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    • 3. 发明授权
    • Air flow meter
    • 空气流量计
    • US07992435B2
    • 2011-08-09
    • US12512512
    • 2009-07-30
    • Rintaro MinamitaniKeiji HanzawaAkio Yasukawa
    • Rintaro MinamitaniKeiji HanzawaAkio Yasukawa
    • G01F1/68
    • G01F1/6845
    • In a structure in which peripheral part of a diaphragm section of an electrical insulating film is covered with a protective film made of an organic material, the resistor wire on the diaphragm section crosses the peripheral part of the diaphragm section. At a place where a narrow wire of a resistance temperature detector and the like crosses the peripheral part of the diaphragm section, the protective film is thinner than the other part, and the dust impact resistance is reduced. At a place where a heating resistor wire connected to a heating resistor body or resistance temperature detector wires connected to resistance temperature detector bodies cross a periphery of the diaphragm section, a film component protruding from an electrical insulating film is arranged side by side with the heating resistor wire or the resistance temperature detector wires.
    • 在电绝缘膜的隔膜部分的周边部分被有机材料制成的保护膜覆盖的结构中,隔膜部分上的电阻器线与隔膜部分的周边部分交叉。 在电阻温度检测器等的细线与隔膜部的周边部分交叉的地方,保护膜比其他部分薄,防尘性降低。 在与加热电阻体连接的加热电阻线或与电阻温度检测体相连的电阻温度检测器线与隔膜部分的周边交叉的位置处,从电绝缘膜突出的膜部件并排配置, 电阻丝或电阻温度检测器线。
    • 4. 发明授权
    • Air flow measuring instrument having dust particle diverting structure
    • 气流测量仪具有粉尘颗粒转向结构
    • US07942053B2
    • 2011-05-17
    • US12261700
    • 2008-10-30
    • Naoki SaitoTakeshi MorinoYuki OkamotoKeiji HanzawaHiromu KikawaAkio Yasukawa
    • Naoki SaitoTakeshi MorinoYuki OkamotoKeiji HanzawaHiromu KikawaAkio Yasukawa
    • G01F1/68
    • G01F1/6845G01F5/00G01F15/12
    • An air flow measuring instrument, comprising: an auxiliary passage 8 arranged inside a main passage through which fluid flows, a tabular member 5 on which a pattern of a heating resistor for measuring an air flow is provided on one face 5a, the tabular member being disposed inside the auxiliary passage so that the one face 5a on which the heating resistor pattern of the tabular member is provided is disposed along a flow of fluid inside the auxiliary passage 8, a heating resistor pattern-side fluid passage 8a portion formed so that the fluid flows between the face 5a and a passage-forming surface 8d of the auxiliary passage, and a back-surface 8b side fluid passage portion formed so that fluid flows between a face 5b on a side opposite to the face of the tabular member and the passage-forming surface of the auxiliary passage. Guidance portion 13 guiding dust that collides against the end portion to back-surface side fluid passage portion 8b side is provided on upstream-side end of tabular member.
    • 一种气流测量仪器,包括:辅助通道8,布置在流体流过的主通道内部;平板状构件5,在一个面5a上设置有用于测量气流的加热电阻器的图案,平板状构件为 设置在辅助通道内部,使得设置有平板状构件的加热电阻体图形的一个面5a沿着辅助通道8内的流体流布置,形成的加热电阻器图案侧流体通道8a部分, 流体在表面5a和辅助通道的通道形成表面8d之间流动,并且后表面8b侧流体通道部分形成为使得流体在与板状构件的表面相对的一侧的表面5b和 辅助通道的通道形成表面。 引导部分13引导与端部至后表面侧流体通道部分8b侧碰撞的灰尘,该引导部分13设置在平板状部件的上游侧端部。
    • 5. 发明授权
    • Heating resistor type flow measuring device housing structure having projection and recess for preventing mis-installation
    • 加热电阻式流量测量装置壳体结构具有用于防止错误安装的突出和凹陷
    • US07469582B2
    • 2008-12-30
    • US11905490
    • 2007-10-01
    • Naoki SaitoMasayuki KozawaShinya IgarashiHiromu KikawaAkio YasukawaAkira Takasago
    • Naoki SaitoMasayuki KozawaShinya IgarashiHiromu KikawaAkio YasukawaAkira Takasago
    • G01F1/68
    • G01F1/684F02D41/187G01F1/6842G01F1/688G01F1/69G01F5/00
    • A heating resistor type flow measuring device comprising a housing having a support part provided between a frame body and a connector and connected to the mounting part of a fluid passage, a flow rate detection element held on the frame body side of the housing, and an electronic circuit held on the housing and connected electrically to the flow rate detection element and the connector, wherein the electronic circuit is held on the frame body side of the housing and positioned in the fluid passage, a member with the rigidity higher than the material of the main structural member of the housing is formed integrally with the support part, the housing is fixed to the fluid passage through the member with high rigidity. A metal plate is inserted into the support part so as to increase rigidity. Further, a distance is provided between the support part and a metal plate forming a route for conducting the heat transferred to the metal base fixing an electronic circuit substrate by a plastic mold so as to form a structure obstructing a heat transfer, or a clearance is provided in a portion spaced by the plastic mold between the support part and the metal base so as to form a structure obstructing a heat transfer.
    • 一种加热电阻器型流量测量装置,包括:壳体,其具有设置在框体和连接器之间的支撑部,并且连接到流体通道的安装部分;流量检测元件,其保持在壳体的框体侧;以及 电子电路保持在壳体上并与流量检测元件和连接器电连接,其中电子电路被保持在壳体的框架主体侧并且定位在流体通道中,刚性高于 壳体的主结构构件与支撑部一体地形成,壳体通过构件以高刚性固定到流体通道。 将金属板插入支撑部,以增加刚性。 此外,在支撑部分和金属板之间设置一个距离,该金属板形成用于传导通过塑料模具固定电子电路基板的传送到金属基座的热量的路线,以便形成阻碍热传递的结构,或者间隙是 设置在由塑料模具在支撑部分和金属基座之间间隔开的部分中,以形成阻碍热传递的结构。
    • 8. 发明申请
    • Measurement Element
    • 测量元件
    • US20100218614A1
    • 2010-09-02
    • US12707438
    • 2010-02-17
    • Rintaro MINAMITANIKeiji HanzawaAkio Yasukawa
    • Rintaro MINAMITANIKeiji HanzawaAkio Yasukawa
    • G01L9/02
    • G01N27/18G01F1/6842G01F1/6845G01F1/692G01P5/10
    • An object of the present invention is to provide a structure unlikely to break in the dicing process while allowing easy execution of screening, for a measurement element in which a resistor constituting a heater is formed on a thin wall part thermally insulated from a semiconductor substrate by providing a cavity part formed in the semiconductor substrate.Provided is a measurement element including: a semiconductor substrate; an electrical insulating film formed on the semiconductor substrate; a resistor formed on the electrical insulating film, the resistor constituting a heater; and a cavity formed by removing a portion of the semiconductor substrate that corresponds to a region where a body part of the resistor is formed. The region where the body part of the resistor is formed is formed into a thin wall part by the cavity, and any of an opening and a slit is formed in a portion of the thin wall part in such a manner as to penetrate the thin wall part in a thickness direction thereof. The measurement element has a film formed covering a region of the opening or the slit.
    • 本发明的目的是提供一种在切割过程中不易破裂的结构,同时允许轻松执行筛选,对于其中构成加热器的电阻器形成在与半导体衬底热绝缘的薄壁部分上的测量元件 提供形成在半导体衬底中的空腔部分。 提供了一种测量元件,包括:半导体衬底; 形成在所述半导体基板上的电绝缘膜; 形成在所述电绝缘膜上的电阻器,所述电阻器构成加热器; 以及通过去除对应于形成有电阻体的主体部分的区域的半导体衬底的一部分而形成的腔。 形成电阻器的主体部分的区域通过空腔形成为薄壁部分,并且在薄壁部分的一部分中形成任何开口和狭缝以穿透薄壁 部分在其厚度方向上。 测量元件具有覆盖开口或狭缝的区域的膜。