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1. 发明专利

JP2013131265A Substrate support device and substrate conveyance device 有权
标题翻译：基板支撑装置和基板输送装置
公开(公告)号：JP2013131265A
公开(公告)日：2013-07-04
申请号：JP2011279259
申请日：2011-12-21
申请人： Canon Anelva Corp , キヤノンアネルバ株式会社
发明人： YOSHIZUKA KOICHI , YAMADA SATOSHI
IPC分类号： G11B5/84 , G11B5/851
CPC分类号： B25J15/0047 , B25J15/0019 , B25J17/0233 , C23C14/505 , G11B5/8404
摘要： PROBLEM TO BE SOLVED: To provide a substrate support device capable of further improving a buffer effect to prevent damage and breakage of a substrate even when the soft substrate is used.SOLUTION: The substrate support device includes: a first connection section 81 which is connected to a substrate support section 5 for supporting the substrate and includes a first magnet 4a; a second connection section 82 which is disposed oppositely to the first connection section 81, can be connected to a conveyance robot for conveying the substrate to a conveyance holder and includes a second magnet 4b magnetically coupled to the first magnet 4a; and a spacer 40a for holding an interval between the first connection section 81 and the second connection section 82. The first connection section 81 and the second connection section 82 are relatively movable in a surface direction of the substrate via the spacer 40a.
摘要翻译：要解决的问题：提供一种能够进一步提高缓冲效果的基板支撑装置，即使在使用软基板时也能够防止基板的损坏和破损。解决方案：基板支撑装置包括：第一连接部81，其连接到用于支撑基板的基板支撑部分5，并且包括第一磁体4a; 与第一连接部81相对设置的第二连接部82可以连接到输送机器人，用于将基板输送到输送保持器，并且包括磁耦合到第一磁体4a的第二磁体4b; 以及用于在第一连接部81和第二连接部82之间保持间隔的间隔件40a.第一连接部81和第二连接部82经由间隔件40a在基板的表面方向上相对移动。

2. 发明专利

JP2011047515A Driving device and vacuum processing apparatus 审中-公开
标题翻译：驱动装置和真空加工装置
公开(公告)号：JP2011047515A
公开(公告)日：2011-03-10
申请号：JP2010154422
申请日：2010-07-07
申请人： Canon Anelva Corp , キヤノンアネルバ株式会社
发明人： MIYAUCHI TAKUMA , YOSHIZUKA KOICHI
IPC分类号： F16H49/00 , B65G49/00 , F16H25/24 , H01L21/677
CPC分类号： H02K49/102 , H02K7/06
摘要： PROBLEM TO BE SOLVED: To provide a magnetic screw driving device contributing to reduction in maintenance cost and running cost.
SOLUTION: The magnetic screw driving device 9 is for rotating a helical magnet shaft 11 axially supported by a housing 17 via a drive shaft 13 connected to a motor. A lubricant Gr in the housing 17 can be sealed by including a cylindrical collar 19 inserted and airtightly attached with the drive shaft 13 and the helical magnet shaft 11, and an oil seal 20 attached to a side of the housing 17 to slidably contact a surface of the collar 19 in each of the drive shaft 13 and the helical magnet shaft 11.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种有助于降低维护成本和运行成本的磁性螺杆驱动装置。解决方案：磁螺杆驱动装置9用于通过连接到电动机的驱动轴13旋转由壳体17轴向支撑的螺旋磁体轴11。壳体17中的润滑剂Gr可以通过包括插入和气密地附接有驱动轴13和螺旋磁体轴11的圆柱形套环19以及附接到壳体17的侧面的油封20来密封，以可滑动地接触表面每个驱动轴13和螺旋磁体轴11中的轴环19。版权所有（C）2011，JPO＆INPIT

3. 发明专利

JP2009155706A Sputtering apparatus having shutter mechanism 有权
标题翻译：具有快门机构的飞溅装置
公开(公告)号：JP2009155706A
公开(公告)日：2009-07-16
申请号：JP2007337370
申请日：2007-12-27
申请人： Canon Anelva Corp , キヤノンアネルバ株式会社
发明人： KOBAYASHI YUKIHIRO , YOSHIZUKA KOICHI , OTA TOSHIYUKI
IPC分类号： C23C14/34
CPC分类号： C23C14/568 , C23C14/3407 , H01J37/34 , H01J37/3447
摘要： PROBLEM TO BE SOLVED: To provide a sputtering apparatus which surely prevents sputtered particles from scattering out and from flowing in a neighbor target, inhibits an occurrence of a shadow effect, and prevents the exfoliation of a film and the formation of particles by eliminating a contacting state.
SOLUTION: A shutter device of the sputtering apparatus has a shutter mechanism provided on a plurality of targets 23 and 24 which are installed in the inside of vacuum chambers 17A to 17C for forming the film therein, so as to prevent the targets from contaminating each other. The shutter mechanism has fixed parts 53 and 54 of the shutter, and movable parts 56 and 59 of the shutter for shielding. When the shutter closes, the fixed part of the shutter and the movable part of the shutter which approach to each other form a gap. The gap is formed so as to have a bent shape, particularly a bent shape of being bent in a U-shape in a cross section that is perpendicular to the target, so that when a particle going straight ahead passes through the gap, it surely collides with a wall forming the gap; and accordingly forms a shielding state.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了提供一种能够可靠地防止溅射的颗粒在邻近目标物体中散射和流出的溅射装置，可以抑制阴影效应的发生，防止膜的剥离和颗粒的形成消除接触状态。解决方案：溅射装置的快门装置具有设置在多个靶23和24上的快门机构，该快门机构安装在用于在其中形成薄膜的真空室17A至17C的内部，以防止目标互相污染快门机构具有活门的固定部分53和54以及用于屏蔽的快门的可移动部分56和59。当快门关闭时，快门的固定部分和彼此靠近的快门的可移动部分形成间隙。该间隙形成为具有弯曲形状，特别是弯曲成与垂直于靶的横截面呈U字形的弯曲形状，使得当直线前进的颗粒通过间隙时，其可靠地与形成间隙的壁碰撞; 并因此形成屏蔽状态。版权所有（C）2009，JPO＆INPIT

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