明人： Hiroshi INADA , Youichi NAGAI
IPC分类号： H04N5/335 , H01J40/00
CPC分类号： H04N5/33 , H01L27/1446 , H01L31/02019 , H01L31/167
摘要： A photodiode that can obtain a clear signal or image in a case in which noise that is not limited to a dark current is high, a photodiode array, and an image pickup device are provided. The photodiode includes a sensor section that is provided on a first semiconductor having a band gap energy which allows input light to be received; a modulated light-emitting section that is positioned behind the sensor section with respect to the input light, and that emits modulated light to the sensor section; and a signal processor that is formed on a second semiconductor which transmits the modulated light, and that is positioned between the sensor section and the modulated light emitting section.
摘要翻译：提供了在不限于暗电流的噪声的情况下能够获得清晰的信号或图像的光电二极管，光电二极管阵列和图像拾取装置。光电二极管包括传感器部分，其设置在具有允许接收输入光的带隙能量的第一半导体上; 调制发光部，其相对于所述输入光定位在所述传感器部的后方，并且向所述传感器部发射调制光; 以及信号处理器，其形成在传输调制光的第二半导体上，并且位于传感器部分和调制发光部分之间。

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