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    • 2. 发明申请
    • Methods of fabricating image sensors and image sensors fabricated thereby
    • 制造图像传感器和图像传感器的方法
    • US20110163362A1
    • 2011-07-07
    • US13064176
    • 2011-03-09
    • Won-je ParkChan ParkYoung-hoon ParkJae-ho SongJong-wook HongKeo-sung Park
    • Won-je ParkChan ParkYoung-hoon ParkJae-ho SongJong-wook HongKeo-sung Park
    • H01L31/14
    • H01L27/14643H01L27/14603H01L27/14609H01L27/14641H01L27/14689
    • A method of fabricating an image sensor may include providing a substrate including light-receiving and non-light-receiving regions; forming a plurality of gates on the non-light-receiving region; ion-implanting a first-conductivity-type dopant into the light-receiving region to form a first dopant region of a pinned photodiode; primarily ion-implanting a second-conductivity-type dopant, different from the first-conductivity-type dopant, into an entire surface of the substrate, using the gates as a first mask; forming spacers on both side walls of the gates; and secondarily ion-implanting the second-conductivity-type dopant into the entire surface of the substrate, using the plurality of gates including the spacers as a second mask, to complete a second dopant region of the pinned photodiode. An image sensor may include the substrate; a transfer gate formed on the non-light-receiving region; a first dopant region in the light-receiving region; and a second dopant region formed on a surface of the light-receiving region.
    • 制造图像传感器的方法可以包括提供包括光接收和非光接收区域的基板; 在非光接收区域上形成多个栅极; 将第一导电型掺杂剂离子注入到光接收区域中以形成钉扎光电二极管的第一掺杂区域; 主要使用栅极作为第一掩模,将与第一导电类型掺杂剂不同的第二导电型掺杂剂离子注入基板的整个表面; 在门的两个侧壁上形成间隔物; 并且其次使用包括间隔物的多个栅极作为第二掩模将第二导电型掺杂剂离子注入到基板的整个表面中,以完成被钉扎的光电二极管的第二掺杂区域。 图像传感器可以包括基板; 形成在非光接收区域上的传输门; 在所述光接收区域中的第一掺杂剂区域; 以及形成在光接收区域的表面上的第二掺杂剂区域。
    • 3. 发明授权
    • Image sensors with lightly doped drain (LDD) to reduce dark current
    • 具有轻掺杂漏极(LDD)的图像传感器,以减少暗电流
    • US08624310B2
    • 2014-01-07
    • US13064176
    • 2011-03-09
    • Won-je ParkChan ParkYoung-hoon ParkJae-ho SongJong-wook HongKeo-sung Park
    • Won-je ParkChan ParkYoung-hoon ParkJae-ho SongJong-wook HongKeo-sung Park
    • H01L29/06
    • H01L27/14643H01L27/14603H01L27/14609H01L27/14641H01L27/14689
    • A method of fabricating an image sensor may include providing a substrate including light-receiving and non-light-receiving regions; forming a plurality of gates on the non-light-receiving region; ion-implanting a first-conductivity-type dopant into the light-receiving region to form a first dopant region of a pinned photodiode; primarily ion-implanting a second-conductivity-type dopant, different from the first-conductivity-type dopant, into an entire surface of the substrate, using the gates as a first mask; forming spacers on both side walls of the gates; and secondarily ion-implanting the second-conductivity-type dopant into the entire surface of the substrate, using the plurality of gates including the spacers as a second mask, to complete a second dopant region of the pinned photodiode. An image sensor may include the substrate; a transfer gate formed on the non-light-receiving region; a first dopant region in the light-receiving region; and a second dopant region formed on a surface of the light-receiving region.
    • 制造图像传感器的方法可以包括提供包括光接收和非光接收区域的基板; 在非光接收区域上形成多个栅极; 将第一导电型掺杂剂离子注入到光接收区域中以形成钉扎光电二极管的第一掺杂区域; 主要使用栅极作为第一掩模,将与第一导电类型掺杂剂不同的第二导电型掺杂剂离子注入基板的整个表面; 在门的两个侧壁上形成间隔物; 并且其次使用包括间隔物的多个栅极作为第二掩模将第二导电型掺杂剂离子注入到基板的整个表面中,以完成被钉扎的光电二极管的第二掺杂区域。 图像传感器可以包括基板; 形成在非光接收区域上的传输门; 在所述光接收区域中的第一掺杂剂区域; 以及形成在光接收区域的表面上的第二掺杂剂区域。
    • 7. 发明申请
    • Methods of fabricating image sensors and image sensors fabricated thereby
    • 制造图像传感器和图像传感器的方法
    • US20070267666A1
    • 2007-11-22
    • US11798704
    • 2007-05-16
    • Won-je ParkChan ParkYoung-hoon ParkJae-ho SongJong-wook HongKeo-sung Park
    • Won-je ParkChan ParkYoung-hoon ParkJae-ho SongJong-wook HongKeo-sung Park
    • H01L31/113H01L21/00
    • H01L27/14643H01L27/14603H01L27/14609H01L27/14641H01L27/14689
    • A method of fabricating an image sensor may include providing a substrate including light-receiving and non-light-receiving regions; forming a plurality of gates on the non-light-receiving region; ion-implanting a first-conductivity-type dopant into the light-receiving region to form a first dopant region of a pinned photodiode; primarily ion-implanting a second-conductivity-type dopant, different from the first-conductivity-type dopant, into an entire surface of the substrate, using the gates as a first mask; forming spacers on both side walls of the gates; and secondarily ion-implanting the second-conductivity-type dopant into the entire surface of the substrate, using the plurality of gates including the spacers as a second mask, to complete a second dopant region of the pinned photodiode. An image sensor may include the substrate; a transfer gate formed on the non-light-receiving region; a first dopant region in the light-receiving region; and a second dopant region formed on a surface of the light-receiving region.
    • 制造图像传感器的方法可以包括提供包括光接收和非光接收区域的基板; 在非光接收区域上形成多个栅极; 将第一导电型掺杂剂离子注入到光接收区域中以形成钉扎光电二极管的第一掺杂区域; 主要使用栅极作为第一掩模,将与第一导电类型掺杂剂不同的第二导电型掺杂剂离子注入基板的整个表面; 在门的两个侧壁上形成间隔物; 并且其次使用包括间隔物的多个栅极作为第二掩模将第二导电型掺杂剂离子注入到基板的整个表面中,以完成被钉扎的光电二极管的第二掺杂区域。 图像传感器可以包括基板; 形成在非光接收区域上的传输门; 在所述光接收区域中的第一掺杂剂区域; 以及形成在光接收区域的表面上的第二掺杂剂区域。
    • 10. 发明授权
    • Multiple transposition method for superconducting wire
    • 超导线多重转置法
    • US08322019B2
    • 2012-12-04
    • US12997652
    • 2010-07-05
    • Kyeong Dal ChoiJi Kwang LeeWoo Seok KimChan ParkYung Il Kim
    • Kyeong Dal ChoiJi Kwang LeeWoo Seok KimChan ParkYung Il Kim
    • H01B13/02H01B7/30H01B12/06H01B12/08
    • H01B12/02H01B7/306Y02E40/641Y10T29/49014Y10T29/49194
    • Provided is a multiple transposition method for superconducting wire, by making each superconducting wire unit from second-generation superconducting wires that were firstly transposed and then transposing each superconducting wire unit in such a manner that the phase of each unit can be changed along the length, comprising preparing wires by making curves on superconducting wires in such a manner that the superconducting wires of a thin multiple layer grown epitaxially are slit in zigzags and then making the curves repeatedly and by machining the wires with a desired length; making first-transposed superconducting wire units by combining a plurality of the prepared wires such that curves of adjacent wires come in touch to each other and are superposed; preparing a superconducting wire unit bundle by arranging the first-transposed superconducting wires units and by locating a plurality of the first-transposed superconducting wire units in parallel along the length; and making a second transposition on the first-transposed superconducting wire units by rotating the plurality of superconducting wire units on the central axis of the superconducting wire unit bundle along the length to be twisted and combined with each other.
    • 提供了一种用于超导线的多重转置方法,通过使来自第二代超导线的每个超导线单元首先被转置,然后以每个单元的相位沿着该长度改变的方式移位每个超导线单元, 包括通过在超导线上制作曲线来制备导线,使得外延生长的薄多层的超导线以锯齿形切割,然后反复制作曲线并通过机加工所需长度的线; 通过组合多个所制备的导线使相邻导线的曲线彼此接触并重叠而制造第一转置超导线单元; 通过布置第一转置超导线单元并通过沿着长度平行地定位多个第一转置的超导线单元来制备超导线单元束; 以及通过在所述超导线单元束的中心轴线上沿着要被扭曲并且彼此组合的长度旋转所述多个超导线单元,在所述第一转置的超导线单元上进行第二转置。