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71. 发明申请

US20150338639A1 PHASE MODULATION DEVICE AND LASER MICROSCOPE 有权
标题翻译：相位调制装置和激光显微镜
公开(公告)号：US20150338639A1
公开(公告)日：2015-11-26
申请号：US14376423
申请日：2013-02-01
申请人： CITIZEN HOLDINGS CO., LTD.
发明人： Kenji MATSUMOTO , Ayano TANABE , Masafumi YOKOYAMA , Nobuyuki HASHIMOTO , Makoto KURIHARA
IPC分类号： G02B26/06 , G02B27/00 , G02B21/00
CPC分类号： G02B26/06 , G02B21/0032 , G02B21/0052 , G02B21/0056 , G02B21/082 , G02B27/0068 , G02F1/134309 , G02F2203/18 , G02F2203/50
摘要： A phase modulation device corrects wave front aberrations generated by an optical system including an objective lens disposed on an optical path of a light flux. The phase modulation device includes a phase modulation element which includes a plurality of electrodes, and modulates the phase of the light flux in accordance with a voltage applied to each electrode, and a control circuit which controls the voltage to be applied to each electrode. The control circuit controls the voltage to be applied to each electrode in such a manner that the light flux is imparted with a phase modulation amount in accordance with a phase modulation profile having a polarity opposite to the polarity of a phase distribution to be determined according to a relational equation representing a relationship between a numerical aperture of the objective lens and a ratio between third-order spherical aberration and fifth-order spherical aberration.
摘要翻译：相位调制装置校正由包括设置在光通量的光路上的物镜的光学系统产生的波前像差。相位调制装置包括：相位调制元件，其包括多个电极，并且根据施加到每个电极的电压来调制光通量的相位;以及控制电路，其控制施加到每个电极的电压。控制电路以这样的方式控制施加到每个电极的电压，使得光通量根据相位调制曲线赋予相位调制曲线，相位调制曲线的极性与根据相位分布的极性相反，根据表示物镜的数值孔径与三阶球面像差与五阶球面像差之间的关系的关系式。

72. 发明授权

US09191657B2 Image display device 有权
标题翻译：图像显示装置
公开(公告)号：US09191657B2
公开(公告)日：2015-11-17
申请号：US13331834
申请日：2011-12-20
申请人： Dongun Kim , Suwoong Lee , Chonghun Park , Sangrae Lee
发明人： Dongun Kim , Suwoong Lee , Chonghun Park , Sangrae Lee
IPC分类号： H04N13/04 , G02B26/06
CPC分类号： H04N13/337 , G02B26/06 , H04N2213/001
摘要： An image display device includes a display element selectively implementing a 2D image and a 3D image and a patterned retarder. The display element includes a pixel array including a plurality of subpixels, which are respectively formed at crossings of column lines and row lines. The patterned retarder includes a plurality of first retarders, each of which transmits light from the display element as a first polarization component, and a plurality of second retarders, each of which transmits the light from the display element as a second polarization component. The first retarders and the second retarders are alternatively arranged.
摘要翻译：图像显示装置包括选择性地实现2D图像和3D图像的显示元件和图案化延迟器。显示元件包括分别在列线和行线的交叉处形成的多个子像素的像素阵列。图案化延迟器包括多个第一延迟器，每个第一延迟器都将来自显示元件的光作为第一偏振分量透射，并且多个第二延迟器，每个第二延迟器将来自显示元件的光作为第二偏振分量透射。交替布置第一缓速器和第二缓速器。

73. 发明授权

US09175948B2 Optical module with a measuring device 有权
标题翻译：具有测量装置的光学模块
公开(公告)号：US09175948B2
公开(公告)日：2015-11-03
申请号：US14070702
申请日：2013-11-04
申请人： Carl Zeiss SMT GmbH
发明人： Armin Schoeppach , Stefan Hembacher , Guido Limbach , Jens Kugler
IPC分类号： G01B11/14 , G03F7/20 , G02B26/06 , G02B26/08
CPC分类号： G01B11/14 , G02B26/06 , G02B26/0825 , G03F7/70266 , G03F7/70825
摘要： An optical module, in particular for microlithography, with an optical element unit, a support device, a deformation device and a measuring device is disclosed. The support device is supported on the optical element unit, whereas for deforming an optical surface of the optical element unit, the deformation device engages a deformation section of the optical element unit comprising the optical surface. For determining the position and/or the orientation of the optical element unit with respect to an external reference in at least one degree of freedom, the measuring device comprises at least one measuring element, wherein the measuring element is arranged on a reference section of the optical element unit.
摘要翻译：公开了具有光学元件单元，支撑装置，变形装置和测量装置的光学模块，特别是用于微光刻的光学模块。支撑装置被支撑在光学元件单元上，而为了使光学元件单元的光学表面变形，变形装置接合包括光学表面的光学元件单元的变形部分。为了在至少一个自由度上确定光学元件单元相对于外部参考的位置和/或取向，测量装置包括至少一个测量元件，其中测量元件布置在光学元件单元。

74. 发明申请

US20150295378A1 DEVICE AND METHOD FOR STRETCHING OR COMPRESSING LASER PULSES 有权
标题翻译：用于拉伸或压缩激光脉冲的装置和方法
公开(公告)号：US20150295378A1
公开(公告)日：2015-10-15
申请号：US14682754
申请日：2015-04-09
申请人： Deutsches Elektronen-Synchrotron DESY , GSI Helmholtzzentrum fuer Schwerionenforschung GmbH
发明人： Robert RIEDEL , Franz TAVELLA , Michael SCHULZ , Mark James PRANDOLINI
IPC分类号： H01S3/00 , G02B26/06 , G02B27/09
CPC分类号： H01S3/0057 , G02B26/06 , G02B27/0905 , G02B27/0944 , G02B27/0972 , G02B27/0977 , H01S3/0085
摘要： A laser pulse shaper device includes shaper unit including first dispersive element for spatially separating spectral components of laser pulses, second dispersive element for parallelizing and deflecting spectral components into Fourier plane of dispersive elements, and mirror for back-reflecting of laser pulses via dispersive elements, and light modulator in Fourier plane of dispersive elements, which is capable of modulating spectral components of laser pulses, wherein beam path of shaper unit includes forward beam path from first dispersive element via second dispersive element to mirror and return beam path from mirror via second dispersive element to first dispersive element, and focusing device is arranged at input side of forward beam path before first dispersive element for focusing spatially separated spectral components of laser pulses to Fourier plane of dispersive elements. Furthermore, a method for stretching or compressing laser pulses is described.
摘要翻译：激光脉冲整形器包括整形单元，包括用于空间分离激光脉冲的光谱分量的第一色散元件，用于将光谱分量并行化和偏转到色散元件的傅立叶平面的第二色散元件和用于通过色散元件反射激光脉冲的反射镜，和分散元件的傅立叶平面中的光调制器，其能够调制激光脉冲的光谱分量，其中整形单元的光束路径包括从第一色散元件经由第二色散元件到反射镜的前向光束路径，并且经由第二色散从镜子返回光束路径元件到第一分散元件，并且聚焦装置布置在第一分散元件的前向光束路径的输入侧，用于将激光脉冲的空间分离的光谱分量聚焦到色散元件的傅立叶平面。此外，描述了用于拉伸或压缩激光脉冲的方法。

75. 发明授权

US09151719B2 Inspection apparatus 有权
标题翻译：检验仪器
公开(公告)号：US09151719B2
公开(公告)日：2015-10-06
申请号：US14361657
申请日：2012-11-19
申请人： Hitachi High-Technologies Corporation
发明人： Koichi Taniguchi , Kei Shimura , Sachio Uto
IPC分类号： G01N21/00 , G01N21/95 , G01N21/956 , G02B26/06 , G02B26/08 , G01N21/47
CPC分类号： G01N21/9505 , G01N21/47 , G01N21/4788 , G01N21/95684 , G01N2021/4707 , G02B26/06 , G02B26/0825
摘要： When it is tried to detect a microscopic defect, it is desired that the width of the above-mentioned illuminated region in the minor axis direction should be short. In the related art, although an illuminated region is formed by converging light by some means, it is not easy to form an illuminated region with a narrower width. This is because various aberrations possessed by optical elements themselves used for convergence, aberrations possessed by other optical elements disposed on optical paths, assembly errors, and the like have undesired influence on the formation of linear illumination. In the related art, sufficient consideration has not been paid to the above points. The present invention is characterized in that it includes a system for changing the wavefront of light.
摘要翻译：当试图检测微观缺陷时，期望上述照明区域在短轴方向上的宽度应该较短。在现有技术中，虽然通过某种方式会聚光来形成照明区域，但是不容易形成具有较窄宽度的照明区域。这是因为用于会聚的光学元件本身具有的各种像差，设置在光路上的其他光学元件所具有的像差，组装误差等对线形照明的形成具有不期望的影响。在现有技术中，还没有充分考虑上述几点。本发明的特征在于它包括用于改变光的波前的系统。

76. 发明申请

US20150226963A1 OPTICAL CELL WITH WAVELENGTH COMPENSATOR 有权
标题翻译：具有波长补偿器的光电池
公开(公告)号：US20150226963A1
公开(公告)日：2015-08-13
申请号：US14692201
申请日：2015-04-21
申请人： Finisar Corporation
发明人： Fan Chen , Huiping Li , Jiangtao Zhang , Fahua Lan
IPC分类号： G02B27/00 , G02B27/28 , G02B27/10 , G02B26/00 , G02B26/06
CPC分类号： G02B27/0068 , G02B6/272 , G02B6/2935 , G02B6/29386 , G02B17/023 , G02B26/002 , G02B26/007 , G02B26/06 , G02B27/10 , G02B27/283 , G02B27/286
摘要： An optical cell may include a first port coupled to a second port by an optical path. The optical cell may also include a compensator disposed in the optical path. The compensator may be rotatable about an axis. Rotating the compensator about the axis may vary a distance that the optical path passes through the compensator thereby changing the optical path length of the optical path.
摘要翻译：光学单元可以包括通过光路耦合到第二端口的第一端口。光学单元还可以包括设置在光路中的补偿器。补偿器可以围绕轴线旋转。补偿器围绕轴旋转可以改变光路通过补偿器的距离，从而改变光路的光路长度。

77. 发明授权

US09105978B2 Metamaterial surfaces 有权
标题翻译：超材料表面
公开(公告)号：US09105978B2
公开(公告)日：2015-08-11
申请号：US12925540
申请日：2010-10-22
申请人： Jeffrey A. Bowers , Roderick A. Hyde , Jordin T. Kare , Nathan Kundtz , Bruce Marshall McWilliams , John Brian Pendry , David Schurig , David R. Smith , Anthony F. Starr , Clarence T. Tegreene , Lowell L. Wood, Jr.
发明人： Jeffrey A. Bowers , Roderick A. Hyde , Jordin T. Kare , Nathan Kundtz , Bruce Marshall McWilliams , John Brian Pendry , David Schurig , David R. Smith , Anthony F. Starr , Clarence T. Tegreene , Lowell L. Wood, Jr.
IPC分类号： G02B26/06 , G02B26/08 , G02B1/00 , H01Q15/02 , H01Q15/00 , H01Q15/14 , B82Y20/00
CPC分类号： H01Q15/0066 , B82Y20/00 , G02B1/005 , G02B1/007 , G02B26/06 , G02B26/0816 , H01Q15/002 , H01Q15/14 , H01Q15/148
摘要： An apparatus to modify an incident free space electromagnetic wave includes a block of an artificially structured material having an adjustable spatial distribution of electromagnetic parameters (e.g., ∈, μ, η, σ, and n). A controller applies control signals to dynamically adjust the spatial distribution of electromagnetic parameters in the material to introduce a time-varying path delay d (t) in the modified electromagnetic wave relative to the incident electromagnetic wave.
摘要翻译：修改入射自由空间电磁波的装置包括具有可调节的电磁参数空间分布（例如，∈，μ，＆eegr，＆sgr，和n）的人造结构材料的块。控制器施加控制信号以动态地调整材料中的电磁参数的空间分布，以在修改的电磁波中相对于入射的电磁波引入时变路径延迟d（t）。

78. 发明授权

US09007597B2 Microwave photonic true-time-delay 有权
标题翻译：微波光子实时延时
公开(公告)号：US09007597B2
公开(公告)日：2015-04-14
申请号：US13487416
申请日：2012-06-04
申请人： Ross Schermer , Frank Bucholtz , Carl A. Villarruel
发明人： Ross Schermer , Frank Bucholtz , Carl A. Villarruel
IPC分类号： G01B9/02 , H03H9/30 , H01P9/00 , G02B27/00 , G02B26/10 , G02B27/44 , H03B17/00 , G02B26/06 , G02B27/42
CPC分类号： H04B10/0795 , G01B9/02 , G02B26/06 , G02B26/105 , G02B27/0087 , G02B27/4233 , G02B27/44 , H01P9/00 , H03B17/00 , H03H9/30
摘要： A true time delay system and method for an optical carrier signal modulated with a microwave signal. The system includes a beam deflector, with the optical signal being imaged onto the beam deflector, a stationary reflective diffractive grating arranged in a Littrow configuration, a focusing element arranged between the beam deflector and the stationary reflective diffractive grating. In operation, the beam deflector steers the optical beam across the clear aperture of the focusing element and the focusing element transmits the steered beam to the reflective diffractive grating. A change in optical path length experienced by the optical beam as the beam is scanned across the grating surface results in a relative phase delay in the optical beam. The beam deflector can be a rotating mirror, an acousto-optic beam deflector, or an electro-optic beam deflector. The focusing element can be a lens or a curved mirror.
摘要翻译：用微波信号调制的光载波信号的真时延系统和方法。该系统包括光束偏转器，光信号被成像到光束偏转器上，以Littrow配置布置的固定反射衍射光栅，设置在光束偏转器和固定反射衍射光栅之间的聚焦元件。在操作中，光束偏转器将光束转向穿过聚焦元件的透明孔径，并且聚焦元件将转向光束传输到反射衍射光栅。当光束横跨光栅表面扫描时，光束经历的光程长度的变化导致光束中的相对相位延迟。光束偏转器可以是旋转镜，声光束偏转器或电光束偏转器。聚焦元件可以是透镜或曲面镜。

79. 发明申请

US20150070767A1 VARIABLE WAVELENGTH INTERFERENCE FILTER, OPTICAL MODULE, AND OPTICAL ANALYZER 审中-公开
标题翻译：可变波长干涉滤光片，光学模块和光学分析仪
公开(公告)号：US20150070767A1
公开(公告)日：2015-03-12
申请号：US14540318
申请日：2014-11-13
申请人： Seiko Epson Corporation
发明人： Teruyuki NISHIMURA , Akira SANO
IPC分类号： G02B26/00 , G02B26/06
CPC分类号： G02B26/001 , G01J3/26 , G01J3/50 , G02B26/06
摘要： A variable wavelength interference filter includes: a first reflective film disposed on a face of a first substrate facing a second substrate; a second reflective film disposed on a face of the second substrate facing the first substrate and the first reflective film; a first electrode disposed on the face of the first substrate; and a second electrode disposed on the face of the second substrate. The second substrate includes a movable portion on which the second reflective film is disposed and a connection maintaining portion maintaining the movable portion to be movable in a substrate thickness direction, the connection maintaining portion circumscribes the movable portion and is thinner than the movable portion, and the second electrode is disposed on a portion of the second substrate that is thicker than the connection maintaining portion.
摘要翻译：可变波长干涉滤光器包括：第一反射膜，设置在面向第二基板的第一基板的表面上; 第二反射膜，设置在面对第一基板的第二基板的表面和第一反射膜上; 设置在所述第一基板的表面上的第一电极; 以及设置在第二基板的表面上的第二电极。第二基板包括可移动部分，第二反射膜设置在该可动部分上，连接保持部分保持可动部分在基板厚度方向上可移动，连接保持部分限定可动部分，并且比可动部分薄; 第二电极设置在比连接保持部分厚的第二基板的一部分上。

80. 发明申请

US20150043054A1 ADAPTIVE OPTICS FOR COMBINED PULSE FRONT END PHASE FRONT CONTROL 审中-公开
标题翻译：用于组合脉冲前置相位前置控制的自适应光学
公开(公告)号：US20150043054A1
公开(公告)日：2015-02-12
申请号：US14386396
申请日：2013-03-19
申请人： ISIS INNOVATION LTD
发明人： Martin Booth , Patrick Salter , Richard Simmonds
IPC分类号： H01S3/00 , G02F1/01 , G02B26/06 , G02B27/09
CPC分类号： H01S3/0057 , G01J11/00 , G02B13/22 , G02B26/007 , G02B26/02 , G02B26/06 , G02B26/0816 , G02B26/0825 , G02B26/0833 , G02B26/0841 , G02B27/0068 , G02B27/09 , G02F1/01 , H01S3/10053
摘要： In a method and system for controlling the shape of an optical pulse, the two-dimensional shape of the phase front is controlled using a first control device and the shape of the phase front and the two-dimensional shape of the pulse front is controlled using a second control device. The combined effect on the phase front results in a desired overall phase front control and the second device provides the desired overall pulse front control. This enables the phase front control and pulse front control to be decoupled. Correcting for pulse lengthening of femtosecond laser pulses during focusing by a dispersive lens. The spatially varying phase (72) introduced by the lens can be corrected for by a spatial light modulator like (SLM) a liquid crystal modulator. The spatially varying arrival time at the focus (70) can be compensated for by a deformable mirror (DM). A controller with a feedback loop and pulse characterization in the focus can compensate for the errors introduced by any dispersive focusing means.
摘要翻译：在用于控制光脉冲形状的方法和系统中，使用第一控制装置控制相位前端的二维形状，并且使用相位前沿的形状和脉冲前沿的二维形状来控制第二控制装置。对相位前沿的组合效应导致期望的整体相位前沿控制，并且第二装置提供期望的总体脉冲前沿控制。这使得相位前沿控制和脉冲前沿控制能够解耦。通过色散透镜校正飞秒激光脉冲的脉冲延长。由透镜引入的空间变化相（72）可以通过液晶调制器（SLM）等空间光调制器进行校正。在焦点（70）处的空间变化的到达时间可以由可变形反射镜（DM）补偿。在焦点中具有反馈回路和脉冲表征的控制器可以补偿由任何色散聚焦装置引入的误差。

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