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    • 1. 发明申请
    • GAS FLOW RATE MEASURING APPARATUS
    • 气体流速测量装置
    • US20140190270A1
    • 2014-07-10
    • US14240917
    • 2012-08-16
    • Kazunori SuzukiKeiichi NakadaRyo Sato
    • Kazunori SuzukiKeiichi NakadaRyo Sato
    • G01F1/64
    • G01F1/64G01F1/6842G01F1/696G01F1/6965G01F5/00
    • Gas flow rate measuring apparatus comprising resistive element disposed in a gas flow path, a gas flow rate detection circuit, and a gas temperature detection element or a substrate temperature detection element. The detection circuit detects a current flowing through the resistive element, or a voltage generated in response to the current to output a gas flow rate detection signal in accordance with a flow rate of gas flowing. The apparatus corrects characteristics of the gas flow rate detection signal on the basis of a temperature detection signal obtained from these elements and includes signal conversion means for correcting a characteristic bend displaced by more than a certain fixed amount from target characteristics.
    • 气体流量测量装置包括设置在气体流路中的电阻元件,气体流量检测电路和气体温度检测元件或基板温度检测元件。 检测电路检测流过电阻元件的电流或响应电流而产生的电压,以根据气体流量输出气体流量检测信号。 该装置基于从这些元件获得的温度检测信号来校正气体流量检测信号的特性,并且包括用于校正从目标特性偏移超过一定固定量的特征弯曲的信号转换装置。
    • 5. 发明授权
    • Thermal type flow measurement apparatus having asymmetrical passage for flow rate measurement
    • 具有用于流量测量的不对称通道的热式流量测量装置
    • US07287424B2
    • 2007-10-30
    • US11210869
    • 2005-08-25
    • Masahiro MatsumotoMasamichi YamadaHiroshi NakanoKeiji HanzawaKeiichi Nakada
    • Masahiro MatsumotoMasamichi YamadaHiroshi NakanoKeiji HanzawaKeiichi Nakada
    • G01F1/68
    • G01F5/00G01F1/6845
    • IN a thermal type flow measurement apparatus, a heating element is disposed in a fluid passage and generates heat by a passage of a current through itself. A first thermal sensitive element is disposed adjacent upstream of the heating element in a direction of fluid flow to be measured. A second thermal sensitive element is disposed adjacent downstream of the heating element in the direction of fluid flow to be measured. The fluid passage is provided with the heating element, the first thermal sensitive element, and the second thermal sensitive element. The fluid passage has an asymmetric structure with respect to the direction of fluid flow.Means for measuring a difference of temperatures is sensed by the first and the second thermal sensitive elements to produce a voltage according to a fluid flow rate. Heat control means for controlling the passage of the current through the heating element so that a sum with weights of respective temperatures sensed by the first and the second thermal sensitive elements reaches a preset value.
    • 在热式流量测量装置中,加热元件设置在流体通道中,并且通过自身通过电流而产生热量。 第一热敏元件沿着待测量的流体流动的方向设置在加热元件的上游附近。 第二热敏元件沿着待测量的流体流动的方向设置在加热元件的下游附近。 流体通道设置有加热元件,第一热敏元件和第二热敏元件。 流体通道相对于流体流动的方向具有不对称结构。 通过第一和第二热敏元件检测用于测量温度差的装置,以根据流体流速产生电压。 用于控制通过加热元件的电流的热控制装置,使得由第一和第二热敏元件感测的相应温度的重量达到预设值。
    • 8. 发明授权
    • Thermal flow sensor
    • 热流量传感器
    • US07181962B2
    • 2007-02-27
    • US10546174
    • 2004-05-26
    • Masamichi YamadaIzumi WatanabeKeiichi NakadaJunichi Horie
    • Masamichi YamadaIzumi WatanabeKeiichi NakadaJunichi Horie
    • G01F1/68
    • G01F1/6845G01F1/698
    • A thermal flow sensor which is fabricated at a low cost and has improved reliability. Over a cavity (7) formed in a semiconductor substrate (2), at least a heating resistance (4) is formed near the center of the cavity with an electrical insulation film interposed between the heating resistance and the cavity. The temperature (Th) of the heating resistance (4) is controlled to be higher than the medium temperature (Ta) by a constant temperature (ΔTh=Th−Ta). A distance (Ws) in the direction of airflow from an upstream end of the heating resistance (4) to an upstream end of the electrical insulation film lying over the cavity and the constant temperature (ΔTh) satisfy the following relationship: ΔTh/Ws≦800 (° C./mm) Thus, a thermal flow sensor is provided which can prevent deposition of floating fine particles, such as carbon particles, caused by the thermophoretic effect, can be fabricated at a low cost, and has high reliability.
    • 一种以低成本制造并具有改进的可靠性的热流传感器。 在形成在半导体衬底(2)中的空腔(7)上,在腔的中心附近形成至少一个加热电阻(4),其中电绝缘膜置于加热电阻和空腔之间。 加热电阻(4)的温度(Th)被控制为高于介质温度(Ta)恒温(DeltaTh = Th-Ta)。 从加热电阻(4)的上游端到位于空腔上的电绝缘膜的上游端和恒温(DeltaTh)的气流方向的距离(Ws)满足以下关系: line-formula description =“In-line Formulas”end =“lead”?> DeltaTh / Ws <= 800(°C./mm)
    • 10. 发明申请
    • Thermal type flow measurement apparatus
    • 热式流量测量仪
    • US20060162442A1
    • 2006-07-27
    • US11210869
    • 2005-08-25
    • Masahiro MatsumotoMasamichi YamadaHiroshi NakanoKeiji HanzawaKeiichi Nakada
    • Masahiro MatsumotoMasamichi YamadaHiroshi NakanoKeiji HanzawaKeiichi Nakada
    • G01F1/68
    • G01F5/00G01F1/6845
    • IN a thermal type flow measurement apparatus, a heating element is disposed in a fluid passage and generates heat by a passage of a current through itself. A first thermal sensitive element is disposed adjacent upstream of the heating element in a direction of fluid flow to be measured. A second thermal sensitive element is disposed adjacent downstream of the heating element in the direction of fluid flow to be measured. The fluid passage is provided with the heating element, the first thermal sensitive element, and the second thermal sensitive element. The fluid passage has an asymmetric structure with respect to the direction of fluid flow. Means for measuring a difference of temperatures is sensed by the first and the second thermal sensitive elements to produce a voltage according to a fluid flow rate. Heat control means for controlling the passage of the current through the heating element so that a sum with weights of respective temperatures sensed by the first and the second thermal sensitive elements reaches a preset value.
    • 在热式流量测量装置中,加热元件设置在流体通道中,并且通过自身通过电流而产生热量。 第一热敏元件沿着待测量的流体流动的方向设置在加热元件的上游附近。 第二热敏元件沿着待测量的流体流动的方向设置在加热元件的下游附近。 流体通道设置有加热元件,第一热敏元件和第二热敏元件。 流体通道相对于流体流动的方向具有不对称结构。 通过第一和第二热敏元件检测用于测量温度差的装置,以根据流体流速产生电压。 用于控制通过加热元件的电流的热控制装置,使得由第一和第二热敏元件感测的相应温度的重量达到预设值。