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    • 97. 发明申请
    • Apparatus and method for making carbon nanotube array
    • 制造碳纳米管阵列的装置和方法
    • US20060269669A1
    • 2006-11-30
    • US11371997
    • 2006-03-08
    • Kai-Li JiangKai LiuShou-Shan Fan
    • Kai-Li JiangKai LiuShou-Shan Fan
    • C23C16/00
    • C23C16/0281C23C16/26C23C16/448C30B25/02C30B29/02C30B29/605Y10S427/102
    • An apparatus for making an array of carbon nanotubes includes a reaction chamber with a gas inlet and a gas outlet; a quartz boat disposed in the reaction chamber; a substrate with a surface deposited with a film of first catalyst, the substrate being disposed in the quartz boat; and a second catalyst disposed in the quartz beside the substrate. A method for making an array of carbon nanotubes, comprising the steps of: (a) providing a substrate with a surface deposited with a film of first catalyst; (b) disposing a second catalyst beside the substrate to produce small amounts of hydrogen gas which flows to the first catalyst; (c) introducing a carrier gas and a carbon source gas flowing from the second catalyst to the first catalyst at a predetermined temperature; and (d) growing an array of carbon nanotubes extending from the substrate.
    • 制造碳纳米管阵列的装置包括具有气体入口和气体出口的反应室; 设置在反应室中的石英舟; 具有表面沉积有第一催化剂膜的基板,所述基板设置在所述石英舟中; 以及设置在基板旁边的石英中的第二催化剂。 一种制备碳纳米管阵列的方法,包括以下步骤:(a)向基材提供沉积有第一催化剂膜的表面; (b)在基板旁边设置第二催化剂以产生流过第一催化剂的少量氢气; (c)在预定温度下引入从第二催化剂流向第一催化剂的载气和碳源气体; 和(d)生长从衬底延伸的碳纳米管阵列。