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1. 发明申请

WO2019133552A1 ROTATING ENERGY BEAM FOR THREE-DIMENSIONAL PRINTER 审中-公开
公开(公告)号：WO2019133552A1
公开(公告)日：2019-07-04
申请号：PCT/US2018/067406
申请日：2018-12-22
申请人： NIKON CORPORATION
发明人： BINNARD, Michael B. , ISHIKAWA, Motofusa
IPC分类号： B29C64/153 , B22F3/105 , B23K26/03 , B29C64/141 , B33Y30/00
摘要： A processing machine (10) for building a built part (11) includes a support device (14), a drive device (16), a powder supply device (20), and an irradiation device (24). The support device (14) includes a support surface (14A). The drive device (16) moves the support surface (14A) so that a specific position on the support surface (14A) is moved in a moving direction (30). The powder supply device (20) supplies a powder (12) to the support device (14) to form a powder layer (13). The irradiation device (24) irradiates at least a portion of the powder layer (13) with an energy beam (232) to form at least a portion of the built part (11 ) from the powder layer (13). Additionally, the irradiation device (24) changes an irradiation position where the energy beam (232) is irradiated to the powder layer (13) along a circumferential direction about an optical axis (234) of the irradiation device (24).

2. 发明申请

WO2021003309A2 SELECTIVE SINTERING AND POWDERBED CONTAINMENT FOR ADDITIVE MANUFACTURING 审中-公开
公开(公告)号：WO2021003309A2
公开(公告)日：2021-01-07
申请号：PCT/US2020/040565
申请日：2020-07-01
申请人： NIKON CORPORATION
发明人： PHILLIPS, Alton, Hugh , CHOI, Yeon-jun , GUO, Lexian , SMITH, Daniel, Gene , BINNARD, Michael, Birk , TYMINSKI, Jacek, Kazimierz , GOODWIN, Eric, Peter , MARQUEZ, Johnathan, Agustin , HERR, Brett, William , BJORK, Matthew, Parker-mccormick , CHANG, Patrick, Shih , ISHIKAWA, Motofusa , COON, Paul, Derek
IPC分类号： B22F3/105 , B29C64/153 , B29C64/241 , B29C64/393 , B33Y10/00 , B33Y30/00 , B33Y50/02 , B29C64/236 , B29C64/295 , B29C64/379 , B29C64/245 , B29C64/357 , B22F10/20 , B22F10/30 , B22F10/70 , B22F12/00
摘要： A processing machine (10) for building an object (11) from powder (12) includes a build platform (32) that supports a powder layer (14), and an energy system (22). The energy system (22) selectively heats a portion of the powder (12) to generate a sintered portion (26) in the powder layer (14); and subsequently melts the powder (12) to generate a melted portion (28) in the sintered portion (26) of the powder layer (14) to form the object (11). The sintered portion (26) is smaller than the entire powder layer (14). Thus, only a selected, sintered portion (26) of the powder layer (14) is sintered, instead of the entire powder layer (14). A containment structure (611 B) can be concurrently formed to capture unsintered powder (29).

3. 发明申请

WO2009148185A1 SURFACE POSITION DETECTING APPARATUS, EXPOSURE APPARATUS, SURFACE POSITION DETECTING METHOD, AND DEVICE MANUFACTURING METHOD 审中-公开
标题翻译：表面位置检测装置，曝光装置，表面位置检测方法和装置制造方法
公开(公告)号：WO2009148185A1
公开(公告)日：2009-12-10
申请号：PCT/JP2009/060568
申请日：2009-06-03
申请人： NIKON CORPORATION , HIDAKA, Yasuhiro , ISHIKAWA, Motofusa
发明人： HIDAKA, Yasuhiro , ISHIKAWA, Motofusa
IPC分类号： G03F9/00
CPC分类号： G03F9/7049 , G03F9/7026 , G03F9/7034
摘要： A surface position detecting apparatus comprises a light-sending optical system which makes first light from a first pattern and second light from a second pattern incident at different incidence angles to a predetermined surface to project an intermediate image of the first pattern and an intermediate image of the second pattern onto the predetermined surface; a light-receiving optical system which guides the first light and the second light reflected on the predetermined surface, to a first observation surface and to a second observation surface, respectively, to form an observation image of the first pattern on the first observation surface and an observation image of the second pattern on the second observation surface; and a detecting section which detects position information of the observation image of the first pattern on the first observation surface and position information of the observation image of the second pattern on the second observation surface and which calculates a surface position of the predetermined surface, based on the position information of the observation image of the first pattern and the position information of the observation image of the second pattern.
摘要翻译：表面位置检测装置包括发光光学系统，其将来自第一图案的第一光和来自以不同入射角入射到预定表面的第二图案的第二光投射到第一图案的中间图像和第二图案的中间图像第二图案到预定表面上; 分别将第一光和第二光反射到预定表面上的光接收光学系统分别连接到第一观察表面和第二观察表面，以在第一观察表面上形成第一图案的观察图像，在第二观察面上的第二图案的观察图像; 以及检测部，其基于第一观察面检测第一图案的观察图像的位置信息和第二观察面上的第二图案的观察图像的位置信息，并且基于第一图案的观察图像的位置信息和第二图案的观察图像的位置信息。

4. 发明申请

WO2021003271A2 POWDER SUPPLY ASSEMBLY FOR ADDITIVE MANUFACTURING 审中-公开
公开(公告)号：WO2021003271A2
公开(公告)日：2021-01-07
申请号：PCT/US2020/040498
申请日：2020-07-01
申请人： NIKON CORPORATION
发明人： PHILLIPS, Alton Hugh , ROSSI, Joseph P. , MARQUEZ, Johnathan Agustin , JEONG, Yoon Jung , GUO, Lexian , CHANG, Patrick Shih , GOODWIN, Eric Peter , BINNARD, Michael Birk , HERR, Brett William , BJORK, Matthew Parker-McCormick , COON, Paul Derek , ISHIKAWA, Motofusa
IPC分类号： B29C64/153 , B33Y10/00 , B33Y30/00 , B29C64/30 , B29C64/321 , B29C64/343 , B33Y40/00 , B29C64/236 , B29C64/245 , B29C64/329 , B29C64/255 , B22F12/37 , B22F12/90 , B22F10/85 , B22F12/52 , B22F10/20 , B22F10/28 , B22F10/30 , B22F12/00 , B22F12/46 , B29C64/205 , B33Y50/02
摘要： A processing machine (10) for building an object (11) from powder (12) includes a build platform (26A); a powder supply assembly (18) that deposits the powder (12) onto the build platform (26A) to form a powder layer (13); and an energy system (22) that directs an energy beam (22D) at a portion of the powder (12) on the build platform (26A) to form a portion of the object (11). The powder supply assembly (18) can include (i) a powder container (640A) that retains the powder (12); (ii) a supply outlet (639) positioned over the build platform (26A); and (ii) a flow control assembly (642) that selectively controls the flow of the powder (12) from the supply outlet (639).

5. 发明申请

WO2019133553A1 ADDITIVE MANUFACTURING SYSTEM WITH ROTARY POWDER BED 审中-公开
公开(公告)号：WO2019133553A1
公开(公告)日：2019-07-04
申请号：PCT/US2018/067407
申请日：2018-12-22
申请人： NIKON CORPORATION
发明人： GOODWIN, Eric, Peter , MARQUEZ, Johnathan , BINNARD, Michael, B. , HERR, Brett , BJORK, Matthew, Parker-McCormick , COON, Paul, Derek , CHANG, Patrick , ISHIKAWA, Motofusa
IPC分类号： B29C64/153 , B22F3/105 , B23K26/03 , B29C64/141 , B33Y30/00
摘要： A processing machine (10) for building a part (11) includes: a support device (26) including a support surface (26B); a drive device (28) which moves the support device (26) so as a specific position on the support surface (26B) is moved along a moving direction (25); a powder supply device (18) which supplies a powder (12) to the moving support device (26) to form a powder layer (13); an irradiation device (22) which irradiates at least a portion of the powder layer (13) with an energy beam (22D) to form at least a portion of the part (11) from the powder layer (13) during a first period of time; and a measurement device (20) which measures at least portion of the part (11) during a second period of time. The first period in which the irradiation device (22) irradiates the powder layer (13) with the energy beam (22D) and the second period in which the measurement device (22) measures are overlapped.

6. 发明申请

WO2021003444A2 METROLOGY FOR ADDITIVE MANUFACTURING 审中-公开
公开(公告)号：WO2021003444A2
公开(公告)日：2021-01-07
申请号：PCT/US2020/040772
申请日：2020-07-02
申请人： NIKON CORPORATION , GOODWIN, Eric, Peter
发明人： DURKO, Heather, Lynn , SMITH, Daniel, Gene , MARQUEZ, Johnathan, Agustin , BINNARD, Michael, Birk , CHANG, Patrick, Shih , BJORK, Matthew, Parker-mccormick , COON, Paul, Derek , HERR, Brett, William , ISHIKAWA, Motofusa
IPC分类号： G01B11/25 , G01B9/02 , B33Y50/02 , G01B15/04 , B22F10/28 , B22F10/36 , B22F12/90 , B33Y10/00 , B33Y30/00 , G01B11/2527 , G01B11/2536 , G01B9/02097
摘要： 3D metrology techniques are disclosed for determining a changing topography of a substrate processed in an additive manufacturing system. Techniques include fringe scanning, simultaneous fringe projections, interferometry, and x-ray imaging. The techniques can be applied to 3D printing systems to enable rapid topographical measurements of a 3D printer powder bed, or other rapidly moving, nearly continuous surface to be tested. The techniques act in parallel to the system being measured to provide information about system operation and the topography of the product being processed. A tool is provided for achieving higher precision, increasing throughput, and reducing the cost of operation through early detection and diagnosis of operating problems and printing defects. These techniques work well with any powder bed 3D printing system, providing real-time metrology of the powder bed, the most recently printed layer, or both without reducing throughput.

7. 发明申请

WO2021003202A2 NON-COAXIAL ROTATING TURNTABLES FOR ADDITIVE MANUFACTURING 审中-公开
公开(公告)号：WO2021003202A2
公开(公告)日：2021-01-07
申请号：PCT/US2020/040391
申请日：2020-07-01
申请人： NIKON CORPORATION , PHILLIPS, Alton Hugh
发明人： CHANG, Patrick Shih , BINNARD, Michael Birk , ROSA, Matthew , KETSAMANIAN, Serhad , GUO, Lexian , HERR, Brett William , GOODWIN, Eric Peter , MARQUEZ, Johnathan Agustin , BJORK, Matthew Parker-McCormick , COON, Paul Derek , ISHIKAWA, Motofusa
IPC分类号： B22F3/105 , B29C64/241 , B29C64/245 , B29C64/393 , B33Y10/00 , B33Y30/00 , B33Y40/00 , B33Y50/02 , B29C64/268 , B29C64/371 , B22F12/37 , B22F10/28 , B22F12/00 , B22F10/31 , B22F12/226 , B22F12/38 , B22F12/41 , B22F12/45 , B22F12/90 , B22F2999/00 , B29C64/153
摘要： To improve the operation of 3D printing systems, techniques are disclosed for a rotary 3D printer comprising: a main rotating support table rotating about a first axis and one or more secondary support tables rotating around a non-coaxial secondary axis; a powder supply assembly for distributing powder onto the tables; and an energy system for directing an energy beam at the powder to form a part. The main support table and secondary support tables can rotate in the same or opposite directions. Disclosed techniques include: grooved support table surfaces for improving stability of applied powder; reciprocating bellows for controlling a differential load on actuators that move the support tables; high temperature bearings or bushings for supporting rotary motion at high temperatures; and a mechanism for counterbalancing a weight of the part being built.

8. 发明申请

WO2009157576A1 SURFACE POSITION DETECTING APPARATUS, EXPOSURE APPARATUS, SURFACE POSITION DETECTING METHOD, AND DEVICE MANUFACTURING METHOD 审中-公开
标题翻译：表面位置检测装置，曝光装置，表面位置检测方法和装置制造方法
公开(公告)号：WO2009157576A1
公开(公告)日：2009-12-30
申请号：PCT/JP2009/061798
申请日：2009-06-22
申请人： NIKON CORPORATION , HIDAKA, Yasuhiro , ISHIKAWA, Motofusa
发明人： HIDAKA, Yasuhiro , ISHIKAWA, Motofusa
IPC分类号： G03F9/00
CPC分类号： G03F9/7049 , G03F9/7026 , G03F9/7034
摘要： An apparatus is provided with a light-sending optical system (4-10) which makes first light from a first pattern and second light from a second pattern incident to a predetermined surface (Wa) to project intermediate images of the first and second patterns onto the predetermined surface respectively; a light-receiving optical system (30-24) which guides the first and second light reflected on the predetermined surface, to first and second observation surfaces (23Aa, 23Ba) to form observation images of the first and second patterns, respectively; and a detecting section (23-21, PR) which detects position information of the observation images of the first and second patterns on the first and second observation surfaces respectively and which calculates a surface position of the predetermined surface, based on the position information. The light-sending optical system projects the intermediate image of the second pattern as an inverted image in a predetermined direction relative to the intermediate image of the first pattern.
摘要翻译：一种装置设置有发光光学系统（4-10），其使来自第一图案的第一光和从第二图案入射到预定表面（Wa）的第二光将第一和第二图案的中间图像投影到预定表面; 将预定表面上反射的第一和第二光引导到第一和第二观察表面（23Aa，23Ba）的光接收光学系统（30-24），分别形成第一和第二图案的观察图像; 以及检测部分，其检测第一和第二观察表面上的第一和第二图案的观察图像的位置信息，并基于位置信息来计算预定表面的表面位置。发光光学系统相对于第一图案的中间图像将预定方向的第二图案的中间图像投影为反转图像。

9. 发明公开

EP4227095A1 DATA GENERATION METHOD, MOLDING ACCEPTANCE METHOD, DATA GENERATION DEVICE, DISPLAY DEVICE, MOLDING METHOD, COMPUTER PROGRAM, AND RECORDING MEDIUM 审中-公开
公开(公告)号：EP4227095A1
公开(公告)日：2023-08-16
申请号：EP20956693.4
申请日：2020-10-06
申请人： NIKON CORPORATION
发明人： SUGISHITA, Shigenori , ISHIKAWA, Motofusa , KURAMI, Toshimitsu
IPC分类号： B33Y50/00 , B29C64/386 , G06F30/10
摘要： A data generation method includes: generating model data representing a three-dimensional model of a pipe based on a value of a parameter defining a shape of the pipe designated by a user using an input screen; and setting, as a value of a parameter defining a position of an intermediate part of the pipe, a value of a parameter defining a position away from a position of an edge part of the pipe by a first distance.

10. 发明公开

EP4333017A1 CHARGED PARTICLE OPTICAL SYSTEM AND CHARGED PARTICLE APPARATUS 审中-公开
公开(公告)号：EP4333017A1
公开(公告)日：2024-03-06
申请号：EP22795630.7
申请日：2022-04-19
申请人： NIKON CORPORATION
发明人： GOTO, Takakuni , ISHIKAWA, Motofusa , OGASAWARA, Baku , KUSU, Shunta , KOMATSU, Yuta , UCHIDA, Tomoya
IPC分类号： H01J37/143 , H01J37/145
摘要： A charged particle optical system includes a permanent magnetic lens disposed closer to an object than a central point between a charged particle beam source and the object in an optical axis direction of the charged particle optical system, an electromagnetic lens disposed such that a position of at least a part of the electromagnetic lens overlaps the permanent magnetic lens in the optical axis direction of the charged particle optical system, and an electrostatic lens disposed such that a position of at least a part of the electrostatic lens overlaps at least one of the permanent magnetic lens and the electromagnetic lens in the optical axis direction of the charged particle optical system.

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