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    • 27. 发明授权
    • MEMS vibrating structure using an orientation dependent single-crystal piezoelectric thin film layer
    • MEMS振动结构采用取向依赖单晶压电薄膜层
    • US09391588B2
    • 2016-07-12
    • US14031383
    • 2013-09-19
    • RF Micro Devices, Inc.
    • Kushal BhattacharjeeSergei Zhgoon
    • H01L41/053H01L41/047H03H9/25H03H9/125H03H9/15C04B35/00H03H9/17
    • H03H9/17H03H2009/155
    • A micro-electrical-mechanical system (MEMS) vibrating structure includes a carrier substrate, a first anchor, a second anchor, a single crystal piezoelectric body, and a conducting layer. The first anchor and the second anchor are provided on the surface of the carrier substrate. The single-crystal piezoelectric body is suspended between the first anchor and the second anchor, and includes a uniform crystalline orientation defined by a set of Euler angles. The single-crystal piezoelectric body includes a first surface parallel to and facing the surface of the carrier substrate on which the first anchor and the second anchor are formed and a second surface opposite the first surface. The conducting layer is inter-digitally dispersed, and is formed on the second surface of the single-crystal piezoelectric body. The first surface of the single-crystal piezoelectric body is left exposed.
    • 微机电系统(MEMS)振动结构包括载体基板,第一锚固件,第二锚固件,单晶体压电体和导电层。 第一锚固件和第二锚固件设置在载体基板的表面上。 单晶压电体悬挂在第一锚和第二锚之间,并且包括由一组欧拉角定义的均匀结晶取向。 单晶体压电体包括平行于并面向其上形成有第一锚和第二锚的载体基板的表面的第一表面和与第一表面相对的第二表面。 导电层是数字间分散的,并且形成在单晶体压电体的第二表面上。 单晶体压电体的第一面露出。