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41. 发明授权

US5267017A Method of particle analysis on a mirror wafer 失效
标题翻译：在镜片上进行粒子分析的方法
公开(公告)号：US5267017A
公开(公告)日：1993-11-30
申请号：US886541
申请日：1992-05-20
申请人： Yuri S. Uritsky , Harry Q. Lee , Patrick D. Kinney , Kang-Ho Ahn
发明人： Yuri S. Uritsky , Harry Q. Lee , Patrick D. Kinney , Kang-Ho Ahn
IPC分类号： G01R31/305 , G01R31/307 , G01B11/00
CPC分类号： G01R31/305 , G01R31/307
摘要： A method for reducing targeting errors encountered when trying to locate contaminant particles in a high-magnification imaging device, based on estimates of the particle positions obtained from a scanning device. The method of the invention uses three techniques separately and in combination. The first technique includes selecting at least three reference particles, to provide multiple unique pairs of reference particles for computation of an averaged set of coordinate transformation parameters, used to transform particle position coordinates from the coordinate system of the scanning device to the coordinate system of the imaging device. The averaged transformation parameters result in much smaller targeting errors between the estimated and actual positions of the particles. The targeting errors are further reduced by the use of multiple scans of the scanning device. In a third technique, accumulated reference particle targeting errors observed in prior processing of other wafers are used to reduce these targeting errors when processing a new wafer.
摘要翻译：基于从扫描装置获得的粒子位置的估计，减少在高倍率成像装置中定位污染物颗粒时遇到的瞄准误差的方法。本发明的方法分别使用三种技术组合。第一技术包括选择至少三个参考粒子，以提供用于计算平均坐标变换参数集合的多个独特的参考粒子对，用于将粒子位置坐标从扫描装置的坐标系转换为坐标系的坐标系成像装置。平均变换参数导致粒子的估计位置和实际位置之间的目标误差小得多。通过使用扫描设备的多次扫描，进一步减少了定位错误。在第三种技术中，在处理新晶片时，使用在其它晶片的先前处理中观察到的累积参考粒子瞄准误差来减少这些瞄准误差。

42. 发明授权

US5260648A Process and system for rapid analysis of the spectrum of a signal at one or several points of measuring 失效
标题翻译：用于在一个或几个测量点对信号频谱进行快速分析的过程和系统
公开(公告)号：US5260648A
公开(公告)日：1993-11-09
申请号：US646785
申请日：1991-01-29
申请人： Hans-Detlef Brust
发明人： Hans-Detlef Brust
IPC分类号： G01R31/302 , G01Q10/00 , G01Q30/04 , G01R23/16 , G01R31/28 , G01R31/305 , H01L21/66
CPC分类号： G01R23/16 , G01R31/305
摘要： In electron beam measuring, it is often also necessary to measure the frequency range in addition to the measuring time range. In order to do this, according to the invented process, the output signal of the local oscillator of a spectrum analyzer, as is known from conventional high-frequency measuring, undergoes a first frequency conversion and subsequently is utilized for modulating the primary beam. Based on the potential contrast as a multiplicative interaction and the modulated primary beam, the under circumstances very high-frequency signal to be analyzed is transformed to an easily detected low intermediate frequency. Subsequently this intermediate frequency signal is transferred into an input frequency plane of the spectrum analyzer by a second frequency conversion. Both the variable input selection frequency or the fixed intermediate frequency of the spectrum analyzer may be the frequency . The measured result appears in the usual manner on the display of the spectrum analyzer.
摘要翻译： PCT No.PCT / DE90 / 00391 Sec。 371 1991年1月29日第 102（e）1991年1月29日PCT PCT 1990年5月28日PCT公布。出版物WO90 / 15340 日期1990年12月13日。在电子束测量中，除了测量时间范围之外，通常还需要测量频率范围。为了做到这一点，根据本发明的方法，频谱分析仪的本地振荡器的输出信号如从传统的高频测量所知的那样经历第一次频率转换，随后用于调制主波束。基于作为乘法相互作用和调制的主波束的潜在对比度，在下面将要分析的非常高频信号被转换成容易检测的低中频。随后，该中频信号通过第二频率转换被传送到频谱分析仪的输入频率平面。频谱分析仪的可变输入选择频率或固定中频都可以是频率。测量结果以通常的方式显示在频谱分析仪上。

43. 发明授权

US5159752A Scanning electron microscope based parametric testing method and apparatus 失效
标题翻译：基于扫描电子显微镜的参数测试方法和装置
公开(公告)号：US5159752A
公开(公告)日：1992-11-03
申请号：US595920
申请日：1990-11-30
申请人： Shivaling S. Mahant-Shetti , Thomas J. Aton , Rebecca J. Gale
发明人： Shivaling S. Mahant-Shetti , Thomas J. Aton , Rebecca J. Gale
IPC分类号： G01R31/305
CPC分类号： G01R31/305 , Y10T29/49155
摘要： A scanning electron microscope (28) is connected to a test structure (48) formed on a semiconductor wafer. The test structure (48) comprises a plurality of first parallel structures (54) and a plurality of second parallel structure (56) transverse to and interlocking with the first structures (54). An island (60) is formed within a grid (58) formed by the structures (54-56) and is separated therefrom. An electron beam (38) from the scanning electron microscope (28) is aimed at the structure (48) and secondary electrons emitted therefrom are visually displayed on a monitor (44). The visual display (47) provides information on whether the island (60) is electrically separated from the mesh (58) or shorted thereto by comparing the intensity of the various islands (60).
摘要翻译：扫描电子显微镜（28）连接到形成在半导体晶片上的测试结构（48）。测试结构（48）包括多个第一平行结构（54）和与第一结构（54）横向并与其互锁的多个第二平行结构（56）。岛（60）形成在由结构（54-56）形成的格栅（58）内并与之隔开。来自扫描电子显微镜（28）的电子束（38）针对结构（48），并且从其发射的二次电子可视地显示在监视器（44）上。视觉显示（47）提供关于岛（60）是否与网（58）电分离或与其短路的信息，通过比较各岛（60）的强度来提供信息。

44. 发明授权

US5144225A Methods and apparatus for acquiring data from intermittently failing circuits 失效
标题翻译：从间歇性故障电路获取数据的方法和装置
公开(公告)号：US5144225A
公开(公告)日：1992-09-01
申请号：US737553
申请日：1991-07-25
申请人： Christopher G. Talbot , Neil Richardson
发明人： Christopher G. Talbot , Neil Richardson
IPC分类号： G01R31/305
CPC分类号： G01R31/305
摘要： Methods and apparatus are disclosed for conditional acquisition of potential measurements in integrated circuits, with the aid of electron-beam probes. The conditional acquisition enables display of waveform images which permit diagnosis of the causes and/or origins of failure in circuits which fail intermittently. Data is acquired in the normal manner on each pass through the test pattern. At the end of each test pattern execution a pass/fail signal from the tester exercising the circuit is used to reject or accept the acquired data. In this fashion, it is possible to accumulate only that data which carries information about the failure of interest and to reject data which does not. Over several test pattern repetitions it is possible to display only that data which shows the failure. Engineers are thus able to efficiently diagnose intermittent failures without the need to change device operating parameters. In one form of the invention, (a) initially a first buffer is defined as a "good-data" buffer and a second buffer is defined as a "temporary-data" buffer; (b) the circuit is probed during application of a test vector pattern to acquire data; (c) the acquired data is summed with stored data from the "good-data" buffer, and the sum is stored in the "temporary-data" buffer; (d) a determination is made whether circuit has failed to operate as expected in response to the pattern and, if the circuit has failed to operate as expected, the second buffer is redefined as a "good-data" buffer and the first buffer is re-defined as a "temporary-data" buffer; and (e) steps (b)-(d) are repeated, such that the data stored in the "good-data" buffer represents failing operation of the circuit.
摘要翻译：公开了借助于电子束探针在集成电路中对电位测量进行条件采集的方法和装置。条件采集可以显示允许诊断间歇性故障的电路故障原因和/或故障起因的波形图像。在通过测试图案的每次通过中以正常方式获取数据。在每个测试模式结束时，执行来自运行电路的测试仪的通过/失败信号用于拒绝或接受所获取的数据。以这种方式，只能累积携带关于感兴趣的失败的信息的数据，并且拒绝不存在的数据。在几个测试模式重复中，可以仅显示显示故障的数据。因此，工程师能够有效地诊断间歇性故障，而不需要改变设备操作参数。在本发明的一种形式中，（a）最初将第一缓冲器定义为“良好数据”缓冲器，将第二缓冲器定义为“临时数据”缓冲器; （b）在应用测试矢量模式获取数据时探测电路; （c）将获取的数据与来自“好数据”缓冲器的存储数据相加，并将和存储在“临时数据”缓冲器中; （d）确定电路是否按照预期的方式响应于该模式而失败，并且如果电路未按预期操作失败，则将第二缓冲器重新定义为“良好数据”缓冲器，并且第一缓冲器重新定义为“临时数据”缓冲区; 和（e）重复步骤（b） - （d），使得存储在“良好数据”缓冲器中的数据表示电路的故障操作。

45. 发明授权

US5053699A Scanning electron microscope based parametric testing method and apparatus 失效
标题翻译：基于扫描电子显微镜的参数测试方法和装置
公开(公告)号：US5053699A
公开(公告)日：1991-10-01
申请号：US529062
申请日：1990-05-25
申请人： Thomas J. Aton
发明人： Thomas J. Aton
IPC分类号： G01N21/01 , G01Q30/04 , G01R31/302 , G01R31/305 , H01L21/66 , H01L21/822 , H01L27/04
CPC分类号： G01R31/305
摘要： A scanning electron microscope (SEM) (24), or other irradiating device, is used to create a potential in sample areas (39b) of a test structure (39) formed on the surface of an integrated circuit wafer. A conduction path between the irradiated sample area and a common area (39a) is detected via an ammeter (40) connected between the sample area (39b) and a voltage source (42). Monitoring circuit (44) produces an output indicative of those sample areas (39b) which are electrically coupled to the common area (39a).
摘要翻译：扫描电子显微镜（SEM）（24）或其他照射装置用于在形成在集成电路晶片的表面上的测试结构（39）的样品区域（39b）中产生电位。通过连接在采样区域（39b）和电压源（42）之间的电流表（40）来检测被照射样品区域和公共区域（39a）之间的传导路径。监控电路（44）产生指示电耦合到公共区域（39a）的那些采样区域（39b）的输出。

46. 发明授权

US5006795A Charged beam radiation apparatus 失效
标题翻译：带电束辐射装置
公开(公告)号：US5006795A
公开(公告)日：1991-04-09
申请号：US878015
申请日：1986-06-24
申请人： Masahiro Yoshizawa , Akira Kikuchi , Kou Wada , Minpei Fujinami , Nobuo Shimazu
发明人： Masahiro Yoshizawa , Akira Kikuchi , Kou Wada , Minpei Fujinami , Nobuo Shimazu
IPC分类号： G01Q70/02 , G01R31/305 , H01J37/26
CPC分类号： G01R31/305 , H01J37/268
摘要： A charged beam radiation apparatus includes an auxiliary charged beam emitting mechanism, a main charged beam emitting mechanism, a secondary electron detector, and a computer as a controller. The auxiliary charged beam emitting mechanism emits an auxiliary charged beam of a given acceleration voltage onto a predetermined portion of an electronic device to be measured. The main charged beam emitting mechanism emits a main charged beam of an acceleration voltage lower than that of the auxiliary charged beam onto the predetermined portion and the vicinity of the predetermined portion. The secondary electron detector detects secondary electrons generated from a portion irradiated by the main charged beam. The controller measures a change in a secondary electron signal from the secondary electron detector.
摘要翻译：带电波束辐射装置包括辅助充电光束发射机构，主充电光束发射机构，二次电子检测器和作为控制器的计算机。辅助充电光束发射机构将给定加速电压的辅助充电光束发射到要测量的电子设备的预定部分上。主充电光束发射机构将预定部分和预定部分附近的加电压低于辅助充电光束的主充电光束发射。二次电子检测器检测由主充电光束照射的部分产生的二次电子。控制器测量来自二次电子检测器的二次电子信号的变化。

47. 发明授权

US4745360A Electron-beam probe system utilizing test device having interdigitated conductive pattern and associated method of using the test device 失效
标题翻译：电子束探针系统利用具有交叉指导图案的测试装置和使用测试装置的相关方法
公开(公告)号：US4745360A
公开(公告)日：1988-05-17
申请号：US858613
申请日：1986-05-01
申请人： Jan D. Reimer , Victor R. Akylas
发明人： Jan D. Reimer , Victor R. Akylas
IPC分类号： H01L21/66 , G01Q30/02 , G01R31/26 , G01R31/302 , G01R31/305 , G01R31/3183 , H01J37/28 , G01R19/00 , G01R35/00
CPC分类号： G01R31/305
摘要： A test device (40) has a patterned conductive layer (42 or 44) particularly adapted for use in an E-beam probe system (FIG. 3) to study how local electric fields influence probe voltage measurements. The layer is composed of two or more conductors (A and B.sub.J C and D.sub.J) separated from each other. Each conductor has a group of fingers. The fingers (F1.sub.p, F0.sub.p, F2, F0.sub.Q and F1.sub.Q) run parallel to one another and are at least partially interdigitated. The width of each finger is constant along its length. The widths of the fingers and the spacings between them vary from finger to finger according to a selected pattern.

48. 发明授权

US4733075A Stroboscopic scanning electron microscope 失效
标题翻译：频闪扫描电子显微镜
公开(公告)号：US4733075A
公开(公告)日：1988-03-22
申请号：US898814
申请日：1986-08-18
申请人： Masayuki Sato
发明人： Masayuki Sato
IPC分类号： H01J37/28 , G01R31/302 , G01R31/305 , H01J37/26 , H01L21/66 , G01N23/00
CPC分类号： G01R31/305 , H01J37/268
摘要： An electron microscope is provided in which in order to monitor operating waveforms within the element of a semiconductor integrated circuit, an electron beam is bombarded from an electron gun to the measuring point of a specimen to be measured, the resultant secondary electron emitted from the specimen to be measured is detected by a secondary electron detector in order to build up an image, and in which the specimen to be measured is stroboscopically scanned by controlling the electron gun with sampling pulses. A shield electrode is mounted nearest to the measuring point of the specimen to be measured such that the influences of the adjacent potentials different from that of the measuring point of the specimen to be measured, can be eliminated.
摘要翻译：提供了一种电子显微镜，其中为了监测半导体集成电路元件内的工作波形，电子束从电子枪轰击到待测样品的测量点，从样品发射的二次电子通过二次电子检测器检测以便建立图像，并且通过用采样脉冲控制电子枪来对待测量的样本进行频闪扫描。屏蔽电极安装在最接近待测试样品测量点的位置，以便可以消除相邻电位与待测样品测量点不同的影响。

49. 发明授权

US4728790A Low-abberation spectrometer objective with high secondary electron acceptance 失效
标题翻译：低二次光谱仪目标具有高二次电子接受能力
公开(公告)号：US4728790A
公开(公告)日：1988-03-01
申请号：US41654
申请日：1987-04-21
申请人： Erich Plies
发明人： Erich Plies
IPC分类号： H01J37/28 , G01Q30/02 , G01R31/28 , G01R31/305 , H01J37/10 , H01J37/244 , H01J37/26 , H01J49/06 , H01J49/44 , H01J49/48 , H01J37/252
CPC分类号： G01R31/305 , H01J37/10 , H01J37/268 , H01J49/06 , H01J49/488
摘要： The spectrometer objective of the invention is composed of a short focal length objective lens (OL) and a spectrometer-detector arrangement which is completely integrated in the magnetic lens. The working distance (L) has a decisive influence on the chromatic and spherical image defect of the objective lens (OL) which can be reduced with the arrangement of the invention and, thus, the diameter of the electron probe on the specimen (PR) can be substantially demagnified. An angle-independent accumulation of the secondary electrons (SE) are triggered such that the measuring location occurs according to the invention by imaging of the virtual source point (QS) of the secondary electrons (SE) into the center of a spherical opposing field which occurs in the spatial region between two spherical-symmetrical grid electrodes (K1 and K2).
摘要翻译：本发明的光谱仪物镜由完全集成在磁性透镜中的短焦距物镜（OL）和光谱仪检测器装置组成。工作距离（L）对物镜（OL）的彩色和球面图像缺陷具有决定性的影响，可以通过本发明的布置而减小，因此，样品（PR）上的电子探针的直径，可以大幅度缩小。触发二次电子（SE）的角度无关的累积，使得根据本发明，通过将二次电子（SE）的虚拟源点（QS）成像成球面相对场的中心来测量位置，发生在两个球对称栅格电极（K1和K2）之间的空间区域中。

50. 发明授权

US4686466A Method for automatically setting the voltage resolution in particle beam measuring devices and apparatus for implementation thereof 失效
标题翻译：自动设定粒子束测量装置的电压分辨率的方法及其实施方法
公开(公告)号：US4686466A
公开(公告)日：1987-08-11
申请号：US705983
申请日：1985-02-27
申请人： Hans-Peter Feuerbaum , Peter Fazekas
发明人： Hans-Peter Feuerbaum , Peter Fazekas
IPC分类号： H01J37/28 , G01R31/305 , G01T1/28 , H01J37/26 , G01R31/00
CPC分类号： G01R31/305 , H01J37/266
摘要： A method for setting voltage resolution in particle beam measuring devices wherein band width of a measured signal processing is modified. In order to set a desired voltage resolution simply, reliably, and with high precision, a signal noise of the measured signal is measured. This signal noise is compared to a desired value for the measured signal resolution, and the band width of the measured signal processing is modified such that the signal noise of the measured signal is less than or equal to the desired value for the measured signal resolution.
摘要翻译：一种用于设置测量信号处理的带宽被修改的粒子束测量装置中的电压分辨率的方法。为了简单，可靠地且高精度地设置所需的电压分辨率，测量测量信号的信号噪声。将该信号噪声与测量信号分辨率的期望值进行比较，并且修改测量信号处理的带宽，使得测量信号的信号噪声小于或等于测量信号分辨率的期望值。

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