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1. 发明申请

WO2021003444A2 METROLOGY FOR ADDITIVE MANUFACTURING 审中-公开
公开(公告)号：WO2021003444A2
公开(公告)日：2021-01-07
申请号：PCT/US2020/040772
申请日：2020-07-02
申请人： NIKON CORPORATION , GOODWIN, Eric, Peter
发明人： DURKO, Heather, Lynn , SMITH, Daniel, Gene , MARQUEZ, Johnathan, Agustin , BINNARD, Michael, Birk , CHANG, Patrick, Shih , BJORK, Matthew, Parker-mccormick , COON, Paul, Derek , HERR, Brett, William , ISHIKAWA, Motofusa
IPC分类号： G01B11/25 , G01B9/02 , B33Y50/02 , G01B15/04 , B22F10/28 , B22F10/36 , B22F12/90 , B33Y10/00 , B33Y30/00 , G01B11/2527 , G01B11/2536 , G01B9/02097
摘要： 3D metrology techniques are disclosed for determining a changing topography of a substrate processed in an additive manufacturing system. Techniques include fringe scanning, simultaneous fringe projections, interferometry, and x-ray imaging. The techniques can be applied to 3D printing systems to enable rapid topographical measurements of a 3D printer powder bed, or other rapidly moving, nearly continuous surface to be tested. The techniques act in parallel to the system being measured to provide information about system operation and the topography of the product being processed. A tool is provided for achieving higher precision, increasing throughput, and reducing the cost of operation through early detection and diagnosis of operating problems and printing defects. These techniques work well with any powder bed 3D printing system, providing real-time metrology of the powder bed, the most recently printed layer, or both without reducing throughput.

2. 发明申请

WO2021003309A2 SELECTIVE SINTERING AND POWDERBED CONTAINMENT FOR ADDITIVE MANUFACTURING 审中-公开
公开(公告)号：WO2021003309A2
公开(公告)日：2021-01-07
申请号：PCT/US2020/040565
申请日：2020-07-01
申请人： NIKON CORPORATION
发明人： PHILLIPS, Alton, Hugh , CHOI, Yeon-jun , GUO, Lexian , SMITH, Daniel, Gene , BINNARD, Michael, Birk , TYMINSKI, Jacek, Kazimierz , GOODWIN, Eric, Peter , MARQUEZ, Johnathan, Agustin , HERR, Brett, William , BJORK, Matthew, Parker-mccormick , CHANG, Patrick, Shih , ISHIKAWA, Motofusa , COON, Paul, Derek
IPC分类号： B22F3/105 , B29C64/153 , B29C64/241 , B29C64/393 , B33Y10/00 , B33Y30/00 , B33Y50/02 , B29C64/236 , B29C64/295 , B29C64/379 , B29C64/245 , B29C64/357 , B22F10/20 , B22F10/30 , B22F10/70 , B22F12/00
摘要： A processing machine (10) for building an object (11) from powder (12) includes a build platform (32) that supports a powder layer (14), and an energy system (22). The energy system (22) selectively heats a portion of the powder (12) to generate a sintered portion (26) in the powder layer (14); and subsequently melts the powder (12) to generate a melted portion (28) in the sintered portion (26) of the powder layer (14) to form the object (11). The sintered portion (26) is smaller than the entire powder layer (14). Thus, only a selected, sintered portion (26) of the powder layer (14) is sintered, instead of the entire powder layer (14). A containment structure (611 B) can be concurrently formed to capture unsintered powder (29).

3. 发明申请

WO2019133553A1 ADDITIVE MANUFACTURING SYSTEM WITH ROTARY POWDER BED 审中-公开
公开(公告)号：WO2019133553A1
公开(公告)日：2019-07-04
申请号：PCT/US2018/067407
申请日：2018-12-22
申请人： NIKON CORPORATION
发明人： GOODWIN, Eric, Peter , MARQUEZ, Johnathan , BINNARD, Michael, B. , HERR, Brett , BJORK, Matthew, Parker-McCormick , COON, Paul, Derek , CHANG, Patrick , ISHIKAWA, Motofusa
IPC分类号： B29C64/153 , B22F3/105 , B23K26/03 , B29C64/141 , B33Y30/00
摘要： A processing machine (10) for building a part (11) includes: a support device (26) including a support surface (26B); a drive device (28) which moves the support device (26) so as a specific position on the support surface (26B) is moved along a moving direction (25); a powder supply device (18) which supplies a powder (12) to the moving support device (26) to form a powder layer (13); an irradiation device (22) which irradiates at least a portion of the powder layer (13) with an energy beam (22D) to form at least a portion of the part (11) from the powder layer (13) during a first period of time; and a measurement device (20) which measures at least portion of the part (11) during a second period of time. The first period in which the irradiation device (22) irradiates the powder layer (13) with the energy beam (22D) and the second period in which the measurement device (22) measures are overlapped.

4. 发明申请

WO2021113151A2 ADDITIVE MANUFACTURING SYSTEM WITH THERMAL CONTROL OF MATERIAL 审中-公开
公开(公告)号：WO2021113151A2
公开(公告)日：2021-06-10
申请号：PCT/US2020/062490
申请日：2020-11-27
申请人： NIKON CORPORATION
发明人： GUO, Lexian , PHILLIPS, Alton, Hugh , SMITH, Daniel, Gene , TEMKOW, Gary, Michael , BINNARD, Michael, Birk , BJORK, Matthew, Parker-mccormick , COON, Paul, Derek , ROSA, Matthew, David , CHOI, Yeong , SUKIR, Shruthi , GOTO, Takakuni
IPC分类号： B22F12/13 , B22F12/17 , B22F12/20 , B22F12/37 , B22F12/00 , B22F12/44 , B22F10/28 , B22F10/362 , B22F10/368 , B22F12/52 , B22F12/90 , B29C64/153 , B33Y10/00 , B33Y30/00 , B33Y40/00 , B22F12/38 , B22F2203/11 , B29C64/241 , B29C64/245 , B29C64/255 , B29C64/295
摘要： A processing machine (10) for building an object (11 A) includes: (i) a build platform (44) that supports a material (12); (ii) a build chamber assembly; (iii) a material supply device (18) that deposits material onto the build platform (44) in a deposition area (34); (iv) an energy system (22) that selectively melts the material (12) in a melting area (36); (v) a heating assembly (26) that heats the material (12) in a heating area (38); (vi) a cooling assembly (28) that cools the material (12) in a cooling area (40); (vii) a mover assembly (32) that moves the build platform (44); and (viii) a control system (24) that controls the energy system (22), the heating assembly (26) and the cooling assembly (28) to actively control the temperature on the build platform (44).

5. 发明公开

EP1090329A1 ALIGNMENT SIMULATION 审中-公开
标题翻译：定向仿真
公开(公告)号：EP1090329A1
公开(公告)日：2001-04-11
申请号：EP99920243.5
申请日：1999-04-29
申请人： NIKON CORPORATION
发明人： COON, Paul, Derek , CHAU, Henry, Kwok, Pang , AIYER, Arun, Ananth
IPC分类号： G03B27/42 , G03B27/58
CPC分类号： G03F9/7092 , G03F9/7076
摘要： An alignment simulation method simulates the signal waveform for an alignment mark using various alignment methods as well as the signal strength for an alignment mark, which is useful in optimizing the thickness of one or more layers as well as the geometry of the mark. The simulation of signal strength is also useful in optimizing the thickness of a layer for artifact wafers. The alignment simulation method includes accurately modeling the alignment mark, including one or more layers of various thicknesses and materials. The accurate modeling of the alignment mark includes such things as smoothing regions of the alignment mark and generating lateral shifts of the layers. The model of the alignment mark is a series of small pixels, each including the thickness of the layers and the layers indices of refraction. Using scalar diffraction, a complex reflectivity is generated for each pixel and a fast fourier transform is performed on the series of pixels. The results of the fast fourier transform are used to simulate the diffraction intensities for the alignment mark alignment systems, such as LIA or LSA as well as the signal waveforms. The LSA signal waveform, however, requires additional modeling of the alignment mark. An FIA image is generated by removing appropriate orders from the fast fourier transform result and performing an inverse fast fourier transform and repeating the process at different light wavelengths and illumination angles. The signal strength is the maximum value of the image minus the minimum.

6. 发明公开

EP3743260A1 ADDITIVE MANUFACTURING SYSTEM WITH ROTARY POWDER BED 审中-公开
公开(公告)号：EP3743260A1
公开(公告)日：2020-12-02
申请号：EP18896206.2
申请日：2018-12-22
申请人： NIKON CORPORATION
发明人： GOODWIN, Eric, Peter , MARQUEZ, Johnathan , BINNARD, Michael, B. , HERR, Brett , BJORK, Matthew, Parker-McCormick , COON, Paul, Derek , CHANG, Patrick , ISHIKAWA, Motofusa
IPC分类号： B29C64/153 , B22F3/105 , B23K26/03 , B29C64/141 , B33Y30/00

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