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    • 43. 发明授权
    • Semiconductor heterostructure field effect transistor and method for making thereof
    • 半导体异质结场效应晶体管及其制造方法
    • US09093516B2
    • 2015-07-28
    • US14089613
    • 2013-11-25
    • IMEC
    • Mohammad Ali PourghaderiBart Soree
    • H01L31/0336H01L29/78H01L29/66H01L29/778H01L29/06H01L29/205
    • H01L29/78H01L29/068H01L29/205H01L29/66431H01L29/66462H01L29/66977H01L29/7781
    • A heterostructure field effect transistor is provided comprising a semiconductor wire comprising in its longitudinal direction a source and a drain region, a channel region in between the source and drain region and in its transversal direction for the source region, a source core region and a source shell region disposed around the source core region, the source shell region having in its transversal direction for the drain region, a drain core region and a drain shell region disposed around the drain core region, the drain shell region having in its transversal direction for the channel region, a channel core region and a channel shell region disposed around the channel core region; wherein the thickness of the channel shell region is smaller than the thickness of the source shell region and is smaller than the thickness of the drain shell region.
    • 提供了一种异质结构场效应晶体管,其包括在其纵向方向上包括源极和漏极区域的源极和漏极区域之间的沟道区域以及用于源极区域的横向方向的源极区域和源极 壳体区域,其设置在源极区域周围,源极壳区域在其横向方向上为漏极区域,漏极区域和漏极壳体区域设置在漏极区域周围,漏极壳体区域在其横向方向上为 沟道区域,沟道芯区域和设置在沟道芯区域周围的沟道壳体区域; 其中所述通道壳体区域的厚度小于所述源极壳体区域的厚度并且小于所述漏极壳体区域的厚度。