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    • 4. 发明授权
    • Gyroscopes using surface electrodes
    • 陀螺仪使用表面电极
    • US08272266B2
    • 2012-09-25
    • US12421016
    • 2009-04-09
    • Wenhua ZhangPeter George HartwellLennie K KiyamaRobert G Walmsley
    • Wenhua ZhangPeter George HartwellLennie K KiyamaRobert G Walmsley
    • G01C19/00G01P3/44G01P9/00G01P15/08
    • G01C19/5719
    • Gyroscopes using surface electrodes are provided. In this regard, a representative microelectromechanical systems (MEMS) gyroscope, among others, includes a top substrate and a bottom substrate. The top substrate includes an outermost structure that is open and enclosed and a first driving structure that is disposed within the outermost structure and includes first driving electrodes disposed on a bottom surface. The bottom substrate is disposed below the top substrate and includes second driving electrodes disposed on a top surface of the bottom substrate. The second driving electrodes are substantially aligned below the first driving electrodes such that a force can be applied to the first driving structure by an electrostatic force generated between the first and second driving electrodes. The first and second driving electrodes are also configured to provide a capacitance signal based on the movement of the first driving structure.
    • 提供使用表面电极的陀螺仪。 在这方面,代表性的微机电系统(MEMS)陀螺仪等包括顶部基底和底部基底。 顶部基板包括开放和封闭的最外面的结构,以及设置在最外面结构内并包括设置在底面上的第一驱动电极的第一驱动结构。 底部基板设置在顶部基板的下方,并且包括设置在底部基板的顶表面上的第二驱动电极。 第二驱动电极基本上对准第一驱动电极下方,使得能够通过在第一和第二驱动电极之间产生的静电力将力施加到第一驱动结构。 第一和第二驱动电极还被配置为基于第一驱动结构的移动来提供电容信号。