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    • 13. 发明授权
    • Ferroelectric based memory devices utilizing hydrogen barriers and
getters
    • 采用氢屏障和吸气剂的铁电存储器件
    • US6066868A
    • 2000-05-23
    • US282309
    • 1999-03-31
    • Joseph T. Evans, Jr.
    • Joseph T. Evans, Jr.
    • H01L21/02H01L21/8246H01L27/115H01L29/51H01L29/76
    • H01L27/11502G11C11/221H01L27/11507H01L28/55H01L28/75H01L29/516
    • A ferroelectric memory cell for storing information. The information is stored in the remnant polarization of a ferroelectric dielectric layer by setting the direction of the remnant polarization. The ferroelectric memory cell is designed to store the information at a temperature less than a first temperature. The memory cell includes top and bottom contacts that sandwich the dielectric layer which includes a ferroelectric material having a Curie point greater than the first temperature and less than 400.degree. C. The dielectric layer is encapsulated in an oxygen impermeable material such that the encapsulating layer prevents oxygen from entering or leaving the dielectric layer. The memory also includes a hydrogen barrier layer that inhibits the flow of oxygen to the top and bottom electrodes when the memory cell is placed in a gaseous environment containing hydrogen. In one embodiment of the invention, a hydrogen absorbing layer is included. In the preferred embodiment of the present invention, the hydrogen barrier layer is constructed from a material that will also bind hydrogen ions.
    • 用于存储信息的铁电存储单元。 通过设定残留极化的方向,将信息存储在铁电介质层的剩余极化中。 铁电存储器单元被设计成在小于第一温度的温度下存储信息。 存储单元包括夹住介电层的顶部和底部触点,其包括具有大于第一温度且小于400℃的居里点的铁电材料。电介质层被封装在不透氧材料中,使得封装层防止 氧气进入或离开电介质层。 存储器还包括当将存储单元放置在含有氢气的气体环境中时,阻止氧气流向顶部和底部电极的氢气阻挡层。 在本发明的一个实施方案中,包括吸氢层。 在本发明的优选实施方案中,氢阻挡层由也会结合氢离子的材料构成。
    • 14. 发明授权
    • Ferroelectric memory having a common plate electrode
    • 铁电存储器具有公共板电极
    • US5963466A
    • 1999-10-05
    • US059606
    • 1998-04-13
    • Joseph T. Evans, Jr.
    • Joseph T. Evans, Jr.
    • G11C11/22H01L21/02H01L27/115H01L29/92H01L29/76
    • H01L27/11502G11C11/22H01L28/40
    • A memory for storing a plurality of words of data. The memory is constructed from one or more storage blocks. Each storage block includes a plurality of storage words, each storage word storing one of the words of data. Each storage word includes a plurality of single bit storage cells. The single bit storage cells include a ferroelectric capacitor and a pass transistor having a gate, source, and drain. The ferroelectric capacitor includes a bottom electrode, a layer of ferroelectric material, and a top electrode, the layer of ferroelectric material being sandwiched between the top and bottom electrodes. One bit of data is stored in the direction of polarization of the ferroelectric material in contact with the bottom electrode. The bottom electrode is connected to the source of the pass transistor. The top electrode of each single bit storage cell is part of a continuous conducting layer covering all of the ferroelectric capacitors in the storage block. Similarly, the ferroelectric layer is part of a continuous layer of ferroelectric material that is shared by all of the ferroelectric capacitors in the storage block.
    • 用于存储多个数据字的存储器。 存储器由一个或多个存储块构成。 每个存储块包括多个存储字,每个存储字存储数据字中的一个。 每个存储字包括多个单位存储单元。 单位存储单元包括铁电电容器和具有栅极,源极和漏极的通过晶体管。 铁电电容器包括底电极,铁电体材料层和顶电极,铁电体层被夹在顶电极和底电极之间。 将一位数据存储在与底部电极接触的铁电材料的极化方向上。 底部电极连接到传输晶体管的源极。 每个单位存储单元的顶电极是覆盖存储块中的所有铁电电容器的连续导电层的一部分。 类似地,铁电层是由存储块中的所有铁电电容器共享的铁电材料的连续层的一部分。
    • 16. 发明授权
    • Analog memories utilizing ferroelectric capacitors
    • 使用铁电电容器的模拟存储器
    • US08787063B2
    • 2014-07-22
    • US13559531
    • 2012-07-26
    • Joseph T. Evans, Jr.Calvin B. Ward
    • Joseph T. Evans, Jr.Calvin B. Ward
    • G11C11/22
    • G11C11/221G11C11/2259G11C11/2273G11C11/2275G11C11/2293G11C11/5657G11C27/005
    • A ferroelectric memory having a plurality of ferroelectric memory cells, each ferroelectric memory cell including a ferroelectric capacitor is disclosed. The ferroelectric memory includes read and write lines and a plurality of ferroelectric memory cell select buses, one select bus corresponding to each of the ferroelectric memory cells. Each of the ferroelectric memory cells includes first and second gates for connecting the ferroelectric memory cell to the read line and the write line, respectively, in response to signals on the ferroelectric memory cell select bus corresponding to that ferroelectric memory cell. A write circuit causes a value determined by a data value having at least three states to be stored in the ferroelectric memory cell currently connected to the write line. A read circuit measures the charge stored in the ferroelectric memory cell currently connected to the read line.
    • 公开了具有多个铁电存储单元的铁电存储器,每个强电介质存储单元包括铁电电容器。 铁电存储器包括读写线和多个铁电存储器单元选择总线,每个铁电存储单元相应的一个选择总线。 每个铁电存储单元包括用于响应于与该铁电存储单元相对应的强电介质存储单元选择总线上的信号而分别将铁电存储单元连接到读取线和写入线的第一和第二栅极。 写入电路使由具有至少三个状态的数据值确定的值存储在当前连接到写入线的铁电存储单元中。 读取电路测量存储在当前连接到读取线的铁电存储器单元中的电荷。
    • 19. 发明授权
    • Method for constructing ferroelectric capacitor-like structures on
silicon dioxide surfaces
    • 在二氧化硅表面上构造铁电电容器状结构的方法
    • US5593914A
    • 1997-01-14
    • US616526
    • 1996-03-19
    • Joseph T. Evans, Jr.Leonard O. Boyer
    • Joseph T. Evans, Jr.Leonard O. Boyer
    • H01L21/02H01L27/115H01L21/70
    • H01L27/11502H01L28/55Y10S148/014
    • A method for fabricating an integrated circuit having at least one integrated circuit component fabricated in a silicon substrate and a second device that is to be fabricated on a silicon oxide layer that covers the integrated circuit component. The integrated circuit component has a terminal that is to be connected a corresponding terminal on the second device. The second device includes an electrode structure in contact with a dielectric component that includes a layer of ferroelectric material. In the method of the present invention, a boundary layer comprising non-conducting polysilicon is deposited over the silicon oxide layer. The electrode structure is then fabricated by depositing one or more layers over the boundary layer. The ferroelectric layer is then deposited over the electrode structure and etched to provide the dielectric component. The boundary layer is then removed utilizing an etchant that etches silicon oxide much slower than polysilicon.
    • 一种用于制造集成电路的方法,所述集成电路具有制造在硅衬底中的至少一个集成电路部件和将被制造在覆盖所述集成电路部件的氧化硅层上的第二器件。 集成电路部件具有要连接到第二装置上的相应端子的端子。 第二装置包括与包括铁电材料层的电介质部件接触的电极结构。 在本发明的方法中,在氧化硅层上沉积包含非导电多晶硅的边界层。 然后通过在边界层上沉积一个或多个层来制造电极结构。 然后将铁电层沉积在电极结构上并被蚀刻以提供电介质成分。 然后利用蚀刻氧化硅比多晶硅慢的蚀刻剂去除边界层。
    • 20. 发明授权
    • Analog memories utilizing ferroelectric capacitors
    • 使用铁电电容器的模拟存储器
    • US08964446B2
    • 2015-02-24
    • US14274616
    • 2014-05-09
    • Radiant Technologies, Inc.
    • Joseph T. EvansCalvin B. Ward
    • G11C11/22
    • G11C11/221G11C11/2259G11C11/2273G11C11/2275G11C11/2293G11C11/5657G11C27/005
    • A ferroelectric memory having a plurality of ferroelectric memory cells, each ferroelectric memory cell including a ferroelectric capacitor is disclosed. The ferroelectric memory includes read and write lines and a plurality of ferroelectric memory cell select buses, one select bus corresponding to each of the ferroelectric memory cells. Each of the ferroelectric memory cells includes first and second gates for connecting the ferroelectric memory cell to the read line and the write line, respectively, in response to signals on the ferroelectric memory cell select bus corresponding to that ferroelectric memory cell. A write circuit causes a charge to be stored in the ferroelectric capacitor of the ferroelectric memory cell currently connected to the write line, the charge having a value determined by a data value having at least three states. A read circuit measures the charge stored in the ferroelectric capacitor of the ferroelectric memory cell currently connected to the read line to generate an output value, the output value corresponding to one of the states.
    • 公开了具有多个铁电存储单元的铁电存储器,每个强电介质存储单元包括铁电电容器。 铁电存储器包括读写线和多个铁电存储器单元选择总线,每个铁电存储单元相应的一个选择总线。 每个铁电存储单元包括用于响应于与该铁电存储单元相对应的强电介质存储单元选择总线上的信号而分别将铁电存储单元连接到读取线和写入线的第一和第二栅极。 写入电路使电荷存储在当前连接到写入线的强电介质存储单元的铁电电容器中,电荷具有由具有至少三个状态的数据值确定的值。 读取电路测量存储在当前连接到读取线的铁电存储器单元的铁电电容器中的电荷,以产生与其中一个状态对应的输出值。