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    • 83. 发明专利
    • Driving mechanism for vacuum treatment apparatus
    • 真空处理设备的驱动机制
    • JP2005336596A
    • 2005-12-08
    • JP2004233658
    • 2004-08-10
    • Applied Films Gmbh & Co Kgアプライド フィルムス ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー コマンディートゲゼルシャフト
    • LINDENBERG RALPHKOENIG MICHAELSCHUSSLER UWEBANGERT STEFAN
    • C23C14/50C23C14/56C23C16/44C23C16/54H01L21/00H01L21/677
    • C23C14/568C23C16/54H01L21/67196H01L21/67742
    • PROBLEM TO BE SOLVED: To provide a driving mechanism for a vacuum treatment apparatus where, in the one of a form provided with: a supporting column 1 at a fixed position; a motor 4 arranged at the supporting column; a transmission gear chamber 6 rotatable with an axis A-A as the center; and control rods 9 passing through the wall of the transmission gear chamber and each operationally attached to a substrate holder to which the same belongs to, even in the case of a substrate with a large area, it can be guided through the vacuum treatment device without being fixed to the substrate holder and being impacted.
      SOLUTION: The motor is attached to a bearing casing 5 at a fixed position, and a rotatable apparatus composed of a plurality of radially arranged arms 14 is born inside the bearing casing cocentrically to the supporting column. Each arm is attached to one end part of each angle lever 16 of the upper arms as a hinge. Each angle lever comprises a pivoting pin 17. The other end part of the angle lever is attached to the control rod 9 as a hinge. The pivoting pin is guided into a control cam 11 at a fixed position. The cam orbit path of the control cam prescribes the movement in the radial direction of the control rod.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 解决的问题:提供一种真空处理装置的驱动机构,其中,在固定位置设置有支撑柱1的形式中, 布置在支撑柱上的马达4; 以A-A轴为中心旋转的传动齿轮室6; 以及控制杆9,其通过传动齿轮室的壁并且各自操作地附接到其所属的基板保持器,即使在具有大面积的基板的情况下,也可以通过真空处理装置而被引导而没有 被固定到衬底保持器并受到冲击。 解决方案:电动机在固定位置附接到轴承壳体5,并且由多个径向布置的臂14组成的可旋转设备在轴承壳体内部以中心方式承载在支撑柱上。 每个臂作为铰链连接到上臂的每个角杠杆16的一个端部。 每个角度杆包括枢转销17.角杠杆的另一端部作为铰链附接到控制杆9。 枢转销在固定位置被引导到控制凸轮11中。 控制凸轮的凸轮轨道规定了控制杆的径向运动。 版权所有(C)2006,JPO&NCIPI
    • 89. 发明专利
    • Long-term sputtering method
    • 长期飞溅方法
    • JP2003013218A
    • 2003-01-15
    • JP2001198952
    • 2001-06-29
    • Canon Incキヤノン株式会社
    • ECHIZEN YUTAKANAKAYAMA AKIYATAKAI YASUYOSHI
    • C23C14/34C23C14/00C23C14/56H01L31/0224H01L31/04
    • H01L31/022466C23C14/0042C23C14/0073C23C14/568H01L31/022483
    • PROBLEM TO BE SOLVED: To provide a technology for forming a metal oxide film, which forms a rear reflective layer of a solar battery having constant characteristics even when the film is formed for a long time, and keeps an electric current of the bottom cell and Jsc (shunt current) of the solar battery constant over a long period. SOLUTION: The sputtering method for laminating the metal film/metal oxide film, having a step 1 of forming a metal layer on a substrate, a step 2 of contacting the surface of the metal layer with active oxygen, and a step 3 of forming the metal oxide film after contacting it with active oxygen, is characterized in that the quantity of active oxygen on the first position of the substrate in the above process 2 differs from that on the second position.
    • 要解决的问题:为了提供形成金属氧化物膜的技术,其形成具有恒定特性的太阳能电池的后反射层,即使长时间形成膜,并且保持底部电池的电流和 太阳能电池的Jsc(分流电流)长时间恒定。 解决方案:用于层叠金属膜/金属氧化物膜的溅射方法,具有在基板上形成金属层的步骤1,使金属层的表面与活性氧接触的工序2和形成 金属氧化物膜与活性氧接触后的特征在于,上述工序2中的基板的第一位置的活性氧的量与第二位置的活性氧的量不同。