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    • 5. 发明申请
    • ROLL-TO-ROLL TYPE THIN FILM PATTERN FORMING APPARATUS
    • 滚筒式滚筒式薄膜图案形成装置
    • US20100050941A1
    • 2010-03-04
    • US12400379
    • 2009-03-09
    • Dong Joo ShinJeong Min ChoYoung Woo Lee
    • Dong Joo ShinJeong Min ChoYoung Woo Lee
    • C23C16/00C23C14/34
    • C23C14/042C23C14/562
    • An apparatus for forming a thin film pattern according to an aspect of the invention may include: a vacuum chamber including a mask loading part and a film forming part having a window openable or closable with respect to the mask loading part; an unwinding roll and a winding roll disposed in the film forming part and running a sheet; a source containing unit accommodating a deposition source and mounted such that the deposition source is evaporated to deposit a thin film on the sheet located on the evaporation area; at least one mask having a pattern defining a pattern of the thin film to be deposited on the sheet, and arranged in the mask loading part; a mask moving unit moving the at least one mask arranged in the mask loading part toward a deposition position of the film forming part or moving the mask in a reverse direction; and a shutter unit selectively preventing a movement of the deposition source evaporated toward the mask from the source containing unit.
    • 根据本发明的一个方面的用于形成薄膜图案的装置可以包括:真空室,其包括掩模装载部分和具有相对于掩模装载部分可打开或关闭的窗口的成膜部件; 放卷辊和卷绕辊,设置在成膜部分中并运行片材; 源容纳单元,其容纳沉积源并安装成使得沉积源蒸发以在位于蒸发区域上的片材上沉积薄膜; 至少一个掩模,其具有限定要沉积在片材上的薄膜的图案的图案,并布置在掩模装载部分中; 掩模移动单元,将布置在所述掩模装载部中的所述至少一个掩模移动到所述成膜部的沉积位置或者使所述掩模沿相反方向移动; 以及快门单元,其选择性地防止从所述源容纳单元向所述掩模蒸发的所述沉积源的移动。
    • 8. 发明申请
    • ROLL-TO-ROLL TYPE APPARATUS FOR FORMING THIN FILM PATTERN
    • 用于形成薄膜图案的辊对辊型设备
    • US20100053577A1
    • 2010-03-04
    • US12401442
    • 2009-03-10
    • Young Woo LeeJeong Min ChoDong Joo Shin
    • Young Woo LeeJeong Min ChoDong Joo Shin
    • G03B27/58G03B27/72
    • G03B27/58H05K1/0393H05K3/143H05K2203/1545
    • An apparatus for forming a thin film pattern according to an aspect of the invention may include: an unwinding roll and a winding roll running a sheet; a rotary drum having an elastic layer provided on a circumferential surface thereof, and disposed between the winding roll and the unwinding roll to run the sheet along the circumferential surface; a source containing unit accommodating a deposition source and mounted such that the deposition source is evaporated and the evaporated deposition source moves toward the sheet located on the rotary drum; a shutter selectively preventing the movement of the deposition source toward the rotary drum from the source containing unit; a mask having a pattern defining a pattern of a thin film to be deposited onto the sheet and making tight contact with the sheet located on the rotary drum during thin-film deposition; and a tensioning unit pressurizing the sheet in a direction of the rotary drum to allow the sheet to run after the thin-film deposition and separating the sheet from the mask by a reduction in thickness.
    • 根据本发明的一个方面的用于形成薄膜图案的装置可以包括:退卷辊和卷绕辊; 旋转鼓,其具有设置在其圆周表面上的弹性层,并且设置在卷绕辊和退绕辊之间,以沿着圆周表面运动片材; 源容纳单元,其容纳沉积源并安装成使得沉积源蒸发并且蒸发的沉积源朝向位于旋转滚筒上的片材移动; 快门,其选择性地防止沉积源从源容纳单元朝向旋转滚筒移动; 掩模,其具有限定要沉积在片材上的薄膜图案并在薄膜沉积期间与位于旋转滚筒上的片材紧密接触的图案; 以及张紧单元,其在所述旋转滚筒的方向上对所述片材加压,以允许所述薄片在所述薄膜沉积之后运行,并且通过减小厚度将所述薄片与所述面罩分离。
    • 9. 发明授权
    • Roll-to-roll type apparatus for forming thin film pattern
    • 用于形成薄膜图案的卷对卷型设备
    • US08305554B2
    • 2012-11-06
    • US12401442
    • 2009-03-10
    • Young Woo LeeJeong Min ChoDong Joo Shin
    • Young Woo LeeJeong Min ChoDong Joo Shin
    • G03B27/42
    • G03B27/58H05K1/0393H05K3/143H05K2203/1545
    • An apparatus for forming a thin film pattern according to an aspect of the invention may include: an unwinding roll and a winding roll running a sheet; a rotary drum having an elastic layer provided on a circumferential surface thereof, and disposed between the winding roll and the unwinding roll to run the sheet along the circumferential surface; a source containing unit accommodating a deposition source and mounted such that the deposition source is evaporated and the evaporated deposition source moves toward the sheet located on the rotary drum; a shutter selectively preventing the movement of the deposition source toward the rotary drum from the source containing unit; a mask having a pattern defining a pattern of a thin film to be deposited onto the sheet and making tight contact with the sheet located on the rotary drum during thin-film deposition; and a tensioning unit pressurizing the sheet in a direction of the rotary drum to allow the sheet to run after the thin-film deposition and separating the sheet from the mask by a reduction in thickness.
    • 根据本发明的一个方面的用于形成薄膜图案的装置可以包括:退卷辊和卷绕辊; 旋转鼓,其具有设置在其圆周表面上的弹性层,并且设置在卷绕辊和退绕辊之间,以沿着圆周表面运动片材; 源容纳单元,其容纳沉积源并安装成使得沉积源蒸发并且蒸发的沉积源朝向位于旋转滚筒上的片材移动; 快门,其选择性地防止沉积源从源容纳单元朝向旋转滚筒移动; 掩模,其具有限定要沉积在片材上的薄膜图案并在薄膜沉积期间与位于旋转滚筒上的片材紧密接触的图案; 以及张紧单元,其在所述旋转滚筒的方向上对所述片材进行加压,以允许所述薄片在所述薄膜沉积之后运行,并且通过减小厚度将所述薄片与所述面罩分离。