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21. 发明授权

US08831057B2 Laser device having a gas-purged laser resonator 有权
标题翻译：具有气体净化激光谐振器的激光装置
公开(公告)号：US08831057B2
公开(公告)日：2014-09-09
申请号：US14112755
申请日：2012-04-19
申请人： Sven Schad , Lutz Schuler , Jürgen Mösner
发明人： Sven Schad , Lutz Schuler , Jürgen Mösner
IPC分类号： H01S3/223 , H01S3/22 , H01S3/00 , H01S3/02 , H01S3/094 , H01S3/23
CPC分类号： H01S3/02 , H01S3/027 , H01S3/094 , H01S3/23
摘要： In a laser device having at least one gas-purged laser resonator which is arranged in a purging gas circuit which has upstream of the laser resonator both a low pressure generator for generating a purging gas excess pressure in the purging gas circuit and, between the low pressure generator and the laser resonator, a cleaning device for cleaning the purging gas, the purging gas being air, according to the invention the purging gas circuit has downstream of the laser resonator between the laser resonator and the low pressure generator an intake opening which is permanently open towards the atmosphere, the purging gas pressure (p1) generated by the low pressure generator being greater than the atmospheric air pressure (p0).
摘要翻译：在具有至少一个气体净化激光谐振器的激光装置中，该激光谐振器布置在清洗气体回路中，该净化气体回路在激光谐振器的上游具有用于在清洗气体回路中产生净化气体过压的低压发生器，压力发生器和激光谐振器，根据本发明的净化气体，净化气体是空气的净化装置，清洗气体回路在激光谐振器和低压发生器之间的激光谐振器的下游具有进气口，永久地朝向大气开放，由低压发生器产生的净化气体压力（p1）大于大气压力（p0）。

22. 发明授权

US08804786B1 Optically-pumped sulfur monoxide molecular laser 有权
标题翻译：光泵浦一氧化硫分子激光器
公开(公告)号：US08804786B1
公开(公告)日：2014-08-12
申请号：US13026186
申请日：2011-02-11
申请人： William F. Krupke
发明人： William F. Krupke
IPC分类号： H01S3/22
CPC分类号： H01S3/223 , H01S3/094 , H01S3/09415 , H01S3/2366 , H01S3/2391
摘要： An optically pumped sulfur monoxide (SO) molecular laser is presented. A near infrared pump light source generates a pump light at wavelengths that match wavelengths of a Q-branch or R-branch absorption transition of a b 1Σ+ excited electronic state of the SO molecule. The pump light is directed to a vessel containing a laser gain medium including gaseous SO and a buffer gas. The gaseous gain medium may be flowed through the region of output light extraction to remove waste heat deposited in the medium. In some examples output light is generated from any of the R-branch, Q-branch, or P-branch emission transitions between the v=0 vibrationless b 1Σ+ electronic state and the v=1 vibrational x 3Σ− ground electronic state. In some other examples, output light is generated from P-branch emission transitions between the v=0 vibrationless b 1Σ+ electronic state and the v=0 vibrationless x 3Σ− ground electronic state.
摘要翻译：提出了一种光泵浦的一氧化硫（SO）分子激光器。近红外泵浦光源产生与SO分子的b 1＆Sgr +激发的电子态的Q分支或R分支吸收跃迁的波长相匹配的波长的泵浦光。泵浦光被引导到包含含有气态SO和缓冲气体的激光增益介质的容器。气体增益介质可以流过输出光提取区域，以去除沉积在介质中的废热。在一些示例中，输出光从v = 0无振动b 1＆Sgr +电子状态和v = 1振动x 3＆Sgr-地电子状态之间的任何R分支，Q分支或P分支发射跃迁产生。在一些其他示例中，输出光从v = 0无振动b 1＆Sgr。+电子状态和v = 0无振动x 3＆Sgr-地电子状态之间的P分支发射跃迁产生。

23. 发明授权

US08761226B2 Connection unit and laser oscillating apparatus having the same 有权
标题翻译：连接单元和具有该连接单元的激光振荡装置
公开(公告)号：US08761226B2
公开(公告)日：2014-06-24
申请号：US12868533
申请日：2010-08-25
申请人： Ki-Woon Park
发明人： Ki-Woon Park
IPC分类号： H01S3/22 , H01S3/08
CPC分类号： H01S3/02 , B23K26/06 , B23K26/38 , B23K2101/40 , C30B1/023 , C30B13/24 , C30B29/06 , C30B35/00 , H01S3/005 , H01S3/225
摘要： A laser oscillation device includes an oscillation unit oscillating a laser, a shutter unit covering the laser, and a connection unit covering the laser, connecting the oscillation unit and the shutter unit and including a first connection part supported by the oscillation unit and a second connection part supported by the shutter unit. The first and second connection parts are separated from each other, and one of the first and second connection parts covers at least a portion of the other one of the first and second connection parts.
摘要翻译：激光振荡装置包括振荡激光的振荡单元，覆盖激光的快门单元和覆盖激光的连接单元，连接振荡单元和快门单元，并且包括由振荡单元支撑的第一连接部分和第二连接部件由快门单元支持。第一和第二连接部分彼此分离，并且第一和第二连接部分中的一个连接部分覆盖第一和第二连接部分中的另一个的至少一部分。

24. 发明授权

US08649412B2 Molecular gas laser 有权
标题翻译：分子气体激光器
公开(公告)号：US08649412B2
公开(公告)日：2014-02-11
申请号：US13135221
申请日：2011-06-29
申请人： Robert Neil Campbell
发明人： Robert Neil Campbell
IPC分类号： H01S3/22
CPC分类号： H01S3/0933 , H01S3/094042 , H01S3/094092 , H01S3/094096 , H01S3/0941 , H01S3/1616 , H01S3/2232
摘要： The closed cycle solid state optically pumped gas hybrid (chemical recovery) system utilizes a laser diode excited solid state, fiber or bulk, laser as a pump for a molecular gas, or gas mix, medium. The existence of efficient high power laser diode excited solid state fiber or bulk lasers, output spectrally matched to suitable principle and excited level 1st and 2nd overtones of relevant gases, is the enabling system technology. The utilization of such in combination with suitable gases introduces a range of viable, in principle sourcing on laser diodes and thus effectively laser diode pumped, gas laser systems with access to the approximately 3.5 μm to approximately 5.2 μm and approximately 9 μm to approximately 11 μm spectral regions. Continuous wave or pulsed operation, with significant energy capability courtesy of solid state storage, is admitted.
摘要翻译：封闭循环固态光泵混合（化学回收）系统利用激光二极管激发的固态，纤维或体积，激光作为分子气体或气体混合介质的泵。有效的大功率激光二极管激光固态光纤或体激光器的存在，与相关气体的第一和第二次谐波的适用原理和激发电平的频谱匹配的输出是使能系统技术。这种与合适气体的结合的使用在原理上源于激光二极管，从而有效地实现了激光二极管泵浦气体激光系统，其具有大约3.5μm至大约5.2μm和大约9μm至大约11μm 光谱区域。允许持续波或脉冲操作，具有强大的能量容量，由固态存储提供。

25. 发明授权

US08624209B1 Controlling spatial properties in an excimer ring amplifier 失效
标题翻译：控制准分子环放大器的空间特性
公开(公告)号：US08624209B1
公开(公告)日：2014-01-07
申请号：US13830905
申请日：2013-03-14
申请人： Cymer, Inc.
发明人： Robert Jay Rafac , Dershen Wan , Eric Mason , Rostislav Rokitski
IPC分类号： H01S3/22 , H01S3/08
CPC分类号： H01S3/225 , H01S3/08004 , H01S3/083 , H01S3/1055 , H01S3/106 , H01S3/235
摘要： A deep ultraviolet light source includes a master oscillator producing a seed light beam; a regenerative ring amplifier receiving the seed light beam from the master oscillator and outputting an output light beam, the regenerative ring amplifier including a set of optical components that define a plane of a closed ring; and a divergence control device within the master oscillator or between the master oscillator and the regenerative ring amplifier and configured to reduce a divergence of the output light beam along a normal direction, the normal direction being perpendicular to the plane of the ring.
摘要翻译：深紫外光源包括产生种子光束的主振荡器; 所述再生环形放大器从所述主振荡器接收所述种子光束并输出输出光束，所述再生环形放大器包括限定闭环平面的一组光学部件; 以及在所述主振荡器内或所述主振荡器和所述再生环形放大器之间的发散控制装置，并且被配置为减小所述输出光束沿法线方向的发散，所述法线方向垂直于所述环的平面。

26. 发明授权

US08585224B2 Optical arrangement, in particular projection exposure apparatus for EUV lithography, as well as reflective optical element with reduced contamination 有权
标题翻译：光学布置，特别是用于EUV光刻的投影曝光装置，以及具有减少的污染的反射光学元件
公开(公告)号：US08585224B2
公开(公告)日：2013-11-19
申请号：US13763709
申请日：2013-02-10
申请人： Carl Zeiss SMT GmbH , ASML Netherlands B.V.
发明人： Dirk Heinrich Ehm , Stephan Muellender , Thomas Stein , Johannes Hubertus Josephina Moors , Bastiaan Theodoor Wolschrijn , Dieter Kraus , Richard Versluis , Marcus Gerhardus Hendrikus Meijerink
IPC分类号： G02B5/08 , H01S3/22
CPC分类号： G03B27/16 , B82Y10/00 , G03F7/70841 , G03F7/70883 , G03F7/70916 , G21K2201/061
摘要： An optical arrangement, e.g. a projection exposure apparatus (1) for EUV lithography, includes: a housing (2) enclosing an interior space (15); at least one, preferably reflective optical element (4-10, 12, 14.1-14.6) arranged in the housing (2); at least one vacuum generating unit (3) for the interior space (15) of the housing (2); and at least one vacuum housing (18, 18.1-18.10) arranged in the interior space (15) and enclosing at least the optical surface (17, 17.1, 17.2) of the optical element (4-10, 12, 14.1-14.5). A contamination reduction unit is associated with the vacuum housing (18.1-18.10) and reduces the partial pressure of contaminating substances, in particular of water and/or hydrocarbons, at least in close proximity to the optical surface (17, 17.1, 17.2) in relation to the partial pressure of the contaminating substances in the interior space (15).
摘要翻译：光学装置，例如用于EUV光刻的投影曝光装置（1）包括：封闭内部空间（15）的壳体（2）; 布置在壳体（2）中的至少一个优选反射光学元件（4-10,12,14.1-14.6）; 至少一个用于所述壳体（2）的内部空间（15）的真空发生单元（3）; 以及布置在所述内部空间（15）中并且至少包围所述光学元件（4-10,12,14.1-14.5）的光学表面（17,17.1,17.2）的至少一个真空壳体（18,18.1-18.10）。污染减少单元与真空壳体（18.1-18.10）相关联，并且至少紧邻光学表面（17,17.1,17.2）处的污染物质特别是水和/或烃的分压降低与内部空间（15）中的污染物质的分压有关。

27. 发明授权

US08432949B2 High-power, high-throughput microwave discharge singlet oxygen generator for advanced electrical oxygen-iodine lasers 有权
标题翻译：高功率，高产量的微波放电单线态氧气发生器，用于先进的电氧碘激光器
公开(公告)号：US08432949B2
公开(公告)日：2013-04-30
申请号：US12881987
申请日：2010-09-14
申请人： W. Terry Rawlins , David B. Oakes , Seonkyung Lee , Steven J. Davis
发明人： W. Terry Rawlins , David B. Oakes , Seonkyung Lee , Steven J. Davis
IPC分类号： H01S3/22
CPC分类号： H01S3/2215 , H01S3/041 , H01S3/0953 , H01S3/104
摘要： A laser device includes an optical resonator, a microwave driven discharge device, and a source for a second gas. The microwave driven discharge device is disposed relative to the optical resonator. The microwave driven discharge device operates at a discharge power and gas flow rate to produce a selected amount of energetic singlet oxygen metastables flowing in the direction of the optical resonator. The second source for the second gas is disposed between the optical resonator and the microwave driven discharge device. The second gas reacts with the selected amount of energetic singlet oxygen metastables to form an excited species in an amount sufficient to support lasing of the excited species in the optical resonator.
摘要翻译：激光装置包括光学谐振器，微波驱动放电装置和用于第二气体的源。微波驱动放电装置相对于光谐振器设置。微波驱动放电装置以放电功率和气体流速工作，以产生在光谐振器的方向上流动的选定量的能量单态氧亚稳态。第二气体的第二源设置在光谐振器和微波驱动放电装置之间。第二气体与选定量的能量单态氧亚稳态反应以形成足以支持激发物质在光学谐振器中的激发的量的激发物质。

28. 发明授权

US08416828B2 Catalyst module for high repetition rate CO2 lasers 失效
标题翻译：用于高重复率CO 2激光器的催化剂模块
公开(公告)号：US08416828B2
公开(公告)日：2013-04-09
申请号：US12901260
申请日：2010-10-08
申请人： David B. Cohn
发明人： David B. Cohn
IPC分类号： H01S3/22
CPC分类号： H01S3/036 , H01S3/041 , H01S3/2232
摘要： An array of discrete catalyst elements is contained in a heated module external to the main laser vessel with an auxiliary gas flow loop connecting them so as to provide independent control of catalyst temperature and gas flow rate to achieve high CO+1/2O2 to CO2 recombination under high pulse repetition frequency operation for a sealed laser. Catalyst elements in the form of cylinders with holes through their centers are mounted on multiple parallel rods or catalysts in the form of small spherical or cylindrical elements are contained in multiple packets arranged in the module so as to minimize flow impedance and maximize laser gas recycling throughput. The cylindrical catalyst module is constructed so as to allow for rapid heating to operating temperature while withstanding atmospheric differential pressures during laser processing.
摘要翻译：离散催化剂元件的阵列包含在主激光器外部的加热模块中，其中具有连接它们的辅助气流回路，以便提供对催化剂温度和气体流速的独立控制，以实现高CO + 1 / 2O 2至CO 2重组在密封激光器的高脉冲重复频率操作下。具有穿过其中心的孔的气缸形式的催化剂元件安装在多个平行的杆上，小球形或圆柱形元件形式的催化剂被包含在布置在模块中的多个分组中，以便最小化流动阻抗并最大化激光气体回收吞吐量。圆柱形催化剂模块被构造成允许在激光加工期间耐受大气压差的快速加热到工作温度。

29. 发明申请

US20130034118A1 GAS PURIFIER FOR AN EXCIMER LASER 审中-公开
标题翻译：用于激光激光的气体净化器
公开(公告)号：US20130034118A1
公开(公告)日：2013-02-07
申请号：US13198484
申请日：2011-08-04
申请人： Igor Bragin , Oleg Melnikov , Timur Misyuraev , Andreas Targsdorf , Kai Schmidt
发明人： Igor Bragin , Oleg Melnikov , Timur Misyuraev , Andreas Targsdorf , Kai Schmidt
IPC分类号： H01S3/22
CPC分类号： H01S3/036 , H01S3/2253
摘要： An excimer laser includes a laser housing containing a lasing-gas mixture including a halogen. Contaminants including particulate matter and a metal halide vapor are generated in the lasing-gas mixture during operation of the laser. A gas-cleaning arrangement extracts lasing-gas mixture from the housing and passes the lasing-gas mixture through an electrode assembly. A repeatedly pulsed gas discharge is created in the electrode assembly by driving the electrode assembly with repeated high-power short-duration pulses. The pulsed discharge causes disintegration of the metal halide vapor and electrostatic trapping in the electrode assembly of the particulate matter and products of the metal halide disintegration.
摘要翻译：准分子激光器包括含有包含卤素的激光气体混合物的激光器壳体。在激光器的操作期间，在激光 - 气体混合物中产生包括颗粒物质和金属卤化物蒸气的污染物。气体清洁装置从壳体中提取激光气体混合物，并将激光气体混合物通过电极组件。通过用重复的大功率短脉冲脉冲驱动电极组件，在电极组件中产生反复脉冲的气体放电。脉冲放电会导致金属卤化物蒸气的分解和颗粒物质的电极组件中的静电捕获以及金属卤化物的分解产物。

30. 发明申请

US20120275481A1 System and Method for Controlling Gas Concentration in a Two-Chamber Gas Discharge Laser System 有权
标题翻译：控制二室气体放电激光系统气体浓度的系统和方法
公开(公告)号：US20120275481A1
公开(公告)日：2012-11-01
申请号：US13098259
申请日：2011-04-29
申请人： Daniel J. Riggs
发明人： Daniel J. Riggs
IPC分类号： H01S3/22
CPC分类号： H01S3/036 , H01S3/03 , H01S3/225 , H01S3/2308
摘要： Methods and systems for controlling the gas concentrations in the chambers of a two chamber gas discharge laser such as an excimer laser are disclosed. A first set of inject opportunities is selected for the laser chamber of the master oscillator, and a second set of inject opportunities is selected for the laser chamber of the power amplifier. At each selected inject opportunity for the master oscillator, its laser chamber receives an inject containing a fixed amount of a non-halogen containing gas, and a calculated amount of a halogen containing gas. At the selected inject opportunities for the power amplifier, its laser chamber receives a fixed amount of the halogen containing gas, and may also receive a fixed amount of the non-halogen containing gas.
摘要翻译：公开了用于控制诸如准分子激光器的二室气体放电激光器的室中的气体浓度的方法和系统。为主振荡器的激光室选择第一组注入机会，并且为功率放大器的激光室选择第二组注入机会。在主振荡器的每个选择的注入机会下，其激光室接收包含固定量的不含卤素气体的注入和计算量的含卤素气体。在功率放大器的所选择的注入机会中，其激光室接收固定量的含卤素气体，并且还可以接收固定量的不含卤素气体。

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