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    • 27. 发明申请
    • Multi-Path Evaporative Purge System for Fuel Combusting Engine
    • 用于燃料燃烧发动机的多通道蒸发清洗系统
    • US20090007890A1
    • 2009-01-08
    • US11773780
    • 2007-07-05
    • Jason Eugene DevriesMark Williams Peters
    • Jason Eugene DevriesMark Williams Peters
    • F02M33/02
    • F02M25/089F02M25/0836
    • As one embodiment, a method of operating the evaporative purge system for an engine of a vehicle propulsion system is provided. The method comprises during a first condition, loading at least a first fuel vapor storage canister with fuel vapors; during a second condition, purging fuel vapors stored by at least the first canister to the engine; during a third condition, loading a second fuel vapor storage canister with fuel vapors without loading the first canister with fuel vapors; and during a fourth condition, purging fuel vapors stored by the second canister to the engine without purging fuel vapors from the first canister. Evaporative purge systems are also provided that enable this method.
    • 作为一个实施例,提供了一种操作用于车辆推进系统的发动机的蒸发吹扫系统的方法。 该方法包括在第一条件期间,至少装载具有燃料蒸气的第一燃料蒸气储存罐; 在第二状态下,将由至少所述第一罐存储的燃料蒸气吹扫至所述发动机; 在第三条件下,用燃料蒸汽装载第二燃料蒸汽储存罐,而不用燃料蒸汽装载第一罐; 并且在第四状态下,将由所述第二罐存储的燃料蒸汽吹扫到所述发动机,而不从所述第一罐吹扫燃料蒸汽。 还提供了能够实现这种方法的蒸发清洗系统。
    • 30. 发明申请
    • Low mass six degree of freedom stage for lithography tools
    • 光刻工具的低质量六自由度阶段
    • US20080024749A1
    • 2008-01-31
    • US11804734
    • 2007-05-18
    • Mark WilliamsAlton Phillips
    • Mark WilliamsAlton Phillips
    • G03B27/58G03B27/62H02K41/00
    • H02K41/03G03F7/70716G03F7/70758H02K2201/18
    • A reticle or wafer stage mover with six degrees of freedom, a low mass coarse stage, and the ability to move an object in a scanning direction in a lithography tool. The mover includes a coarse stage and a fine stage configured to support the object and supported by the coarse stage. A set of actuators is provided to move the fine stage in six degrees of freedom. All of the actuators contribute to accelerating the object and the fine stage in the scanning direction. With all the actuators generating the necessary force to move the fine stage, a single large actuator to push the fine stage in the scanning direction is eliminated. The size or mass of the coarse stage is therefore reduced. All of the actuators are also capable of generating a second force in either the X or Z directions. The actuators therefore also enable the fine stage and the object it supports to be positioned in six degrees of freedom, as well as moved in the scanning direction.
    • 具有六个自由度,低质量粗糙阶段的光罩或晶片台移动器,以及在光刻工具中沿扫描方向移动物体的能力。 动子包括一个粗略的阶段和一个精细的阶段,被配置成支撑物体并由粗糙的阶段支撑。 提供一组致动器以使六个自由度的精细台阶移动。 所有的执行器有助于在扫描方向上加速物体和细微的台阶。 由于所有的致动器产生必要的力以移动细小的台阶,消除了在扫描方向上推动精细台阶的单个大型致动器。 因此,粗级的尺寸或质量减小。 所有致动器还能够在X或Z方向上产生第二力。 因此,致动器也能使精细的台阶和它支撑的物体被定位在六自由度以及沿扫描方向移动。