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    • 4. 发明授权
    • Methods for decomposing circuit design layouts and for fabricating semiconductor devices using decomposed patterns
    • 分解电路设计布局和使用分解模式制造半导体器件的方法
    • US08555215B2
    • 2013-10-08
    • US13400445
    • 2012-02-20
    • Yi ZouSwamy MadduLynn T. WangVito DaiLuigi CapodieciPeng Xie
    • Yi ZouSwamy MadduLynn T. WangVito DaiLuigi CapodieciPeng Xie
    • G06F17/50
    • G03F1/70
    • Methods for fabricating semiconductor devices are provided. In an embodiment, a method of fabricating a semiconductor device includes scanning a circuit design layout and proposing patterns for decomposed layouts. The proposed patterns are then compared with a library of prior patterns including a category of forbidden patterns and a category of preferred patterns. If a selected proposed pattern matches a forbidden pattern, the selected proposed pattern is eliminated. If the selected proposed pattern matches a preferred pattern, then the selected proposed pattern is identified for use in the decomposed layouts. Decomposed layouts are generated from the identified patterns. A plurality of masks is fabricated based on the decomposed layouts. Then a multiple patterning lithographic technique is performed with the plurality of masks on a semiconductor substrate.
    • 提供制造半导体器件的方法。 在一个实施例中,制造半导体器件的方法包括扫描电路设计布局并提出用于分解布局的图案。 然后将所提出的模式与包括禁止模式类别和优选模式类别的先前模式的库进行比较。 如果所选择的提议模式匹配禁止模式,则删除所选择的提议模式。 如果所选择的提出的模式匹配优选模式,则所选择的提出的模式被识别用于分解的布局。 分辨的布局是从识别的图案生成的。 基于分解的布局制造多个掩模。 然后用半导体衬底上的多个掩模进行多重图形化光刻技术。
    • 6. 发明授权
    • System for generating and optimizing mask assist features based on hybrid (model and rules) methodology
    • 基于混合(模型和规则)方法生成和优化掩模辅助功能的系统
    • US08103979B2
    • 2012-01-24
    • US12254172
    • 2008-10-20
    • Yi ZouLuigi Capodieci
    • Yi ZouLuigi Capodieci
    • G06F17/50
    • G03F1/36
    • An optimal assist feature rules set for an integrated circuit design layout is created using inverse lithography. The full chip layout is lithographically simulated, and printability failure areas are determined. The features are analyzed for feature layout patterns, and inverse lithography is performed on the unique feature layouts to form assist features. The resulting layout of assist features is analyzed to create an assist feature rules set. The rules can then be applied to a photomask patterned with the integrated circuit design layout to print optimal assist features. The resulting photomask may be used to form an integrated circuit on a semiconductor substrate.
    • 使用反光刻法创建集成电路设计布局的最佳辅助特征规则集。 全芯片布局被光刻仿真,并确定了可印刷性故障区域。 对特征布局图案进行特征分析,并对独特特征布局进行反光刻以形成辅助特征。 分析所得到的辅助特征布局以创建辅助特征规则集。 然后可以将规则应用于利用集成电路设计布局图案化的光掩模,以打印最佳辅助特征。 所得到的光掩模可用于在半导体衬底上形成集成电路。
    • 7. 发明授权
    • Transparent copolyester, preparing method thereof and articles made from the same
    • 透明共聚聚酯,其制备方法和由其制成的制品
    • US09102782B2
    • 2015-08-11
    • US13571317
    • 2012-08-09
    • Ning XuGuixiang ZhuWei ZhangLing HanYi ZouWenxi Ji
    • Ning XuGuixiang ZhuWei ZhangLing HanYi ZouWenxi Ji
    • C08G18/42C08G63/60C08G63/91C08G18/73C08G18/34
    • C08G18/4216C08G18/348C08G18/73C08G63/60C08G63/91
    • The present invention relates to a transparent copolyester, wherein the transparent copolyester comprises an aliphatic-aromatic copolyester segment A, a segment B having repeating units —O—CH(CH3)—C(O)—, and structural units C derived from polyisocyanate(s), wherein the weight ratio for the segment A, segment B and structural unit C is 100:(100-2000):(0.1-10) and wherein the weight-average molecular weight Mw of the transparent copolyester is from 50,000 to 1,000,000. The present invention further relates to a preparation method for a transparent copolyester, including polymerizing lactide, a hydroxyl-terminated aliphatic-aromatic copolyester and a polyisocyanate in the presence of a catalyst; wherein the weight ratio for the aliphatic-aromatic copolyester, lactide and polyisocyanate is 100:(100-2000):(0.1-10). The present invention further relates to a transparent copolyester prepared by said method and an article made from the transparent copolyester according to present invention.
    • 本发明涉及一种透明共聚酯,其中该透明共聚聚酯包括脂肪族 - 芳族共聚酯链段A,具有重复单元-O-CH(CH 3)-C(O)的链段B和衍生自多异氰酸酯的结构单元C s),其中段A,段B和结构单元C的重量比为100:(100-2000):(0.1-10),并且其中透明共聚酯的重均分子量Mw为50,000至1,000,000 。 本发明还涉及一种透明共聚酯的制备方法,包括在催化剂存在下聚合丙交酯,羟基封端的脂族 - 芳族共聚酯和多异氰酸酯; 其中脂族 - 芳族共聚酯,丙交酯和多异氰酸酯的重量比为100:(100-2000):(0.1-10)。 本发明还涉及通过所述方法制备的透明共聚酯和由根据本发明的透明共聚酯制成的制品。
    • 10. 发明申请
    • METHODS FOR DECOMPOSING CIRCUIT DESIGN LAYOUTS AND FOR FABRICATING SEMICONDUCTOR DEVICES USING DECOMPOSED PATTERNS
    • 用于分解电路设计层和使用分解图案制作半导体器件的方法
    • US20130219347A1
    • 2013-08-22
    • US13400445
    • 2012-02-20
    • Yi ZouSwamy MudduLynn T. WangVito DaiLuigi CapodieciPeng Xie
    • Yi ZouSwamy MudduLynn T. WangVito DaiLuigi CapodieciPeng Xie
    • G06F17/50
    • G03F1/70
    • Methods for fabricating semiconductor devices are provided. In an embodiment, a method of fabricating a semiconductor device includes scanning a circuit design layout and proposing patterns for decomposed layouts. The proposed patterns are then compared with a library of prior patterns including a category of forbidden patterns and a category of preferred patterns. If a selected proposed pattern matches a forbidden pattern, the selected proposed pattern is eliminated. If the selected proposed pattern matches a preferred pattern, then the selected proposed pattern is identified for use in the decomposed layouts. Decomposed layouts are generated from the identified patterns. A plurality of masks is fabricated based on the decomposed layouts. Then a multiple patterning lithographic technique is performed with the plurality of masks on a semiconductor substrate.
    • 提供制造半导体器件的方法。 在一个实施例中,制造半导体器件的方法包括扫描电路设计布局并提出用于分解布局的图案。 然后将所提出的模式与包括禁止模式类别和优选模式类别的先前模式的库进行比较。 如果所选择的提议模式匹配禁止模式,则删除所选择的提议模式。 如果所选择的提出的模式匹配优选模式,则所选择的提出的模式被识别用于分解的布局。 分辨的布局是从识别的图案生成的。 基于分解的布局制造多个掩模。 然后用半导体衬底上的多个掩模进行多重图形化光刻技术。