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    • 6. 发明申请
    • MEMS resonator array structure and method of operating and using same
    • MEMS谐振器阵列结构及其操作和使用方法
    • US20070001783A1
    • 2007-01-04
    • US11172143
    • 2005-06-30
    • Markus LutzAaron PartridgeZhiyu Pan
    • Markus LutzAaron PartridgeZhiyu Pan
    • H03H9/50
    • H03H9/2405H03H3/0076H03H9/02338H03H9/02448H03H9/2431H03H9/462H03H9/505H03H2009/02354H03H2009/0244H03H2009/02496H03H2009/02503H03H2009/02511H03H2009/02527
    • A plurality of mechanically coupled MEMS resonators that are arranged in an N×M MEMS array structure. Each MEMS resonators includes a plurality of straight (or substantially straight) elongated beam sections that are connected by curved/rounded sections. Each elongated beam section is connected to another elongated beam section at a distal end via the curved/rounded sections thereby forming a geometric shape (e.g., a rounded square). Further, each resonator is mechanically coupled to at least one other adjacent resonator of the array via a resonator coupling section. The resonator coupling sections may be disposed between elongated beam sections of adjacent resonators. The resonators, when induced, oscillate at the same or substantially the same frequency. The resonators oscillate in a combined elongating (or breathing) mode and bending mode; that is, the beam sections exhibit an elongating-like (or breathing-like) motion and a bending-like motion. The one or more of the resonators of the array structure may include one or more nodal points or areas (i.e., portions of the resonator that are stationary, experience little movement, and/or are substantially stationary during oscillation of the resonator/array) in one or more portions or areas of the curved sections of the structure. The nodal points are suitable and/or preferable locations to anchor the resonator/array to the substrate.
    • 以N×M MEMS阵列结构排列的多个机械耦合的MEMS谐振器。 每个MEMS谐振器包括通过弯曲/圆形部分连接的多个直的(或基本上直的)细长的梁部分。 每个细长梁部分经由弯曲/圆形部分在远端连接到另一个细长梁部分,从而形成几何形状(例如,圆形方形)。 此外,每个谐振器经由谐振器耦合部分机械耦合到阵列的至少一个其它相邻的谐振器。 谐振器耦合部分可以设置在相邻谐振器的细长波束部分之间。 谐振器在感应时以相同或基本相同的频率振荡。 谐振器以组合延长(或呼吸)模式和弯曲模式振荡; 也就是说,梁段呈现伸长状(或呼吸状)运动和弯曲状运动。 阵列结构的一个或多个谐振器可以包括一个或多个节点或区域(即谐振器的静止的部分,在谐振器/阵列的振荡期间经历少量运动和/或基本上静止) 结构的弯曲部分的一个或多个部分或区域。 节点是合适的和/或优选的位置以将谐振器/阵列锚固到基底。
    • 7. 发明授权
    • Composite longitudinal vibration mechanical filter having undesired
vibration absorber
    • 具有不想要的振动吸收器的复合纵向振动机械过滤器
    • US5751200A
    • 1998-05-12
    • US487951
    • 1995-06-05
    • Kazuo YamashitaYoshihiko TakeuchiMasahiro Watanabe
    • Kazuo YamashitaYoshihiko TakeuchiMasahiro Watanabe
    • H03H3/02H03H9/09H03H9/50
    • H03H3/02H03H9/09H03H9/50Y10T29/42
    • A composite longitudinal vibration mechanical filter for delivering out a supplied high-frequency signal in a predetermined frequency range includes a plurality of vibratable bodies including input and output longitudinal vibratable tuning bars with piezoelectric members superposed thereon, coupling elements by which the longitudinally vibratable tuning bars are coupled to each other, supporting elements projecting respectively from the input and output longitudinally vibratable tuning bars, and a holder to which the supporting elements are attached. At least one resonant frequency adjusting finger is disposed on at least one of the vibrational bodies. Grooves are defined in the longitudinally vibratable tuning bars at the same time that they are fabricated. The grooves extend in the direction in which the longitudinally vibratable tuning bars are longitudinally vibratable, and are shorter than the length of the longitudinally vibratable tuning bars. Through holes may instead be defined in the longitudinally vibratable tuning bars, the through holes having an opening size smaller than the wavelength of the longitudinal vibration of the longitudinally vibratable tuning bars. Piezoelectric members are fixedly superposed on the input and output longitudinally vibratable tuning bars in sandwiching relation thereto.
    • 用于输出预定频率范围内的所提供的高频信号的复合纵向振动机械滤波器包括多个可振动体,包括输入和输出纵向振动调音杆,压电构件叠加在其上,耦合元件,纵向振动调音杆 彼此耦合,分别从输入和输出纵向可振动调音杆突出的支撑元件和支撑元件附接到的支架。 至少一个谐振频率调节指状物设置在至少一个振动体上。 在纵向可振动调音杆中同时定义槽。 凹槽沿纵向可振动调音杆纵向振动的方向延伸,并且比纵向可振动调音杆的长度短。 可以在纵向可振动调谐杆中定义通孔,通孔的开口尺寸小于纵向可振动调音杆的纵向振动的波长。 压电元件与输入和输出的纵向可振动调音杆固定重叠。
    • 8. 发明授权
    • Third mode torsional F-M resonator
    • 第三模式扭转F-M谐振器
    • US5006824A
    • 1991-04-09
    • US849093
    • 1986-04-07
    • Aaron R. Paff
    • Aaron R. Paff
    • H03H9/50
    • H03H9/50
    • There is disclosed an improved electromechanical resonator for use in multiresonator mechanical bandpass filters. The resonator is constructed using two resonator rods attached to a ceramic transducer which is substantially centrally located. The thus-formed electromechanical resonator resonates at the desired frequency in the third torsional mode, which is characterized by three motional nodes. Support pins are attached at the two outer nodes to provide physical support, and are also used for signal and ground connections, while the ceramic is positioned on or near the center node, which maximizes the achievable electromechanical coupling. Multiresonator mechanical bandpass filters which use such third-mode electromechanical resonators in conjunction with second-mode interior resonators have improved spurious rejection.
    • 公开了一种用于多谐振器机械带通滤波器的改进的机电谐振器。 谐振器由两个连接到陶瓷换能器的谐振器杆构成,该谐振器基本上位于中心。 这样形成的机电谐振器在第三扭转模式中以期望的频率谐振,其特征在于三个运动节点。 支撑销连接在两个外部节点处以提供物理支撑,并且还用于信号和接地连接,而陶瓷位于中心节点上或附近,从而使可实现的机电耦合最大化。 结合第二模式内部谐振器使用这种第三模式机电谐振器的多谐振荡器机械带通滤波器具有改善的杂散抑制。
    • 9. 发明授权
    • Multiple resonant electromechanical filters using edge-mode vibration of
a long piezoelectric plate
    • 使用长压电板的边缘模式振动的多谐振机电滤波器
    • US4396895A
    • 1983-08-02
    • US266073
    • 1981-05-21
    • Hiroshi ShimizuYuji IsekiHiroshi Watanabe
    • Hiroshi ShimizuYuji IsekiHiroshi Watanabe
    • H03H9/125H03H9/50H03H9/58H03H9/15H03H9/60
    • H03H9/581
    • A multimode piezoelectric mechanical filter using edge-mode piezoelectric transducers, each comprising a semi-infinite or long piezoelectric plate polarized in the thickness direction, and a pair of exciting electrodes formed on the plate at an end portion thereof. Input and output edge-mode transducers are supported at their other ends together with optional resonator elements. The transducer and/or resonator elements are mechanically coupled with one another by a coupling rod at their end portions opposite the support to transmit the edge-mode vibration from one to the other. All of the transducers and resonator elements may be disposed in a common plane and may be integrally formed by punching a single piezoelectric plate to form a monolithic type mechanical filter. In such monolithic type filter, coupling rods are also integrally formed with the transducers and resonators. Alternatively, the transducer regions and/or resonator regions are separated and defined by a slit or slits formed in a large square piezoelectric plate, the bottom portion of each slit being usable as the mechanical coupling.
    • 使用边缘模式压电换能器的多模压电机械滤波器,每个包括在厚度方向上偏振的半无限长或长的压电板,以及在其端部形成在板上的一对激励电极。 输入和输出边缘模式换能器在其另一端与可选的谐振元件一起支持。 传感器和/或谐振器元件通过联接杆在与支撑件相对的端部处彼此机械耦合以将边缘模式振动从一个传递到另一个。 所有换能器和谐振器元件可以设置在共同的平面中,并且可以通过冲压单个压电板来一体地形成以形成整体式机械过滤器。 在这种单片式过滤器中,联接杆也与换能器和谐振器一体地形成。 或者,换能器区域和/或谐振器区域由形成在大方形压电板中的狭缝或狭缝分隔和限定,每个狭缝的底部可用作机械耦合。