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    • 7. 发明授权
    • Method and apparatus for vaporization of liquid reactants
    • 液体反应物蒸发的方法和装置
    • US5356451A
    • 1994-10-18
    • US169037
    • 1993-12-20
    • Michael B. CainMichael S. Dobbins
    • Michael B. CainMichael S. Dobbins
    • B01D1/00B01D1/22B01J4/00C03B37/014C23C16/448C03B37/023
    • B01D1/0011B01D1/22B01J4/008C03B37/01413C23C16/4485C03B2207/85
    • Disclosed is a method and apparatus for providing reactant vapors to a utilization site. The apparatus includes a vaporization chamber enclosed by top and bottom walls, side walls and first and second end walls. The first end wall is elevated with respect to the second end wall. The reactant is supplied in liquid form to a flow distributor that delivers the liquid to that portion of the bottom wall near the first end wall. The angle with which the bottom wall is inclined with respect to horizontal is sufficient to cause the liquid to flow down the bottom wall at a rate sufficient to form a film, the thickness of which is smaller than that thickness which would support a bubble during heating of the film. The surface is heated to a temperature greater than the boiling point of the liquid, thereby converting the liquid reactant to a vapor that is delivered to the vapor utilization site.
    • 公开了一种将反应物蒸汽提供到利用场所的方法和装置。 该装置包括由顶壁和底壁,侧壁和第一和第二端壁包围的蒸发室。 第一端壁相对于第二端壁升高。 反应物以液体形式供应到流体分配器,其将液体输送到第一端壁附近的底壁部分。 底壁相对于水平面倾斜的角度足以使液体以足以形成膜的速率向下流动,其厚度小于在加热期间支撑气泡的厚度 的电影。 将表面加热到大于液体沸点的温度,从而将液体反应物转化成蒸气,该蒸气被输送到蒸气利用部位。