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61. 发明授权

US10578971B2 Exposure apparatus and exposure method 有权
公开(公告)号：US10578971B2
公开(公告)日：2020-03-03
申请号：US16071984
申请日：2016-12-28
申请人： Dexerials Corporation
发明人： Asahiko Nogami
IPC分类号： H01L21/027 , G03F7/20 , G03F7/00 , H01S3/106 , H01S3/13
摘要： An exposure apparatus 10 is an exposure apparatus for forming a pattern by exposure by irradiating a set master 1 with laser light, comprising: an optical pickup 12 which is capable of adjusting the focus of laser light and a control unit 19 which adjusts the focus of laser light emitted from the optical pickup 12 using integrated surface profile data indicating the relative positional relationship between the surface of the master 1 and the optical pickup 12 according to at least one of the surface roughness of the master 1, the inclination of the master 1, and the decentering of the master 1.

62. 发明授权

US10558173B2 Method and device for producing a reference frequency 有权
公开(公告)号：US10558173B2
公开(公告)日：2020-02-11
申请号：US16091333
申请日：2017-04-05
申请人： Technische Universität Wien
发明人： Michael Trupke
IPC分类号： G04G3/04 , G02B6/293 , G02B6/42 , G04F5/14 , H03L7/26 , H01S3/10 , H01S3/13
摘要： The invention relates to a method for producing a reference frequency Δf. According to the invention, the use of a first optical resonator (3a; 24) and of a second optical resonator (25) is provided, wherein the first resonator (3a; 24) has a first resonator mode having a first frequency f1 and the second resonator (25) has a second resonator mode having a second frequency f2, wherein the frequencies of the two resonator modes are functions of an operating parameter BP and assume the values f1 and f2 at a specified value BP0 of the operating parameter such that f1(BP0)=f1 and f2(BP0)=f2 apply, wherein the resonators (3a; 24, 25) are designed in such a way that the respective first derivatives of the frequencies f1(BP), f2(BP) with respect to BP or at least respective difference quotients around BP0 correspond within a deviation of at most ±0.1%, wherein light of the first frequency f1 is stabilized to the first frequency f1 by means of the first resonator and light of the second frequency f2 is stabilized to the second frequency f2 by means of the second resonator, and wherein the difference between the stabilized frequencies f1 and f2, Δf=|f1−f2|, is determined in order to obtain the stabilized reference frequency Δf.

63. 发明申请

US20200014167A1 PRECISION FREQUENCY COMBS 审中-公开
公开(公告)号：US20200014167A1
公开(公告)日：2020-01-09
申请号：US16576371
申请日：2019-09-19
申请人： IMRA America, Inc.
发明人： Antoine Jean Gilbert Rolland , Marco Cassinerio , Jie Jiang , Martin E. Fermann
IPC分类号： H01S3/13 , H01S3/11
摘要： Examples of compact control electronics for precision frequency combs are disclosed. Application of digital control architecture in conjunction with compact and configurable analog electronics provides precision control of phase locked loops with reduced or minimal latency, low residual phase noise, and/or high stability and accuracy, in a small form factor.

64. 发明授权

US10468850B2 Distributed raman amplifier systems 有权
公开(公告)号：US10468850B2
公开(公告)日：2019-11-05
申请号：US15581342
申请日：2017-04-28
申请人： Mox Networks, LLC
发明人： David Hochhalter
IPC分类号： H01S3/131 , H01S3/30 , H01S3/13 , G02B6/42 , H01S3/094 , H04B10/079 , H04B10/291 , H01S3/00
摘要： A smart spool is configured to be optically coupled between a pumping light source and optical point-loss sources in an optical fiber transmission line. The smart spool comprises a probe signal transmitter that transmits an optical probe signal into the transmission line. An optical detector receives probe signals scattered in the transmission line. A loss-measuring device is coupled to the optical detector and operable to measure aggregate losses in the transmission line and report the aggregate losses to a network manager. The spool comprises a fiber of sufficient length to offset the aggregated losses to enable a distributed Raman amplifier to pump the transmission line. The smart spool prevents the distributed Raman amplifier from shutting down and allows the distributed Raman amplifier to achieve entitled gain by pumping the fiber in the spool.

65. 发明授权

US10454247B1 Method of forming a fiber Bragg grating in a pre-assembled laser module 有权
公开(公告)号：US10454247B1
公开(公告)日：2019-10-22
申请号：US16156372
申请日：2018-10-10
申请人： II-VI Delaware, Inc.
发明人： Nadhum K. Zayer
IPC分类号： H01S3/13 , H01S5/0687 , H01S5/14 , H01S5/10 , H01S5/00 , H01S5/50
摘要： A method of providing a fiber Bragg grating (FBG) within a laser diode package is proposed that includes first inserting the fiber into the package (typically a stripped end termination of the optical fiber) and aligning the fiber with the laser diode. Once aligned, an external FBG writing system is used to illuminate a selected section of the fiber in place in the package (the package remaining “open” at this time) in a manner that creates the specific grating line pattern for a particular FBG. When using a UV-based system with a phase mask, a focusing lens is disposed between the phase and the open package to direct the interfering beams into the core region of the stripped fiber. A high-power femtosecond laser source may be used in an alternative arrangement to directly write the structure and form the in-package FBG.

66. 发明授权

US10447004B2 Laser fault tolerance and self-calibration system 有权
公开(公告)号：US10447004B2
公开(公告)日：2019-10-15
申请号：US15355996
申请日：2016-11-18
申请人： NLIGHT, INC.
发明人： Robert Joseph Foley
IPC分类号： H01S5/00 , H01S5/40 , G05B19/4065 , G06F21/31 , H01S3/094 , H01S3/13 , H01S3/067 , H01S5/068 , H01S3/10
摘要： A laser diode system includes plurality of laser pumps, each of the plurality of laser pumps including a plurality of laser diode drivers and a plurality of laser diode elements, wherein each of the plurality of laser diode drivers is electrically coupled to power at least two of the plurality of laser diode elements. A combiner electrically is coupled to the plurality of laser diode elements to combine an output of each of the plurality of laser pumps to generate a combined output light. A controller identifies a failed laser pump or a failed laser diode element, receives an encoded key to gain access to the controller, and disables the failed laser pump or the failed laser diode element based at least in part on authenticating the encoded key.

67. 发明授权

US10436811B2 Laser source for a cold-atom inertial sensor 有权
公开(公告)号：US10436811B2
公开(公告)日：2019-10-08
申请号：US15778607
申请日：2016-11-07
申请人： THALES
发明人： Matthieu Dupont-Nivet , Sylvain Schwartz , Arnaud Brignon , Jérôme Bourderionnet
IPC分类号： G01C19/58 , G01C19/60 , G01C19/62 , G01C19/64 , G01P15/093 , G01P15/08 , H01S3/13 , H01S5/02 , H01S5/026 , H01S5/068 , H01S5/0687 , H01S5/12 , H01S5/40 , H01S5/50 , H01S3/10 , H01S3/00
摘要： A laser-source assembly that is configured to illuminate a vacuum chamber containing atoms in the gaseous state so as to implement a cold-atom inertial sensor, the atoms having at least two fundamental levels that are separated by a fundamental frequency difference comprised between 1 and a few gigahertz, the assembly comprises: a master laser that emits a beam having a master frequency; a first control loop that is configured to stabilize the master frequency of the master laser on a frequency corresponding to half a set frequency of an atomic transition between a fundamental level and an excited level of the atoms; a slave laser that has a slave frequency; and a second control loop that is configured to stabilize the slave frequency of the slave laser with respect to the master frequency, the slave frequency being offset with respect to the master frequency successively, over time, by a first preset offset value, a second preset offset value, and a third preset offset value, the offset values being comprised in an interval equal to half the fundamental frequency difference plus or minus a few hundred MHz.

68. 发明申请

US20190305514A1 METHOD FOR CONTROLLING THE EMISSION FREQUENCY OF A LASER 审中-公开
公开(公告)号：US20190305514A1
公开(公告)日：2019-10-03
申请号：US16303107
申请日：2017-05-19
申请人： HUMEDICS GMBH
发明人： Axel LUCHTERHAND , Alexander HELMKE , Tom RUBIN , Karsten HEYNE
IPC分类号： H01S5/0687 , G01J3/02 , G01J3/28 , G01J3/26 , H01S3/13 , H01S5/024 , H01S5/34
摘要： A method for controlling the emission frequency of a laser comprises: recording a first spectrum by passing a laser light emitted by the laser through a sample onto a detector, the detector being connected to a multichannel analyzer which assigns pulses detected by the detector to a channel; determining a first channel to which the maximum of a first signal in the first spectrum has been assigned; determining a second channel to which the maximum of a second signal in the first spectrum has been assigned; recording a second spectrum in analog fashion like the first spectrum; determining whether the maximum of the first signal in the second spectrum has been assigned to the first channel and whether the maximum of the second signal in the second spectrum has been assigned to the second channel; adjusting the operating temperature of the laser in the event of deviations determined in the previous step.

69. 发明授权

US10431953B2 Laser apparatus including plurality of laser modules 有权
公开(公告)号：US10431953B2
公开(公告)日：2019-10-01
申请号：US15937170
申请日：2018-03-27
申请人： FANUC CORPORATION
发明人： Ryuusuke Miyata , Hiroshi Takigawa
IPC分类号： H01S3/13 , B23K26/70 , H01S3/23 , H01S3/10 , H01S3/102 , H01S3/131
摘要： A laser apparatus includes a plurality of laser modules, and includes a function for preventing a defect arising when switching the number of laser modules to be driven. The laser apparatus includes the plurality of laser modules, a combiner configured to combine laser beams from the plurality of laser modules, an optical output command section configured to generate a first optical output command for a combined laser beam, and a laser module selection/command section configured to select a laser module to be driven from the plurality of laser modules, based on the first optical output command and to generate a second optical output command for each of the laser modules that have been selected. The laser module selection/command section is configured to set a threshold value for a first optical output command to be different between when increasing and reducing the number of laser modules to be driven.

70. 发明授权

US10411435B2 Dual-axis adaptive optic (AO) system for high-power lasers 有权
公开(公告)号：US10411435B2
公开(公告)日：2019-09-10
申请号：US15174369
申请日：2016-06-06
申请人： Raytheon Company
发明人： David M. Filgas , Andrew D. W. McKie
IPC分类号： G02F1/01 , G02F1/29 , H01S3/00 , H01S3/08 , H01S3/13 , H01S3/23 , H01S3/063 , H01S5/062 , H01S5/0683 , H04N5/335 , H01S5/04
摘要： A system includes a master oscillator configured to generate a low-power optical beam. The system also includes a planar waveguide (PWG) amplifier configured to generate a high-power optical beam using the low-power optical beam. The PWG amplifier has a larger dimension in a slow-axis direction and a smaller dimension in a fast-axis direction. The system further includes at least one adaptive optic (AO) element configured to modify the low-power optical beam along the slow-axis direction and to modify the low-power optical beam along the fast-axis direction. In addition, the system includes a feedback loop configured to control the at least one AO element. The modification in the slow-axis direction can compensate for thermal-based distortions created by the PWG amplifier, and the modification in the fast-axis direction can compensate for optical misalignment associated with the master oscillator and the PWG amplifier.

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