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    • 10. 发明授权
    • Piezoelectric microcantilevers and uses in atomic force microscopy
    • 压电微悬臂梁和原子力显微镜的应用
    • US08857248B2
    • 2014-10-14
    • US13160304
    • 2011-06-14
    • Wan Y. ShihWei-Heng ShihZuyan ShenQing Zhu
    • Wan Y. ShihWei-Heng ShihZuyan ShenQing Zhu
    • G01B5/28G01B9/04G01Q10/04G01Q20/04G01Q60/38B82Y35/00
    • G01Q60/38B82Y35/00G01B9/04G01Q10/045G01Q20/04Y10T29/42
    • The invention is direct to a piezoelectric microcantilever for static contact and dynamic noncontact atomic force microscopy which may be carried out in solution. The piezoelectric microcantilever, which includes a piezoelectric layer and a non-piezoelectric layer is capable of self actuation and detection. The piezoelectric layer may be constructed from a lead magnesium niobate-lead titanate (Pb(Mg1/3Nb2/3)O3)0.65—(PbTiO3)0.35(PMN0.65-PT0.35) (PMN-PT), zirconate titanate (PZT)/SiO2 or from any lead-free piezoelectric materials such as doped sodium-potassium niobate-lithium niobate. The piezoelectric layers of the microcantilevers may have dielectric constants of from 1600-3000 and thicknesses below 10 μm. Also disclosed are methods for fabricating microcantilever sensors and methods for atomic force microscopy employing the microcantilevers.
    • 本发明直接用于静态接触和动态非接触原子力显微镜的压电微悬臂梁,其可以在溶液中进行。 包括压电层和非压电层的压电微悬臂梁能够自动启动和检测。 压电层可以由铌酸铅镁酸铅(Pb(Mg1 / 3Nb2 / 3)O3)0.65-(PbTiO3)0.35(PMN0.65-PT0.35)(PMN-PT),锆钛酸铅(PZT) )/ SiO 2或来自任何无铅压电材料如掺杂的铌酸钠 - 铌酸锂 - 铌酸锂。 微悬臂梁的压电层可以具有1600-3000的介电常数和低于10μm的厚度。 还公开了用于制造微悬臂梁传感器的方法和使用微悬臂梁的原子力显微镜的方法。