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    • 16. 发明授权
    • Systems, devices, and methods for calibration of beam profilers
    • 用于光束分析仪校准的系统,设备和方法
    • US09572715B2
    • 2017-02-21
    • US14808869
    • 2015-07-24
    • AMO Manufacturing USA, LLC
    • Ihor BerezhnyyAnthony TangHenry Price
    • G01J1/00A61F9/008G01J1/42G01M11/06G01J1/58
    • G01B11/24A61F9/008A61F2009/00855G01J1/0411G01J1/0488G01J1/4257G01J1/58G01M11/061
    • Embodiments generally describe systems, devices, and methods for focusing and calibrating beam profilers. A test object is provided that may include an internal housing rotatable within an external housing. The internal housing may house a light source, a collimator, a filter, and/or a diffuser. A plate may be mounted to the internal housing and may include a plurality of markings. In some embodiments, to focus a beam profiler, the test object may be positioned adjacent the converter plate of a beam profiler. Marker images may be captured and a focus quality may be assessed therefrom. A position of the converter, objective, and/or camera of the beam profiler may be adjusted based on the focus quality. To calibrate, images of the markings in several rotational positions may be captured and used for calibration. The markings may be rotated to several positions by rotating the internal housing relative to the external housing.
    • 实施例通常描述用于聚焦和校准光束分析仪的系统,装置和方法。 提供了一种测试对象,其可以包括可在外部壳体内旋转的内部壳体。 内部壳体可以容纳光源,准直器,过滤器和/或扩散器。 板可以安装到内部壳体并且可以包括多个标记。 在一些实施例中,为了聚焦光束分析仪,测试对象可以位于光束分析器的转换器板附近。 可以捕获标记图像,并且可以从其评估焦点质量。 可以基于焦点质量来调整光束轮廓仪的转换器,物镜和/或照相机的位置。 要校准,可以捕获几个旋转位置的标记图像,并用于校准。 通过相对于外部壳体旋转内部壳体,可以将标记旋转到多个位置。