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    • 71. 发明申请
    • Non-Degenerate Mode MEMS Gyroscope
    • 非退化模式MEMS陀螺仪
    • US20120137774A1
    • 2012-06-07
    • US13309511
    • 2011-12-01
    • Michael W. JudyJohn A. GeenHouri Johari-Galle
    • Michael W. JudyJohn A. GeenHouri Johari-Galle
    • G01P3/44H01L41/00
    • G01C19/5698
    • Bulk acoustic wave (BAW) gyroscopes purposefully operate using non-degenerate modes, i.e., resonant frequencies of drive and sense modes are controlled so they are not identical. The resonant frequencies differ by a small controlled amount (Δf). The difference (Δf) is selected such that the loss of sensitivity, as a result of using non-degenerate modes, is modest. Non-degenerate operation can yield better bandwidth and improves signal-to-noise ratio (SNR) over comparable degenerate mode operation. Increasing Q of a BAW resonator facilitates trading bandwidth for increased SNR, thereby providing a combination of bandwidth and SNR that is better than that achievable from degenerate mode devices. In addition, a split electrode configuration facilitates minimizing quadrature errors in BAW resonators.
    • 体声波(BAW)陀螺仪有目的地使用非简并模式操作,即驱动和感测模式的谐振频率被控制,使得它们不相同。 谐振频率以小的受控量(&Dgr; f)不同。 选择差异(&Dgr; f),使得由于使用非退化模式而导致的灵敏度损失是适度的。 非退化操作可以产生更好的带宽,并且可以比比较的退化模式操作提高信噪比(SNR)。 增加BAW谐振器的Q便于交换带宽以提高SNR,从而提供比简并模式设备可实现的带宽和SNR更好的组合。 此外,分裂电极配置有助于最小化BAW谐振器中的正交误差。
    • 72. 发明授权
    • Method for manufacturing elastic wave device
    • 制造弹性波装置的方法
    • US08186030B2
    • 2012-05-29
    • US12537962
    • 2009-08-07
    • Tadashi Nakatani
    • Tadashi Nakatani
    • H01L41/22H01L41/00H04R17/00H05K3/02H05K3/10H02N2/00
    • H03H9/0222H03H3/08H03H9/02818Y10T29/42Y10T29/49155
    • A method for manufacturing an elastic wave device includes forming a lower resist layer on the piezoelectric substrate; forming an upper resist layer on the lower resist layer; patterning the upper and lower resist layers with a developer with respect to which a solubility of the lower resist layer is higher than that of the upper resist layer to form a lower resist pattern and an upper resist pattern on the lower resist pattern so that a periphery of the lower resist pattern lies within a periphery of the upper resist pattern; depositing an electrode material over an entire surface of the piezoelectric substrate that has the upper resist pattern and the lower resist pattern formed thereon; and removing the upper resist pattern and the lower resist pattern to pattern the electrode material, thereby forming a comb-shaped electrode by lift-off.
    • 弹性波装置的制造方法包括在压电基板上形成下层抗蚀剂层; 在下抗蚀剂层上形成上抗蚀剂层; 用显影剂图案化上下抗蚀剂层,下层抗蚀剂层的溶解度高于上抗蚀剂层的溶解度,以在下抗蚀剂图案上形成下抗蚀剂图案和上抗蚀剂图案,使得周边 下抗蚀剂图案位于上抗蚀剂图案的周边内; 在其上形成有上抗蚀剂图案和下抗蚀剂图案的压电基板的整个表面上沉积电极材料; 并且去除上抗蚀剂图案和下抗蚀剂图案以图案化电极材料,从而通过剥离形成梳状电极。
    • 74. 发明申请
    • Multistage Force Amplification of Piezoelectric Stacks
    • 压电堆的多段力扩张
    • US20120119620A1
    • 2012-05-17
    • US13293846
    • 2011-11-10
    • Tian-Bing XUEmilie J. SIOCHILei ZUOXiaoning JIANGJin Ho KANG
    • Tian-Bing XUEmilie J. SIOCHILei ZUOXiaoning JIANGJin Ho KANG
    • H01L41/00
    • H02N2/043H02N2/186
    • Embodiments of the disclosure include an apparatus and methods for using a piezoelectric device, that includes an outer flextensional casing, a first cell and a last cell serially coupled to each other and coupled to the outer flextensional casing such that each cell having a flextensional cell structure and each cell receives an input force and provides an output force that is amplified based on the input force. The apparatus further includes a piezoelectric stack coupled to each cell such that the piezoelectric stack of each cell provides piezoelectric energy based on the output force for each cell. Further, the last cell receives an input force that is the output force from the first cell and the last cell provides an output apparatus force In addition, the piezoelectric energy harvested is based on the output apparatus force. Moreover, the apparatus provides displacement based on the output apparatus force.
    • 本公开的实施例包括一种用于使用压电装置的装置和方法,该装置和方法包括外张力壳体,第一单元和最后一个单元,它们彼此串联连接并耦合到外部弯曲壳体,使得每个单元具有弯曲单元结构 并且每个单元接收输入力并提供基于输入力而被放大的输出力。 该装置还包括耦合到每个单元的压电堆叠,使得每个单元的压电叠层基于每个单元的输出力提供压电能量。 此外,最后一个单元接收作为来自第一单元的输出力的输入力,并且最后一个单元提供输出设备的力。此外,所收集的压电能量基于输出设备的力。 此外,该装置基于输出装置的力提供位移。
    • 76. 发明申请
    • DOME-SHAPED PIEZOELECTRIC LINEAR MOTOR
    • DOME型压电直线电机
    • US20120098388A1
    • 2012-04-26
    • US13380317
    • 2010-06-22
    • Man Sun Yun
    • Man Sun Yun
    • H01L41/00
    • H02N2/025G11B7/0927G11B21/02H01L41/1876H01L41/333
    • The present invention relates to a dome-shaped piezoelectric linear motor, and provides a piezoelectric linear motor having enhanced displacement using dome-shaped piezoelectric ceramic. A dome-shaped piezoelectric linear motor (DSPLM) comprises: a dome-shaped piezoelectric ceramic actuator which has two surfaces applied with different electrodes; a bar-shaped vibration shaft which is vertically fixed at the apex of the dome-shaped piezoelectric ceramic actuator; a cylinder-shaped mobile element which is inserted into the vibration shaft and moves linearly along the vibration shaft; and a ceramic restraining element which is fixed at a lower edge portion of the dome-shaped piezoelectric ceramic actuator. Therefore, the vibration displacement in the direction of the vibration shaft is increased when compared to the vibration displacement in the thickness direction of planar piezoelectric ceramic.
    • 圆顶型压电线性电动机技术领域本发明涉及一种圆顶状压电线性电动机,提供一种使用圆顶型压电陶瓷具有增强的位移的压电线性电动 圆顶形压电线性电动机(DSPLM)包括:圆顶形压电陶瓷致动器,其具有施加有不同电极的两个表面; 垂直固定在圆顶状压电陶瓷致动器的顶点的棒状振动轴; 圆筒状的移动体,其插入到振动轴中并沿着振动轴线性移动; 以及陶瓷抑制元件,其固定在圆顶形压电陶瓷致动器的下边缘部分。 因此,与平面型压电陶瓷的厚度方向的振动位移相比,振动轴方向的振动位移增大。
    • 77. 发明授权
    • Method of manufacturing crystal element and crystal resonator manufactured thereby
    • 由此制造晶体元件和晶体谐振器的方法
    • US08125283B2
    • 2012-02-28
    • US12803062
    • 2010-06-18
    • Takehiro Takahashi
    • Takehiro Takahashi
    • H01L41/00H03B5/32
    • H03H3/04H03H2003/0478
    • A crystal element manufacturing method for manufacturing a plurality of crystal elements at a wafer level and a crystal resonator is provided. The method provides that when the frequencies of the crystal elements are adjusted by adjusting the thickness of a crystal wafer that constitutes the crystal element in two stages by partial wet etching, the thicknesses of a large number of the step sections are coarse-adjusted in a first stage by collectively subjecting the step sections to partial wet etching, and then variations in the thicknesses of each group of a small number of the step sections are fine-adjusted in a second stage by collectively subjecting the step sections to partial wet etching.
    • 提供了一种用于在晶片级制造多个晶体元件的晶体元件制造方法和晶体谐振器。 该方法提供了当通过部分湿蚀刻在两个阶段中调整构成晶体元件的晶体晶片的厚度来调节晶体元件的频率时,大量阶梯部分的厚度在 第一阶段通过对台阶部进行部分湿法蚀刻,然后通过共同对台阶部进行部分湿蚀刻,在第二阶段中对少量台阶部分的各组的厚度进行微调。
    • 80. 发明授权
    • Foreign substance removing apparatus
    • 异物清除装置
    • US08075143B2
    • 2011-12-13
    • US11682419
    • 2007-03-06
    • Kosuke Fujimoto
    • Kosuke Fujimoto
    • G02B7/00G02B26/00H01L41/00
    • H04N1/1013H04N1/00909
    • A foreign substance removing apparatus that can provide the desired vibration amplitude to a light transmitting member, without using a large driving voltage. The foreign substance removing apparatus removes foreign substances adhered to a surface of an optical member disposed in a light ray incident path and includes a piezoelectric element fixed to a first plane of the optical member, a circular disk fixed to a second plane, opposite from the first plane, of the optical member so as to face the piezoelectric element, and a driving unit for applying an AC voltage to the piezoelectric element to cause the optical member to elastically vibrate in a direction perpendicular to the planes thereof, thereby removing the foreign substances adhered to the surface of the optical member.
    • 可以在不使用大的驱动电压的情况下,向透光部件提供期望的振动振幅的异物去除装置。 异物除去装置除去附着在配置在光线入射路径中的光学构件表面的异物,并且包括固定在光学构件的第一平面上的压电元件,与第二平面相对的圆盘 光学构件的第一平面和压电元件的面对面;以及用于向压电元件施加交流电压以使光学构件沿与其平面垂直的方向弹性振动的驱动单元,从而去除异物 粘附到光学构件的表面。