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41. 发明授权

US09299529B2 Ion source and repeller structure 有权
标题翻译：离子源和排斥结构
公开(公告)号：US09299529B2
公开(公告)日：2016-03-29
申请号：US13408579
申请日：2012-02-29
申请人： Masayasu Tanjo
发明人： Masayasu Tanjo
IPC分类号： C23C14/00 , C25B11/00 , C25B13/00 , H01J27/02 , H01J37/08 , H01J37/317 , H01J27/20
CPC分类号： H01J27/02 , H01J27/205 , H01J37/08 , H01J37/3171 , H01J2237/081
摘要： A repeller structure comprises a target member configured to be sputtered by a plasma to emit given ions, and provided with a through-hole penetrating between a sputterable surface and a reverse surface thereof, and a repeller body which supports the target member while being inserted in the through-hole of the target member, and has a repeller surface exposed on the side of the sputterable surface through the through-hole. The target member is made of a material selected from the group consisting of gallium oxide, gallium nitride, gallium phosphide, gallium arsenide and gallium fluoride.
摘要翻译：反射器结构包括被构造成由等离子体溅射以发射给定离子的目标构件，并且设置有穿透在可溅射表面和反向表面之间的通孔，以及在插入时支撑目标构件的推斥体目标构件的通孔，并且具有通过通孔在可溅射表面的侧面上暴露的排斥表面。目标构件由选自氧化镓，氮化镓，磷化镓，砷化镓和氟化镓的材料制成。

42. 发明申请

US20160086759A1 Plasma Generator With at Least One Non-Metallic Component 有权
标题翻译：等离子发生器与至少一个非金属组件
公开(公告)号：US20160086759A1
公开(公告)日：2016-03-24
申请号：US14961021
申请日：2015-12-07
申请人： Nissin Ion Equipment Co., Ltd.
发明人： Thomas N. Horsky , Sami K. Hahto
IPC分类号： H01J27/20 , H01J27/02
CPC分类号： H01J27/205 , C23C14/48 , H01J27/022 , H01J37/00 , H01J37/08 , H01J37/3171 , H01J2237/022 , H01J2237/082 , H01J2237/31701 , H01J2237/31705
摘要： A plasma generator for an ion implanter is provided. The plasma generator includes an ionization chamber for forming a plasma that is adapted to generate a plurality of ions and a plurality of electrons. An interior surface of the ionization chamber is exposed to the plasma and constructed from a first non-metallic material. The plasma generator also includes a thermionic emitter including at least one surface exposed to the plasma. The thermionic emitter is constructed from a second non-metallic material. The plasma generator further includes an exit aperture for extracting at least one of the plurality of ions or the plurality of electrons from the ionization chamber to form at least one of an ion beam or an electron flux. The ion beam or the electron flux comprises substantially no metal. The first and second non-metallic materials can be the same or different from each other.
摘要翻译：提供了一种用于离子注入机的等离子体发生器。等离子体发生器包括用于形成适于产生多个离子和多个电子的等离子体的电离室。电离室的内表面暴露于等离子体并由第一非金属材料构成。等离子体发生器还包括热离子发射器，其包括暴露于等离子体的至少一个表面。热离子发射器由第二非金属材料构成。等离子体发生器还包括用于从电离室中提取多个离子或多个电子中的至少一个的出射孔，以形成离子束或电子通量中的至少一个。离子束或电子通量基本上不包含金属。第一和第二非金属材料可以相同或不同。

43. 发明申请

US20160071734A1 PROCESS GAS ENHANCEMENT FOR BEAM TREATMENT OF A SUBSTRATE 有权
标题翻译：用于处理基材的处理气体增强
公开(公告)号：US20160071734A1
公开(公告)日：2016-03-10
申请号：US14842416
申请日：2015-09-01
申请人： TEL Epion Inc.
发明人： Michael Graf , Noel Russell , Matthew C. Gwinn , Allen J. Leith
IPC分类号： H01L21/3065 , H01J37/305 , H01L21/311 , H01J27/02
CPC分类号： H01L21/3065 , H01J27/026 , H01J37/317 , H01J2237/006 , H01J2237/0812 , H01J2237/16 , H01J2237/31732 , H01J2237/3174 , H01L21/31116 , H01L21/32136
摘要： A beam processing system and method of operating are described. In particular, the beam processing system includes a beam source having a nozzle assembly that is configured to introduce a primary gas through the nozzle assembly to a vacuum vessel in order to produce a gaseous beam, such as a gas cluster beam, and optionally, an ionizer positioned downstream from the nozzle assembly, and configured to ionize the gaseous beam to produce an ionized gaseous beam. The beam processing system further includes a process chamber within which a substrate is positioned for treatment by the gaseous beam, and a secondary gas source, wherein the secondary gas source includes a secondary gas supply system that delivers a secondary gas, and a secondary gas controller that operatively controls the flow of the secondary gas injected into the beam processing system downstream of the nozzle assembly.
摘要翻译：描述了一种光束处理系统和操作方法。特别地，光束处理系统包括具有喷嘴组件的光束源，喷嘴组件被配置为将初级气体通过喷嘴组件引入真空容器，以便产生诸如气体束束的气体束，并且可选地，定位在喷嘴组件下游的离子发生器，并被配置为离子化气体束以产生离子化的气体束。光束处理系统还包括处理室，其中定位用于由气体束进行处理的基板和二次气体源，其中二次气体源包括输送二次气体的二次气体供应系统和二次气体控制器其可操作地控制注入喷嘴组件下游的光束处理系统中的二次气体的流动。

44. 发明授权

US09276385B2 Ion generator provided with ion generation units at respective air flow passages 有权
标题翻译：离子发生器在相应的气流通道处设有离子发生单元
公开(公告)号：US09276385B2
公开(公告)日：2016-03-01
申请号：US14238410
申请日：2012-06-27
申请人： Yasutaka Kataoka
发明人： Yasutaka Kataoka
IPC分类号： H01T23/00 , F24F7/00 , H01J27/02 , F24F3/16
CPC分类号： H01T23/00 , F24F7/00 , F24F2003/1635 , F24F2003/1682 , H01J27/022 , Y02A50/21
摘要： Two flow passages are provided for allowing the passage of air sent out from a blower in the same direction individually and discharging the air to outside. An ion generation unit for generating positive ions by only corona discharge is arranged at one flow passage, and an ion generation unit for generating electrostatic atomized water particles with negative polarity by electrostatic atomizing phenomenon is arranged at the other flow passage. A throttle is provided at the one flow passage for making the wind speed of air flowing through the one flow passage faster than the wind speed of air flowing through the other flow passage. Since positive ions having shorter lifetime are emitted more than electrostatic atomized water particles with negative polarity having longer lifetime, the balance between positive and negative polarities in the air can be sustained over a long period of time.
摘要翻译：提供两个流动通道，用于允许单独沿相同方向从鼓风机排出的空气通过并将空气排出到外部。在一个流路上设置用于通过电晕放电产生正离子的离子产生单元，在另一个流路上配置有通过静电雾化现象产生具有负极性的静电雾化水粒子的离子产生单元。在一个流动通道处设置有节流阀，以使流过一个流动通道的空气的风速比流过另一个流动通道的空气的风速更快。由于具有寿命更短的正离子比具有更长寿命的具有负极性的静电雾化水颗粒更多地发射，所以空气中的正极性和负极性之间的平衡可以长时间保持。

45. 发明授权

US09275819B2 Magnetic field sources for an ion source 有权
标题翻译：离子源的磁场源
公开(公告)号：US09275819B2
公开(公告)日：2016-03-01
申请号：US13835475
申请日：2013-03-15
申请人： Nissin Ion Equipment Co., Ltd.
发明人： Sami K. Hahto , Nariaki Hamamoto
IPC分类号： H01J7/24 , H01J27/02 , H01J27/20
CPC分类号： H01J27/022 , H01J27/205
摘要： An ion source is provided that includes an ionization chamber and two magnetic field sources. The ionization chamber has a longitudinal axis extending therethrough and includes two opposing chamber walls, each chamber wall being parallel to the longitudinal axis. The two magnetic field sources each comprises (i) a core and (ii) a coil wound substantially around the core. Each magnetic field source is aligned with and adjacent to an external surface of respective one of the opposing chamber walls and oriented substantially parallel to the longitudinal axis. The cores of the magnetic field sources are physically separated and electrically isolated from each other.
摘要翻译：提供了一种离子源，其包括电离室和两个磁场源。电离室具有延伸穿过其中的纵向轴线并且包括两个相对的室壁，每个室壁平行于纵向轴线。两个磁场源包括（i）芯和（ii）基本上围绕芯缠绕的线圈。每个磁场源与相对的一个相对的腔室壁的外表面对准并相邻，并且基本上平行于纵向轴线定向。磁场源的磁芯在物理上是分离的并且彼此电隔离。

46. 发明授权

US09263223B2 Ion generation in mass spectrometers by cluster bombardment 有权
标题翻译：通过集束轰击在质谱仪中产生离子
公开(公告)号：US09263223B2
公开(公告)日：2016-02-16
申请号：US13870166
申请日：2013-04-25
申请人： Bruker Daltonik GmbH
发明人： Michael Duerr , Christoph Gebhardt
IPC分类号： H01J7/24 , H05B31/26 , H01J27/02 , H01J49/04 , H01J49/14
CPC分类号： H01J27/026 , H01J49/0481 , H01J49/142
摘要： The invention relates to devices and methods in mass spectrometers for the generation of ions of heavy molecules, especially biomolecules, by bombarding them with uncharged clusters of molecules. The analyte ions which are generated or released by cluster bombardment of analyte substances on the surface of sample support plates show a broad distribution of their kinetic energies, which prevents good ion-optical focusing. In the invention, the kinetic energies are homogenized in a higher-density collision gas. The collision gas is preferably located in an RF ion guide, more preferably an RF ion funnel, which can transfer the ions to the mass analyzer. The collision gas may be introduced with temporal pulsing, coordinated or synchronized with the pulsed supersonic gas jet. The collision gas may be pumped off again before the next supersonic gas pulse. In an advantageous embodiment, the collision gas can originate from the supersonic gas jet itself.
摘要翻译：本发明涉及用于通过用不带电荷的分子团轰击它们来产生重分子，特别是生物分子的离子的质谱仪中的装置和方法。通过在样品支撑板表面上的分析物质的聚集轰击产生或释放的分析物离子显示出其动能的广泛分布，这阻止了良好的离子光学聚焦。在本发明中，动能在较高密度的碰撞气体中均质化。碰撞气体优选位于RF离子导向件中，更优选地位于可以将离子转移到质量分析器的RF离子漏斗中。碰撞气体可以与脉冲超音速气体射流一起引入时间脉冲，协调或同步。碰撞气体可能在下一个超音速气体脉冲之前被再次泵出。在有利的实施例中，碰撞气体可以源于超音速气体射流本身。

47. 发明授权

US09230791B2 Anion generating and electron capture dissociation apparatus using cold electrons 有权
标题翻译：阴离子产生和电子捕获离解装置使用冷电子
公开(公告)号：US09230791B2
公开(公告)日：2016-01-05
申请号：US14358809
申请日：2011-11-28
申请人： Hyun Sik Kim , Seung Young Kim , Mo Yang
发明人： Hyun Sik Kim , Seung Young Kim , Mo Yang
IPC分类号： H01J49/08 , H01J49/10 , H01J43/04 , H01J49/00 , H01J49/42 , H01J27/02 , H01J49/14 , H01J43/24 , H01J49/38
CPC分类号： H01J49/08 , H01J27/028 , H01J43/04 , H01J43/246 , H01J49/0045 , H01J49/0054 , H01J49/10 , H01J49/147 , H01J49/38 , H01J49/426
摘要： An anion generating and electron capture dissociation apparatus using cold electrons, which comprises a cold electron generation module configured to generate a large quantity of cold electrons from ultraviolet photons radiated into a mass spectrometer vacuum chamber which is in a high vacuum state has a plurality of ultraviolet diodes configured to emit the ultraviolet photons in the mass spectrometer vacuum chamber. Micro-channel plate (MCP) electron multiplier plates induce and amplify initial electron emissions of the ultraviolet photons from the ultraviolet diodes, and generate a large quantity of electron beams from a rear plate. An electron focusing lens is configured to focus the electron beams amplified through the MCP electron multiplier plates. A grid is configured to adjust energy and an electric current of the electron beams together with the electron focusing lens.
摘要翻译：使用冷电子的阴离子产生和电子捕获解离装置，其包括被配置为从辐射到处于高真空状态的质谱仪真空室的紫外光子产生大量冷电子的冷电子发生模块，具有多个紫外线配置为在质谱仪真空室中发射紫外光子的二极管。微通道板（MCP）电子倍增板诱导和放大来自紫外二极管的紫外光子的初始电子发射，并从背板产生大量的电子束。电子聚焦透镜被配置为聚焦通过MCP电子倍增器板放大的电子束。栅格被配置为与电子聚焦透镜一起调节电子束的能量和电流。

48. 发明授权

US09184019B2 Ion source having negatively biased extractor 有权
标题翻译：离子源具有负偏压提取器
公开(公告)号：US09184019B2
公开(公告)日：2015-11-10
申请号：US13830437
申请日：2013-03-14
申请人： Schlumberger Technology Corporation
发明人： Luke Perkins , Benjamin Levitt , Peter Wraight , Arthur D. Liberman
IPC分类号： H01J27/02
CPC分类号： H01J27/024
摘要： An ion source for use in a radiation generator includes an active cathode configured to emit electrons on a trajectory away from the active cathode, at least some of the electrons as they travel interacting with an ionizable gas to produce ions. In addition, there is at least one extractor downstream of the active cathode having a potential such that the ions are attracted toward the at least one extractor.
摘要翻译：用于辐射发生器的离子源包括被配置为在远离有源阴极的轨迹上发射电子的活性阴极，当它们与可电离气体相互作用以产生离子时，至少一些电子。此外，在活性阴极的下游存在至少一个提取器，其具有使得离子被吸引到至少一个提取器的电位。

49. 发明授权

US09147568B2 Water cluster ion beam mass spectrometer apparatus and method 有权
标题翻译：水簇离子束质谱仪装置及方法
公开(公告)号：US09147568B2
公开(公告)日：2015-09-29
申请号：US14265766
申请日：2014-04-30
申请人： Ionoptika Limited
发明人： Paul William Miles Blenkinsopp , Andrew Mark Barber
IPC分类号： H01J49/26 , H01J49/02 , H01J49/14 , H01J27/02 , H01J49/00
CPC分类号： H01J49/142 , H01J27/026 , H01J49/0031
摘要： A mass spectrometer for producing a primary beam of ions for bombarding a sample under vacuum. The mass spectrometer includes a detector for detecting a secondary beam of ions released from the sample. The primary beam of ions includes water clusters where each water cluster contains between 1 and 10,000 water molecules. The primary beam of ions, in one embodiment, is produced by adiabatic expansion of water vapor. An auxiliary beam of ions for bombarding the sample includes a different species to those of the primary beam of ions.
摘要翻译：用于产生用于在真空下轰击样品的一次离子束的质谱仪。质谱仪包括用于检测从样品释放的次级次级束的检测器。主要离子束包括水簇，其中每个水簇含有1至10,000个水分子。在一个实施方案中，主要离子束是通过水汽的绝热膨胀产生的。用于轰击样品的辅助离子束包括与主离子束不同的物质。

50. 发明授权

US09142378B2 Ion generating device and electrical apparatus which can easily be reduced in size and thickness 有权
标题翻译：能够容易地减小尺寸和厚度的离子发生装置和电气装置
公开(公告)号：US09142378B2
公开(公告)日：2015-09-22
申请号：US13817736
申请日：2011-07-12
申请人： Yoshinori Sekoguchi , Minako Sugano , Yasuhiro Iwashita
发明人： Yoshinori Sekoguchi , Minako Sugano , Yasuhiro Iwashita
IPC分类号： H01J27/24 , H01J27/02 , H01T23/00
CPC分类号： H01J27/022 , H01T23/00
摘要： An arrangement area of a transformer drive circuit, an arrangement area of a high-voltage transformer, and an arrangement area of an ion generating unit are two-dimensionally divided from each other in a casing. A connection terminal is electrically connected to the transformer drive circuit and is formed of a conductive film arranged to be exposed to the outside of the casing. Accordingly, an ion generating device whose size and thickness can be easily reduced and an electrical apparatus including the ion generating device can be provided.
摘要翻译：变压器驱动电路的布置区域，高压变压器的布置区域和离子产生单元的布置区域在壳体中彼此二维地分开。连接端子电连接到变压器驱动电路，并且由布置成暴露于壳体外部的导电膜形成。因此，可以提供其尺寸和厚度可以容易地减小的离子发生装置和包括离子产生装置的电气装置。

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