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    • 2. 发明申请
    • HIGH PERFORMANCE ZnO-BASED LASER DIODES
    • 高性能ZnO基激光二极管
    • US20100080256A1
    • 2010-04-01
    • US12570695
    • 2009-09-30
    • Jianlin LiuSheng Chu
    • Jianlin LiuSheng Chu
    • H01S5/34H01L33/00C30B25/02
    • H01S5/347B82Y20/00H01S5/021H01S5/0213H01S5/0425H01S5/10
    • Systems and methods for electrically pumped, surface-emitting and edge emitting ZnO ultraviolet diode lasers are disclosed. The ZnO diode laser may be fabricated using growth processes (e.g., MBE) to form Sb-doped ZnO as a p-type layer and doped ZnO as an n-type layer. ZnO-based quantum well structures may be further formed in between the n- and p-type ZnO layers. The ZnO layers and quantum wells may be grown in columnar structures which act as resonant cavities for generated light, significantly improving light amplification and providing high power output. For example, ultraviolet lasing at around 380 nm was demonstrated at about room temperature at a threshold current density of about 10 A/cm2. The output power was further measured to be about 11.3 μW at about 130 mA driving current.
    • 公开了用于电泵浦,表面发射和边缘发射的ZnO紫外二极管激光器的系统和方法。 可以使用生长工艺(例如MBE)来制造ZnO二极管激光器,以形成掺杂Sb的ZnO作为p型层,并掺杂ZnO作为n型层。 可以在n型和p型ZnO层之间进一步形成ZnO基量子阱结构。 ZnO层和量子阱可以生长成用作产生光的谐振腔的柱状结构,显着改善光放大并提供高功率输出。 例如,在大约室温下,在约10A / cm 2的阈值电流密度下,证明了约380nm的紫外线激光。 在大约130mA驱动电流下,进一步测量输出功率约为11.3μW。
    • 3. 发明授权
    • High performance ZnO-based laser diodes
    • 高性能ZnO基激光二极管
    • US08306083B2
    • 2012-11-06
    • US12570695
    • 2009-09-30
    • Jianlin LiuSheng Chu
    • Jianlin LiuSheng Chu
    • H01S5/00
    • H01S5/347B82Y20/00H01S5/021H01S5/0213H01S5/0425H01S5/10
    • Systems and methods for electrically pumped, surface-emitting and edge emitting ZnO ultraviolet diode lasers are disclosed. The ZnO diode laser may be fabricated using growth processes (e.g., MBE) to form Sb-doped ZnO as a p-type layer and doped ZnO as an n-type layer. ZnO-based quantum well structures may be further formed in between the n- and p-type ZnO layers. The ZnO layers and quantum wells may be grown in columnar structures which act as resonant cavities for generated light, significantly improving light amplification and providing high power output. For example, ultraviolet lasing at around 380 nm was demonstrated at about room temperature at a threshold current density of about 10 A/cm2. The output power was further measured to be about 11.3 μW at about 130 mA driving current.
    • 公开了用于电泵浦,表面发射和边缘发射的ZnO紫外二极管激光器的系统和方法。 可以使用生长工艺(例如MBE)来制造ZnO二极管激光器,以形成掺杂Sb的ZnO作为p型层,并掺杂ZnO作为n型层。 可以在n型和p型ZnO层之间进一步形成ZnO基量子阱结构。 ZnO层和量子阱可以生长成用作产生光的谐振腔的柱状结构,显着改善光放大并提供高功率输出。 例如,在大约室温下,在约10A / cm 2的阈值电流密度下,证明了约380nm的紫外线激光。 在大约130mA驱动电流下,进一步测量输出功率约为11.3μW。