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1. 发明授权

US11035899B2 System for detection of passive voltage contrast 有权
公开(公告)号：US11035899B2
公开(公告)日：2021-06-15
申请号：US16412882
申请日：2019-05-15
申请人： GLOBALFOUNDRIES Singapore Pte. Ltd.
发明人： Changqing Chen , Fransiscus X. G. Rivai , Choon Seng Adrian Ng , Kay Guan Chia
IPC分类号： G01R31/305 , G01R31/307 , H01J37/28
摘要： The present disclosure relates to a detection system, and, more particularly, to system for detection of passive voltage contrast and methods of use. The system includes a chamber; a stage provided within the chamber, configured to stage a target structure; an electron beam apparatus which is structured to emit an e-beam toward the stage; and a laser source which emits a laser signal toward the stage, at a same area as the e-beam.

2. 发明申请

US20200266113A1 SEMICONDUCTOR STORAGE DEVICE AND INSPECTION METHOD 审中-公开
公开(公告)号：US20200266113A1
公开(公告)日：2020-08-20
申请号：US16559187
申请日：2019-09-03
申请人： TOSHIBA MEMORY CORPORATION
发明人： Akihiko TSUGAWA
IPC分类号： H01L21/66 , H01L27/11524 , H01L27/11556 , H01L27/11529 , H01L27/1157 , H01L27/11582 , H01L27/11573 , H01L23/522 , H01L23/528 , H01L23/535 , G01R31/02 , G01R31/305
摘要： A semiconductor storage device of an embodiment includes a stacked body including a plurality of conductive layers stacked via insulating layers, and a step portion in which end portions of the plurality of conductive layers have a stepwise shape, a plurality of pillars extending in the stacked body in a stacking direction of the stacked body, and forming a plurality of memory cells at intersection portions with at least part the plurality of conductive layers, and a plurality of contacts disposed for respective steps of the step portion, and to be electrically connected with the conductive layers of the respective steps. Among the plurality of contacts, a first plug is disposed on a contact connected to an (n−1)-th (n is an integer of two or more) conductive layer from an undermost layer, and a second plug is disposed on the first plug, and among the plurality of contacts, the first plug is not disposed but the second plug is disposed on a contact connected to an n-th conductive layer from the undermost layer.

3. 发明申请

US20160306009A1 SYSTEMATIC DEFECTS INSPECTION METHOD WITH COMBINED EBEAM INSPECTION AND NET TRACING CLASSIFICATION 审中-公开
标题翻译：具有组合的EBEAM检查和网络跟踪分类的系统缺陷检查方法
公开(公告)号：US20160306009A1
公开(公告)日：2016-10-20
申请号：US14689088
申请日：2015-04-17
申请人： GLOBALFOUNDRIES Inc.
发明人： Weihong GAO , Xuefeng ZENG , Yan PAN , Peter LIN , Hoang NGUYEN , Ho Young SONG
IPC分类号： G01R31/305
CPC分类号： G01R31/305 , G01R31/307
摘要： A method and apparatus for separating real DVC via defects from nuisance based on Net Tracing Classification of eBeam VC die comparison inspection results are provided. Embodiments include performing an eBeam VC die comparison inspection on each via of a plurality of dies; determining DVC vias based on the comparison; performing a Net Tracing Classification on the DVC vias; determining S/D DVC vias based on the Net Tracing Classification; and performing a die repeater analysis on the S/D DVC vias to determine systematic design-related DVC via defects.
摘要翻译：提供了一种基于eBeam VC跟踪分类的虚拟DV模块比较检查结果，通过缺陷与真实DVC分离真实DVC的方法和装置。实施例包括对多个管芯的每个通孔执行eBeam VC管芯比较检查; 根据比较确定DVC通孔; 对DVC通道进行净跟踪分类; 根据网络跟踪分类确定S / D DVC通道; 并对S / D DVC通孔进行芯片中继器分析，以通过缺陷确定与系统设计相关的DVC。

4. 发明授权

US09423452B2 Contactless signal testing 有权
标题翻译：非接触式信号测试
公开(公告)号：US09423452B2
公开(公告)日：2016-08-23
申请号：US14095389
申请日：2013-12-03
申请人： Taiwan Semiconductor Manufacturing Company, Ltd.
发明人： Bo-Jr Huang , Nan-Hsin Tseng , Yen-Ling Liu
IPC分类号： G01R31/305 , G01R31/307 , G01R31/302 , G01R1/07
CPC分类号： G01R31/307 , G01R1/07 , G01R31/3025
摘要： A method for performing contactless signal testing includes receiving, with a testing pad of an integrated circuit, a signal within an electron beam, converting an electrical current created by the e-beam to a voltage with a number of diodes connected to a positive voltage supply, extracting a digital test signal from the voltage signal with a digital inverter, and passing the test signal to digital circuitry within the integrated circuit.
摘要翻译：用于执行非接触信号测试的方法包括：利用集成电路的测试焊盘接收电子束内的信号，将由电子束产生的电流转换为具有连接到正电压源的多个二极管的电压用数字逆变器从电压信号提取数字测试信号，并将测试信号传递到集成电路内的数字电路。

5. 发明授权

US09244112B2 Method for detecting an electrical defect of contact/via plugs 有权
标题翻译：用于检测接触/通孔塞的电气缺陷的方法
公开(公告)号：US09244112B2
公开(公告)日：2016-01-26
申请号：US14275437
申请日：2014-05-12
申请人： MACRONIX International Co., Ltd.
发明人： Hsiang-Chou Liao , Tuung Luoh , Ling-Wuu Yang , Ta-Hone Yang , Kuang-Chao Chen
IPC分类号： H01L21/66 , G01R31/04 , H01J37/22 , H01J37/244 , H01J37/28 , G01R31/305
CPC分类号： G01R31/04 , G01R31/305 , H01J37/222 , H01J37/244 , H01J37/28 , H01J2237/049 , H01J2237/063 , H01J2237/221 , H01J2237/24592 , H01J2237/2594 , H01J2237/28 , H01J2237/2817 , H01L22/12 , H01L22/14
摘要： A method for detecting an electrical defect of contact/via plugs is provided. In the method, the contact/via plugs are monitored by an electron-beam (E-Beam) inspection tool to capture an image with a VC (voltage contrast) difference, and then an image extraction is performed on the image with the VC difference, wherein the image extraction is based on Target gray level/back ground gray level. The extracted image is contrasted with a layout design base to obtain a blind contact or Quasi-blind issue of contact/via plugs. A grayscale value of the VC difference having the blind contact or Quasi-blind issue is compared with a determined range of grayscale value to determine whether the VC difference is abnormal.
摘要翻译：提供一种用于检测接触/通孔的电气缺陷的方法。在该方法中，通过电子束（E-Beam）检查工具来监视接触/通孔塞以捕获具有VC（电压对比度）差异的图像，然后对具有VC差异的图像执行图像提取，其中所述图像提取基于目标灰度/背景灰度级。提取的图像与布局设计基础形成对照，以获得接触/通孔插头的盲接或准盲问题。将具有盲接或准盲问题的VC差的灰阶值与确定的灰度值范围进行比较，以确定VC差异是否异常。

6. 发明申请

US20150198648A1 DETECTING OPEN AND SHORT OF CONDUCTORS 有权
标题翻译：检测开路和短路
公开(公告)号：US20150198648A1
公开(公告)日：2015-07-16
申请号：US14153982
申请日：2014-01-13
申请人： APPLIED MATERIALS ISRAEL, LTD.
发明人： Amir Shoham , Alon Litman
IPC分类号： G01R31/02 , G01R31/305
CPC分类号： G01R31/305 , G01R31/2812 , G01R31/2853
摘要： A system and a method for evaluating a conductor, the method may include: illuminating a first area of a conductor by a first electron beam thereby charging the first area; illuminating by a second electron beam a second area of the conductor; and wherein an aggregate size of the first and second areas is a fraction of an overall size of the conductor; detecting, by a detector, detected emitted electrons that were emitted substantially from the second area and generating detection signals indicative of the detected emitted electrons; and processing, by a processor, the detection signals to provide information about a conductivity of the conductor.
摘要翻译：一种用于评估导体的系统和方法，所述方法可以包括：通过第一电子束照射导体的第一区域，从而对第一区域充电; 通过第二电子束照射导体的第二区域; 并且其中所述第一和第二区域的聚集体尺寸是所述导体的总体尺寸的一部分; 通过检测器检测基本上从第二区域发射的检测到的发射电子并产生指示检测到的发射电子的检测信号; 以及由处理器处理检测信号以提供关于导体的导电性的信息。

7. 发明授权

US08222911B2 Light-assisted testing of an optoelectronic module 有权
标题翻译：光电子模块的光辅助测试
公开(公告)号：US08222911B2
公开(公告)日：2012-07-17
申请号：US12296055
申请日：2007-04-04
申请人： Bernhard Gunter Mueller , Ralf Schmid , Matthias Brunner
发明人： Bernhard Gunter Mueller , Ralf Schmid , Matthias Brunner
IPC分类号： G01R31/305
CPC分类号： G02F1/1309 , G02F2001/136254
摘要： The present invention relates to a device for testing an optoelectronic module, comprising a first source for generating an electromagnetic beam or particle beam, a second source for illuminating the optoelectronic module; and a detector. In addition, a method for testing an optoelectronic module is provided comprising illuminating the optoelectronic module, directing an electromagnetic beam or particle beam and detecting defects in the optoelectronic module. The illumination additional to the electromagnetic beam or particle beam makes defects visible which otherwise would not be detected.
摘要翻译：本发明涉及一种用于测试光电子模块的装置，包括用于产生电磁束或粒子束的第一源，用于照亮光电子模块的第二源; 和检测器。此外，提供了一种用于测试光电子模块的方法，包括照亮光电子模块，引导电磁束或粒子束并检测光电子模块中的缺陷。附加到电磁波束或粒子束的照明使缺陷可见，否则将不会被检测到。

8. 发明申请

US20110199110A1 SYSTEM AND METHOD FOR MODULATION MAPPING 有权
标题翻译：用于调制映射的系统和方法
公开(公告)号：US20110199110A1
公开(公告)日：2011-08-18
申请号：US13095831
申请日：2011-04-27
申请人： Steven KASAPI
发明人： Steven KASAPI
IPC分类号： G01R31/305
CPC分类号： G01R31/311 , G01R31/2851 , G01R31/308
摘要： An apparatus for providing modulation mapping is disclosed. The apparatus includes a laser source, a motion mechanism providing relative motion between the laser beam and the DUT, signal collection mechanism, which include a photodetector and appropriate electronics for collecting modulated laser light reflected from the DUT, and a display mechanism for displaying a spatial modulation map which consists of the collected modulated laser light over a selected time period and a selected area of the IC.
摘要翻译：公开了一种用于提供调制映射的设备。该装置包括激光源，提供激光束和DUT之间的相对运动的运动机构，信号收集机构，其包括光电检测器和用于采集从DUT反射的调制激光的适当电子器件，以及显示机构，用于显示空间调制图由选定时间段内收集的调制激光和IC的选定区域组成。

9. 发明授权

US07973546B2 In-line electron beam test system 有权
标题翻译：在线电子束测试系统
公开(公告)号：US07973546B2
公开(公告)日：2011-07-05
申请号：US12826635
申请日：2010-06-29
申请人： Fayez E. Abboud , Sriram Krishnaswami , Benjamin M. Johnston , Hung T. Nguyen , Matthias Brunner , Ralf Schmid , John M. White , Shinichi Kurita , James C. Hunter
发明人： Fayez E. Abboud , Sriram Krishnaswami , Benjamin M. Johnston , Hung T. Nguyen , Matthias Brunner , Ralf Schmid , John M. White , Shinichi Kurita , James C. Hunter
IPC分类号： G01R31/302 , G01R31/305
CPC分类号： H01L21/67748 , H01J2237/2811 , H01J2237/2817 , H01L21/67201 , H01L21/67236
摘要： A method for testing a plurality of electronic devices formed on a large area substrate is described. In one embodiment, the method includes transferring a substrate on an end effector relative to a testing platform having a plurality of testing columns coupled thereto, the substrate having a plurality of electronic devices located thereon, and moving the substrate in a single directional axis relative to an optical axis of each of the plurality of testing columns, the single directional axis being substantially orthogonal to the optical axis to define a test area on the substrate, wherein the test area is configured to cover an entire length or an entire width of the substrate such that the testing columns are capable of testing the entire substrate as the substrate is moved through the test area.
摘要翻译：描述了用于测试形成在大面积基板上的多个电子设备的方法。在一个实施例中，所述方法包括相对于具有耦合到其上的多个测试柱的测试平台在端部执行器上传送衬底，所述衬底具有位于其上的多个电子器件，并且相对于所述多个测试列中的每一个的光轴，所述单方向轴基本上垂直于所述光轴，以在所述衬底上限定测试区域，其中所述测试区域被配置为覆盖所述衬底的整个长度或整个宽度使得当衬底移动通过测试区域时，测试柱能够测试整个衬底。

10. 发明授权

US07859274B2 System for testing a flat panel display device and method thereof 有权
标题翻译：用于测试平板显示装置的系统及其方法
公开(公告)号：US07859274B2
公开(公告)日：2010-12-28
申请号：US12279066
申请日：2007-02-15
申请人： Byung-Uk Kim , Ki-Beom Lee , Yong-Woo Kim , Mi-Sun Park , Jin-Sup Hong , Wy-Yong Kim
发明人： Byung-Uk Kim , Ki-Beom Lee , Yong-Woo Kim , Mi-Sun Park , Jin-Sup Hong , Wy-Yong Kim
IPC分类号： G01R31/302 , G01R31/305 , G01R31/28
CPC分类号： G02F1/1309
摘要： A system for testing a flat panel display having a flat display panel assembly includes a testing stage for arranging the flat display panel assembly, a measuring apparatus being disposed on the testing stage and for measuring a spectrum of a transmitted light passing through a measuring region of the flat display panel assembly from a light source, a transporting apparatus for moving the measuring apparatus at a constant acceleration on the testing stage, a defect informing apparatus being electrically connected to the measuring apparatus and for informing an existence of defect, a type of defect, and a severity of defect by processing an electrical signal of the spectrum transmitted from the measuring apparatus.
摘要翻译：一种用于测试具有平面显示面板组件的平板显示器的系统，包括：用于布置平面显示面板组件的测试台;测量装置，设置在测试台上，并用于测量通过测量区域的测量区域的透射光谱; 来自光源的平面显示面板组件，用于在测试台上以恒定加速度移动测量装置的传送装置，与测量装置电连接并用于通知缺陷的存在的缺陷通知装置，缺陷的类型以及通过处理从测量装置发送的频谱的电信号的缺陷的严重性。

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