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1. 发明申请

WO2017210450A1 CONTROL SYSTEM FOR CONTROLLING A FLUID ACTUATOR 审中-公开
标题翻译：控制流体致动器的控制系统
公开(公告)号：WO2017210450A1
公开(公告)日：2017-12-07
申请号：PCT/US2017/035488
申请日：2017-06-01
申请人： NIKON CORPORATION , YANG, Pai-hsueh
发明人： YANG, Pai-hsueh , CHOI, Yeong-jun , CHANG, Ping-wei , SAKATA, Koichi , LEE, Sandy
IPC分类号： F15B9/08 , F15B11/028
CPC分类号： F15B11/042 , F15B13/0442 , F15B19/007 , F15B2211/30575 , F15B2211/327 , F15B2211/351 , F15B2211/353 , F15B2211/665 , F15B2211/6654
摘要： A stage assembly (10) for positioning a workpiece (22) includes a stage (14), a base (12), a fluid actuator assembly (24), and a control system (20). The fluid actuator assembly (24) moves the stage (14) along the movement axis (30) relative to the base (12). The fluid actuator assembly (24) includes a piston housing (32) that defines a piston chamber (34), a piston (36) that is positioned within and moves relative to the piston chamber (34) along a piston axis (36A), and a valve assembly (38) that controls the flow of a piston fluid into the piston chamber (34). The valve assembly (38) includes an inlet valve (38C) having an inlet valve characteristic. The control system (20) controls the valve assembly (38) to control the flow of the piston fluid into the piston chamber (34). The control system (20) can utilize an inverse of the inlet valve characteristic to control the valve assembly (38).
摘要翻译：用于定位工件（22）的平台组件（10）包括平台（14），基座（12），流体致动器组件（24）和控制系统（20）。流体致动器组件（24）使台架（14）沿着移动轴线（30）相对于基座（12）移动。流体致动器组件（24）包括限定活塞室（34）的活塞壳体（32），位于活塞轴线（36A）内并且相对于活塞室（34）相对于活塞室（34）移动的活塞（36）和控制活塞流体流入活塞室（34）的阀组件（38）。阀组件（38）包括具有入口阀特性的入口阀（38C）。控制系统（20）控制阀组件（38）以控制活塞流体流入活塞室（34）。控制系统（20）可以利用入口阀特性的倒数来控制阀组件（38）。

2. 发明申请

WO2018152069A1 DUAL VALVE FLUID ACTUATOR ASSEMBLY 审中-公开
公开(公告)号：WO2018152069A1
公开(公告)日：2018-08-23
申请号：PCT/US2018/017868
申请日：2018-02-12
申请人： NIKON CORPORATION , POON, Alex, Ka Tim
发明人： POON, Alex, Ka Tim , CHOI, Yeong-jun , YANG, Pai-Hsueh , LEE, Sandy , KESWANI, Gaurav , MAI, Rocky
IPC分类号： F15B9/00 , F15B9/08 , F15B11/00 , F15B11/028
摘要： A stage assembly (10) includes a stage (14), and a fluid actuator assembly (24) that moves the stage (14). The fluid actuator assembly (24) includes a piston housing (32) that defines a piston chamber (34); (ii) a piston (36) that separates the piston chamber (34) into a first chamber (34A) and a second chamber (34B); (iii) a supply valve (38C) that controls the flow of the working fluid (40) into the first chamber (34A); and (iv) an exhaust valve (38D) that controls the flow of the working fluid (40) out of the first chamber (34A). The supply valve (38C) has a supply orifice (250G) having a supply orifice area, and the exhaust valve (38D) has an exhaust orifice (352G) having an exhaust orifice area. Moreover, the supply orifice area is different from the exhaust orifice area. Further multiple valves of different sizes can be used in combination for the supply and exhaust for each chamber (34A), (34B).

3. 发明申请

WO2012174273A1 LOW-NOISE FLUID GAUGES 审中-公开
标题翻译：低噪声流体计
公开(公告)号：WO2012174273A1
公开(公告)日：2012-12-20
申请号：PCT/US2012/042506
申请日：2012-06-14
申请人： NIKON CORPORATION , KHO, Leonard, Wai-fung , LEE, Sandy , COON, Derek , SOGARD, Michael
发明人： KHO, Leonard, Wai-fung , LEE, Sandy , COON, Derek , SOGARD, Michael
IPC分类号： G01B13/12 , G05D7/01
CPC分类号： G01B13/02 , G01B13/12 , G03F9/7034 , G03F9/7057
摘要： Fluid gauges are disclosed having first and second gas passageways each conducting a respective flow of gas. A third gas passageway is connected to the first and second gas passageways and conducts a respective flow of gas from the first and/or second gas passageways. The third gas passageway includes a gas sensor flanked in the third gas passageway by a first flow restrictor and a second flow restrictor to reduce noise in an electronic signal produced by the sensor.
摘要翻译：公开了具有第一和第二气体通道的流体计，每个气体通道各自传导各自的气体流。第三气体通道连接到第一和第二气体通道并且导引来自第一和/或第二气体通道的相应气体流。第三气体通道包括通过第一限流器在第三气体通道中侧翼的气体传感器和第二限流器，以减少由传感器产生的电子信号中的噪声。

4. 发明申请

WO2020165648A1 GRIPPER ASSEMBLY USING ELASTIC MEMBERS DEFORMED WITH VISCOUS FLUID 审中-公开
公开(公告)号：WO2020165648A1
公开(公告)日：2020-08-20
申请号：PCT/IB2020/000099
申请日：2020-02-07
申请人： NIKON CORPORATION
发明人： MAI, Rocky , POON, Alex, Ka Tim , KESVVANI, Gaurav , LEE, Sandy
IPC分类号： B25J15/00
摘要： A gripper assembly (16) for selectively gripping an object (12) includes a gripper subassembly (24) having an elastic member (24A), and a deformer assembly (24E) that urges a gripper fluid (24B) against the elastic member (24A) to deform the elastic member (24A) and form one or more protrusions (24C) that engage the object (12). The gripper subassembly (24) can include a gripper frame (24D) that engages the elastic member (24A). The gripper frame (24D) includes one or more frame apertures (24H), and each protrusion (24C) extends through the gripper frame (24D) and engages the object (12).

5. 发明申请

WO2013063104A1 AIR GAUGES COMPRISING DUAL-RANGE DIFFERENTIAL PRESSURE SENSOR 审中-公开
标题翻译：包含双范围差压传感器的空气压力表
公开(公告)号：WO2013063104A1
公开(公告)日：2013-05-02
申请号：PCT/US2012/061675
申请日：2012-10-24
申请人： NIKON CORPORATION
发明人： SOGARD, Michael , LEE, Sandy
IPC分类号： G01B13/12 , G03F7/20
CPC分类号： G03F9/7026 , G01B13/12 , G03F7/70641 , G03F9/7057
摘要： Position-sensing devices include first and second gas passageways connectable to a source of pressurized gas. A gas-releasing probe is connected to the first passageway. The probe is positionable relative to a surface and configured to release a first flow of the gas, flowing through the first passageway, toward the surface while a second flow of the gas flows through the second passageway. A differential-pressure (DP) sensing device is connected between the first and second passageways. The DP-sensing device has first and second DP sensors connected in parallel. The first DP sensor produces a gas-pressure measurement within a first dynamic -pressure range, and the second DP sensor produces a gas-pressure measurement in a second dynamic-pressure range. The resulting position measurement has greater dynamic range and higher resolution than would otherwise be produced with either the first DP sensor or the second DP sensor alone.
摘要翻译：位置检测装置包括可连接到加压气体源的第一和第二气体通道。气体释放探针连接到第一通道。探针可相对于表面定位并且构造成释放流过第一通道的气体的第一流向表面，同时气体的第二流动流过第二通道。差压（DP）感测装置连接在第一和第二通道之间。 DP感测装置具有并联连接的第一和第二DP传感器。第一DP传感器在第一动态压力范围内产生气体压力测量，第二DP传感器在第二动态压力范围内产生气体压力测量。所产生的位置测量具有比用第一DP传感器或第二DP传感器单独产生的更大的动态范围和更高的分辨率。

6. 发明公开

EP3583322A1 DUAL VALVE FLUID ACTUATOR ASSEMBLY 审中-公开
公开(公告)号：EP3583322A1
公开(公告)日：2019-12-25
申请号：EP18754320.2
申请日：2018-02-12
申请人： Nikon Corporation
发明人： POON, Alex, Ka Tim , CHOI, Yeong-jun , YANG, Pai-Hsueh , LEE, Sandy , KESWANI, Gaurav , MAI, Rocky
IPC分类号： F15B9/00 , F15B9/08 , F15B11/00 , F15B11/028

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