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1. 发明申请

WO2018200536A2 ILLUMINATION SYSTEM WITH FLAT 1D-PATTERNED MASK FOR USE IN EUV-EXPOSURE TOOL 审中-公开
公开(公告)号：WO2018200536A2
公开(公告)日：2018-11-01
申请号：PCT/US2018/029160
申请日：2018-04-24
申请人： NIKON CORPORATION , SMITH, Daniel, Gene , WILLIAMSON, David, M.
发明人： SMITH, Daniel, Gene , WILLIAMSON, David, M.
IPC分类号： G03F7/20 , G02B17/06 , G21K1/06
摘要： A catoptric system having a reference axis and including a reflective pattern-source (carrying a substantially one-dimensional pattern) and a combination of only three optical components disposed sequentially to transfer EUV radiation incident the first optical component onto the pattern-source. The combination is disposed in a fixed spatial and optical relationship with respect to the patternsource, and represents an illumination unit (IU) of a 1D EUV exposure tool that additionally includes |includes a projection optic sub-system configured to form an optical image of the patternsource on an image plane with the use of only two beams of radiation. These only two beams of radiation originate at the pattern-source from the EUV radiation transferred onto the pattern-source.

2. 发明申请

WO2009070492A1 AUTOFOCUS SYSTEM WITH ERROR COMPENSATION 审中-公开
标题翻译： AUTOFOCUS系统错误补偿
公开(公告)号：WO2009070492A1
公开(公告)日：2009-06-04
申请号：PCT/US2008/084238
申请日：2008-11-20
申请人： NIKON CORPORATION , SMITH, Daniel, Gene
发明人： SMITH, Daniel, Gene
IPC分类号： H01L21/30
CPC分类号： G03F9/7026
摘要： An aulofocus system for measuring the position of a work piece along an axis includes a slit light source assembly, a slit detector assembly, and a control system The slit light source assembly directs a first slit of light at a first slit area of the work piece The slit detector assembly detects light reflected off of the first slit area and generates a first slit signal relating to the amount of light reflected off of the first slit area at the slit detector assembly The control system uses the first slit signal from the slit detector assembly, and first reflectance information of the first slit area to determine the position of the work piece along the axis With this design, the autofocus system can compensate for the changes in reflectivity of the work piece As a result thereof, measurements taken with the autofocus system are more accurate and the work piece can be positioned with improved accuracy
摘要翻译：用于测量沿着轴的工件位置的自动对焦系统包括狭缝光源组件，狭缝检测器组件和控制系统。狭缝光源组件将工件的第一狭缝区域处的第一狭缝引导狭缝检测器组件检测从第一狭缝区域反射的光，并且产生与在狭缝检测器组件处的第一狭缝区域反射的光的量相关的第一狭缝信号。控制系统使用来自狭缝检测器组件的第一狭缝信号以及第一狭缝区域的第一反射率信息，以确定工件沿着轴的位置通过这种设计，自动对焦系统可以补偿工件的反射率的变化作为其结果，使用自动对焦系统更准确，工件可以提高准确度

3. 发明申请

WO2021003309A2 SELECTIVE SINTERING AND POWDERBED CONTAINMENT FOR ADDITIVE MANUFACTURING 审中-公开
公开(公告)号：WO2021003309A2
公开(公告)日：2021-01-07
申请号：PCT/US2020/040565
申请日：2020-07-01
申请人： NIKON CORPORATION
发明人： PHILLIPS, Alton, Hugh , CHOI, Yeon-jun , GUO, Lexian , SMITH, Daniel, Gene , BINNARD, Michael, Birk , TYMINSKI, Jacek, Kazimierz , GOODWIN, Eric, Peter , MARQUEZ, Johnathan, Agustin , HERR, Brett, William , BJORK, Matthew, Parker-mccormick , CHANG, Patrick, Shih , ISHIKAWA, Motofusa , COON, Paul, Derek
IPC分类号： B22F3/105 , B29C64/153 , B29C64/241 , B29C64/393 , B33Y10/00 , B33Y30/00 , B33Y50/02 , B29C64/236 , B29C64/295 , B29C64/379 , B29C64/245 , B29C64/357 , B22F10/20 , B22F10/30 , B22F10/70 , B22F12/00
摘要： A processing machine (10) for building an object (11) from powder (12) includes a build platform (32) that supports a powder layer (14), and an energy system (22). The energy system (22) selectively heats a portion of the powder (12) to generate a sintered portion (26) in the powder layer (14); and subsequently melts the powder (12) to generate a melted portion (28) in the sintered portion (26) of the powder layer (14) to form the object (11). The sintered portion (26) is smaller than the entire powder layer (14). Thus, only a selected, sintered portion (26) of the powder layer (14) is sintered, instead of the entire powder layer (14). A containment structure (611 B) can be concurrently formed to capture unsintered powder (29).

4. 发明申请

WO2013093633A2 ENHANCEMENTS TO INTEGRATED OPTICAL ASSEMBLY 审中-公开
标题翻译：一体化光学组件的增强
公开(公告)号：WO2013093633A2
公开(公告)日：2013-06-27
申请号：PCT/IB2012/003023
申请日：2012-12-23
申请人： NIKON CORPORATION
发明人： SMITH, Daniel, Gene
CPC分类号： G01B11/24 , G01S7/481 , G01S7/4972 , G02B5/122 , G02B26/10
摘要： An integrated optical assembly is provided, with enhancements that are particularly useful when the integrated optical assembly forms part of a laser radar system. The integrated optical assembly produces a reference beam that is related to the optical characteristics of a scanning reflector, or to changes in position or orientation of the scanning reflector relative to a source. Thus, if the scanning reflector orientation were to shift from its intended orientation (due e.g. to thermal expansion) or if characteristics of the scanning reflector (e.g. the index of refraction of the scanning reflector) were to change on account of temperature changes, the reference beam can be used to provide data that can be used to account for such changes. In addition, if the scanning reflector were to be positioned in an orientation other than the orientation desired, the reference beam can be used in identifying and correcting that positioning.
摘要翻译：提供了一种集成光学组件，其具有在集成光学组件形成激光雷达系统的一部分时特别有用的增强功能。集成光学组件产生与扫描反射器的光学特性相关的参考光束，或者相对于光源的扫描反射器的位置或取向的改变。因此，如果扫描反射器取向从其预期取向（由于例如热膨胀）偏移，或者如果扫描反射器的特性（例如扫描反射器的折射率）由于温度变化而改变，则参考波束可用于提供可用于解释此类更改的数据。此外，如果扫描反射器被定位在除了所需取向以外的方向上，则可以使用参考光束来识别和校正该定位。

5. 发明申请

WO2012061163A3 APPARATUS, OPTICAL ASSEMBLY, METHOD FOR INSPECTION OR MEASUREMENT OF AN OBJECT AND METHOD FOR MANUFACTURING A STRUCTURE 审中-公开
公开(公告)号：WO2012061163A3
公开(公告)日：2012-05-10
申请号：PCT/US2011/057758
申请日：2011-10-25
申请人： NIKON CORPORATION , GOODWIN, Eric, Peter , WILLIAMSON, David, Michael , SMITH, Daniel, Gene , PHARAND, Michel , COOPER, Alexander , ROBERTSON, Alec , STAMPER, Brian, L.
发明人： GOODWIN, Eric, Peter , WILLIAMSON, David, Michael , SMITH, Daniel, Gene , PHARAND, Michel , COOPER, Alexander , ROBERTSON, Alec , STAMPER, Brian, L.
IPC分类号： G02F1/33
摘要： An optical assembly for a system for inspecting or measuring of an object is provided that is configured to move as a unit with a system, as the system is pointed at a target, and eliminates the need for a large scanning (pointing) mirror that is moveable relative to other parts of the system. The optical assembly comprises catadioptric optics configured to fold the optical path of the pointing beam and measurement beam that are being directed through the outlet of the system, to compress the size of the optical assembly.

6. 发明申请

WO2021003256A1 ENHANCED POWDER BED DISCHARGING 审中-公开
公开(公告)号：WO2021003256A1
公开(公告)日：2021-01-07
申请号：PCT/US2020/040472
申请日：2020-07-01
申请人： NIKON CORPORATION
发明人： PHILLIPS, Alton, Hugh , SMITH, Daniel, Gene , GUO, Lexian
IPC分类号： B22F3/105 , B29C64/153 , B29C64/236 , B29C64/241 , B29C64/245 , B29C64/268 , B29C64/291 , B29C64/295 , B29C64/393 , B33Y10/00 , B33Y30/00 , B33Y50/02 , B23K15/00 , G01B9/00
摘要： A processing machine (10) for building an object (11) from powder particles (12) includes a build platform (26), an excitation system (21) and an electron beam irradiation device (22). The build platform (26) includes a support surface (26B) that supports the powder particles (12). The excitation system (21) directs an excitation light (21B) at a plurality of the powder particles (12). The electron beam irradiation device (22) irradiates the plurality of the powder particles (12) with an electron beam (22D).

7. 发明申请

WO2018208912A3 ILLUMINATION SYSTEM WITH CURVED 1D-PATTERNED MASK FOR USE IN EUV-EXPOSURE TOOL 审中-公开
公开(公告)号：WO2018208912A3
公开(公告)日：2018-11-15
申请号：PCT/US2018/031796
申请日：2018-05-09
申请人： NIKON CORPORATION , SMITH, Daniel, Gene , WILLIAMSON, David, M. , FLAGELLO, Donis, G. , BINNARD, Michael, B.
发明人： SMITH, Daniel, Gene , WILLIAMSON, David, M. , FLAGELLO, Donis, G. , BINNARD, Michael, B.
IPC分类号： G03F7/20 , G02B17/06 , G21K1/06
摘要： A catoptric system having a reference axis and including a reflective pattern-source (carrying a substantially one-dimensional pattern) and a combination of two optical reflectors disposed sequentially to transfer EUV radiation incident onto the first optical component to the pattern-source the substantially one-dimensional pattern of which is disposed in a curved surface. In one case, such combination includes only two optical reflectors (each may contain multiple constituent components). The combination is disposed in a fixed spatial and optical relationship with respect to the pattern-source, and represents an illumination unit (IU) of a ID EUV exposure tool that additionally includes (includes a projection optical sub-system configured to form an optical image of the pattern-source on an image plane with the use of only two beams of radiation. These only two beams of radiation originate at the pattern-source from the EUV radiation transferred onto the pattern-source.

8. 发明申请

WO2018194975A2 FIGOPTICAL OBJECTIVE FOR OPERATION IN EUV SPECTRAL REGION 审中-公开
公开(公告)号：WO2018194975A2
公开(公告)日：2018-10-25
申请号：PCT/US2018/027785
申请日：2018-04-16
申请人： NIKON CORPORATION , SMITH, Daniel, Gene , WILLIAMSON, David, M.
发明人： SMITH, Daniel, Gene , WILLIAMSON, David, M.
IPC分类号： G03F7/20 , G02B17/06 , G21K1/06
摘要： A catoptric system having a reference axis and first, second, and third reflectors. The first reflector contains a pattern-source carrying a substantially one-dimensional pattern. A combination of the second and third reflectors is configured to form an optical image of the pattern, with a demagnification coefficient N > 1 in extreme UV light, and with only two beams of light that have originated at the first reflector as a result of irradiation of the first reflector with light incident upon it. An exposure apparatus employing the catoptric system and method of device manufacturing with the use of the exposure apparatus.

9. 发明申请

WO2015031858A2 EIGHT WAVE CORNER CUBE RETARDER FOR LASER RADAR 审中-公开
标题翻译：用于激光雷达的EIGHT WAVE CORNER CUBE延迟器
公开(公告)号：WO2015031858A2
公开(公告)日：2015-03-05
申请号：PCT/US2014/053585
申请日：2014-08-29
申请人： NIKON CORPORATION
发明人： SMITH, Daniel, Gene
IPC分类号： G01S17/66 , G02B5/04
CPC分类号： G01S7/4812 , G01S7/4813 , G01S7/4818 , G01S7/499 , G01S17/08 , G01S17/42 , G01S17/66 , G02B5/04 , G02B5/122 , G02B5/3083
摘要： Laser radar systems include focusing optical systems having a retroreflector such as a corner cube that is translatable with respect to an objective lens. The retroreflector provides a selected retardance to an interrogation optical beam that is directed to a target as well as to a returned portion of the interrogation optical beam that is directed to a detection system. Typically, an input linearly polarized interrogation beam is returned by the retroreflector as a circularly polarized beam that is directed to the target. Returned beam portions from the target are coupled by the retroreflector to a detection system in a linear polarization that is orthogonal to that of the input linearly polarized optical beam. The retroreflector produces state of polarization changes based on retardance associated with total internal reflection from coated or uncoated optical surfaces. Retroreflector surfaces that are not to introduce retardance are coated with suitable zero or low retardance coatings.
摘要翻译：激光雷达系统包括具有回射器的聚焦光学系统，例如可相对于物镜平移的角立方体。后向反射器向询问光束提供选择的延迟，其被引导到目标以及被引导到检测系统的询问光束的返回部分。通常，输入线性偏振询问光束由回射器作为被引导到目标的圆偏振光束返回。来自目标的返回光束部分由后向反射器耦合到与输入的线偏振光束的线偏振正交的线性偏振的检测系统。后向反射器基于与涂覆或未涂覆的光学表面的全内反射相关的延迟产生偏振变化状态。不引入延迟的回射器表面涂覆有合适的零或低延迟涂层。

10. 发明申请

WO2021173123A1 OPTICAL DELAY SYSTEM 审中-公开
公开(公告)号：WO2021173123A1
公开(公告)日：2021-09-02
申请号：PCT/US2020/019742
申请日：2020-02-25
申请人： NIKON CORPORATION
发明人： STAMPER, Brian, Lee , SMITH, Daniel, Gene
IPC分类号： G02B17/08 , G02B27/09 , G02B27/14 , G02B27/48
摘要： An optical system includes a first optical system, a second optical system, and a third optical system. The first optical system divides an input beam into a first light and a second light. The second optical system includes a concave reflective surface which reflects the first light. The third optical system directs at least one of the first light reflected from the second optical system and the second light from the first optical system to an output optical path of the third optical system.

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