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    • 41. 发明申请
    • TUNABLE MEMS RESONATORS
    • TUNABLE MEMS谐振器
    • US20140009249A1
    • 2014-01-09
    • US13751455
    • 2013-01-28
    • QUALCOMM INCORPORATED
    • Sang-June Park
    • H03H9/02H03H9/46
    • H03H9/02244E05Y2900/402H01P1/127H01P1/2084H03H9/462
    • Tunable MEMS resonators having adjustable resonance frequency and capable of handling large signals are described. In one exemplary design, a tunable MEMS resonator includes (i) a first part having a cavity and a post and (ii) a second part mated to the first part and including a movable layer located under the post. Each part may be covered with a metal layer on the surface facing the other part. The movable plate may be mechanically moved by a DC voltage to vary the resonance frequency of the MEMS resonator. The cavity may have a rectangular or circular shape and may be empty or filled with a dielectric material. The post may be positioned in the middle of the cavity. The movable plate may be attached to the second part (i) via an anchor and operated as a cantilever or (ii) via two anchors and operated as a bridge.
    • 描述了具有可调谐共振频率并且能够处理大信号的可调谐MEMS谐振器。 在一个示例性设计中,可调谐MEMS谐振器包括(i)具有空腔和柱的第一部分和(ii)与第一部分配合并且包括位于柱下方的可移动层的第二部分。 每个部分可以在面向另一部分的表面上被金属层覆盖。 可移动板可通过DC电压机械地移动以改变MEMS谐振器的谐振频率。 空腔可以具有矩形或圆形形状,并且可以是空的或者用电介质材料填充。 柱可以位于腔的中间。 可移动板可以经由锚固件附接到第二部件(i)并作为悬臂操作,或者(ii)经由两个锚定件并作为桥梁操作。
    • 42. 发明授权
    • Boundary acoustic wave filter
    • 边界声波滤波器
    • US08525621B2
    • 2013-09-03
    • US12398237
    • 2009-03-05
    • Takashi YamaneMasaru Yata
    • Takashi YamaneMasaru Yata
    • H03H9/46H03H9/64
    • H03H9/0222H03H9/0038H03H9/0071H03H9/0085H03H9/14582H03H9/14588
    • A boundary acoustic wave filter device includes an electrode structure provided at a boundary between a piezoelectric body and a dielectric body laminated on the piezoelectric body and utilizes an SH-type boundary acoustic wave that propagates along the boundary. In the boundary acoustic wave filter device, the electrode structure includes a longitudinally coupled resonator boundary acoustic wave filter portion that has a first IDT and second and third IDTs arranged respectively on both sides of the IDT in a direction in which the boundary acoustic wave propagates. At portions at which two IDTs are located adjacent to each other in the direction in which the boundary acoustic wave propagates, narrow pitch electrode finger portions are provided in the IDTs, and the pitch of the electrode fingers of the narrow pitch electrode finger portion is different from the pitch of the electrode fingers of each of the narrow pitch electrode finger portions.
    • 一种边界声波滤波器装置,包括设置在压电体和层叠在压电体上的电介质体之间的边界处的电极结构,利用沿边界传播的SH型边界声波。 在边界声波滤波器装置中,电极结构包括纵向耦合的谐振器边界弹性波滤波器部分,其具有在边界声波传播的方向上分别布置在IDT的两侧上的第一IDT和第二和第三IDT。 在两个IDT彼此相邻的部分,在声波传播的方向上,在IDT中设置窄间距电极指部分,窄间距电极指部分的电极指的间距不同 从每个窄间距电极指部分的电极指的间距开始。
    • 44. 发明授权
    • Microelectromechanical filter
    • 微机电滤波器
    • US08471651B2
    • 2013-06-25
    • US12940054
    • 2010-11-05
    • Tsun-Che HuangFeng-Chia HsuPin ChangChin-Hung Wang
    • Tsun-Che HuangFeng-Chia HsuPin ChangChin-Hung Wang
    • H03H9/46H03H9/00
    • H03H9/02228H03H9/462H03H9/505H03H9/54
    • A microelectromechanical filter is provided. The microelectromechanical filter includes an input electrode, an output electrode, one or several piezoelectric resonators, one or several high quality factor resonators, and one or several coupling beams. The input electrode and the output electrode are disposed on the piezoelectric resonators. The high quality factor resonator is silicon or of piezoelectric materials, and there is no metal electrode on top of the resonator. The coupling beam is connected between the piezoelectric resonator and the high quality factor resonator. The coupling beam transmits an acoustic wave among the resonators, and controls a bandwidth of filter. The microelectromechanical filter with low impedance and high quality factor fits the demand for next-generation communication systems.
    • 提供了微机电滤波器。 微机电滤波器包括输入电极,输出电极,一个或多个压电谐振器,一个或多个高品质因子谐振器以及一个或多个耦合光束。 输入电极和输出电极设置在压电谐振器上。 高品质因子谐振器是硅或压电材料,谐振器顶部没有金属电极。 耦合光束连接在压电谐振器和高品质因子谐振器之间。 耦合光束在谐振器之间传播声波,并控制滤波器的带宽。 具有低阻抗和高品质因数的微机电滤波器适合下一代通信系统的需求。
    • 45. 发明授权
    • Digitally programmable RF MEMS filters with mechanically coupled resonators
    • 具有机械耦合谐振器的数字可编程RF MEMS滤波器
    • US08390398B2
    • 2013-03-05
    • US12608290
    • 2009-10-29
    • Hengky ChandrahalimSunil Ashok Bhave
    • Hengky ChandrahalimSunil Ashok Bhave
    • H03H9/46
    • H03H9/462H03H9/2436H03H9/505H03H2009/2442
    • A digitally-tunable RF MEMS filter includes a substrate and a plurality of mechanically coupled resonators, wherein a first and a last resonator of the plurality of mechanically coupled resonators are configured to be electrostatically transduced. One or more of the plurality of mechanically coupled resonators are configured to be biased relative to the substrate such that the one or more biased resonators may be brought substantially in contact with the substrate. In a method of digitally tuning an RF MEMS filter having a mechanically coupled resonator array, a DC bias voltage is applied to at least a first resonator and a last resonator of the mechanically coupled resonator array such that motional boundary conditions for the at least first resonator and last resonator are selectable in proportion to the DC bias voltage.
    • 数字可调RF MEMS滤波器包括衬底和多个机械耦合谐振器,其中多个机械耦合谐振器中的第一和最后一个谐振器被配置为静电转换。 多个机械耦合谐振器中的一个或多个被配置为相对于衬底偏置,使得一个或多个偏置谐振器可以基本上与衬底接触。 在对具有机械耦合谐振器阵列的RF MEMS滤波器进行数字调谐的方法中,DC偏置电压施加到机械耦合谐振器阵列的至少第一谐振器和最后谐振器,使得至少第一谐振器的运动边界条件 并且最后的谐振器可以与直流偏置电压成比例地选择。
    • 46. 发明授权
    • Multiband filter
    • 多频带滤波器
    • US08384496B2
    • 2013-02-26
    • US12625007
    • 2009-11-24
    • Thomas BauerAndreas Przadka
    • Thomas BauerAndreas Przadka
    • H03H9/46H04W4/00
    • H03H9/542H03H7/0123H03H7/175H03H7/1758H03H2250/00
    • A band-stop filter is proposed which is constructed on a multilayered substrate and consists of a parallel circuit comprising a bandpass filter and a high-pass filter. The two filters are at least partly realized in the form of LC-elements integrated into the substrate. Further circuit components can be arranged as discrete components on the substrate. In the filter branch having the bandpass filter, an electroacoustic resonator is arranged in a transverse branch to ground. By means of the filter, a wide stop band is obtained, while the passband or passbands can comprise a plurality of radio bands.
    • 提出了一种构造在多层基板上的带阻滤波器,其由包括带通滤波器和高通滤波器的并联电路组成。 两个滤波器至少部分地以集成到基板中的LC元件的形式实现。 另外的电路元件可以被布置为在衬底上的分立元件。 在具有带通滤波器的滤波器分支中,电声谐振器布置在横向分支到地面上。 通过滤波器,获得宽的阻带,而通带或通带可以包括多个无线电频带。
    • 48. 发明授权
    • Carbon nanotube resonators comprising a non-woven fabric of unaligned nanotubes
    • 碳纳米管谐振器包括非对准纳米管的无纺织物
    • US07965156B2
    • 2011-06-21
    • US12065854
    • 2006-09-05
    • Jonathan W. WardBrent M. Segal
    • Jonathan W. WardBrent M. Segal
    • H03H9/24H03H9/00H03H9/46
    • C09D5/14A01N37/36Y10S977/724Y10S977/742Y10S977/75Y10S977/752Y10S977/932A01N25/10A01N37/02A01N37/04A01N37/06A01N37/10A01N59/16A01N59/20A01N2300/00
    • Under one aspect, a resonator 400 includes a nanotube element 410 including a non-woven fabric of unaligned nanotubes and having a thickness, and a support structure 404 defining a gap 406 over which the nanotube element 410 is suspended, the thickness of the nanotube element 410 and the length of the gap 406 being selected to provide a pre-specified resonance frequency for the resonator 400 The resonator 400 also includes a conductive element 412 in electrical contact with the nanotube element 410, a drive electrode 408 in spaced relation to the nanotube element 410, and power logic in electrical contact with die at least one drive electrode 408 The power logic provides a series of electrical pulses at a frequency selected to be about the same as the pre-specified resonance frequency of the resonator 400 to the drive electrode 408 during operation of the resonator 400, such that the nanotube element 410 responds to the series of electrical pulses applied to the drive electrode 408 by making a series of mechanical motions at the resonance frequency of the resonator 400.
    • 在一个方面,谐振器400包括纳米管元件410,纳米管元件410包括非对准纳米管的非织造织物并具有厚度,以及支撑结构404,其限定了纳米管元件410悬挂在其上的间隙406,纳米管元件的厚度 410,并且间隙406的长度被选择为谐振器400提供预定的谐振频率。谐振器400还包括与纳米管元件410电接触的导电元件412,与纳米管相隔离的驱动电极408 元件410以及与裸片至少一个驱动电极408电接触的功率逻辑功率逻辑提供一系列电脉冲,频率选择为与谐振器400的预先指定的谐振频率相对于驱动电极 在谐振器400的操作期间,使得纳米管元件410响应于施加到驱动电极408的一系列电脉冲 在共振器400的共振频率下进行一系列机械运动。