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    • 7. 发明申请
    • ELASTIC WAVE ELEMENT WITH INTERDIGITAL TRANSDUCER ELECTRODE
    • 带数字传感器电极的弹性波形元件
    • US20150333731A1
    • 2015-11-19
    • US14809994
    • 2015-07-27
    • SKYWORKS PANASONIC FILTER SOLUTIONS JAPAN CO., LTD.
    • Tomoya KomatsuHiroyuki NakamuraTetsuya TsurunariJoji FujiwaraHidekazu Nakanishi
    • H03H9/25
    • H03H9/25H01L41/047H03H9/02818H03H9/02992
    • An elastic wave device includes an interdigital transducer (IDT) electrode in contact with a piezoelectric substrate having a bus bar electrode region including one of a first bus bar electrode and a second bus bar electrode of the IDT electrode, an alternately disposed region where first electrode fingers are alternately disposed with second electrode fingers of the IDT electrode, and an intermediate region including one of the first electrode fingers and the second electrode fingers. A dielectric film is formed in at least part of the intermediate region and in contact with an upper surface of the IDT electrode. The dielectric film includes a medium in which an acoustic velocity of a transverse wave propagating in the dielectric film is lower than an acoustic velocity of a main elastic wave of the alternately disposed region. The dielectric film is not formed in the alternately disposed region.
    • 弹性波装置包括与具有包括IDT电极的第一汇流条电极和第二汇流条电极之一的汇流条电极区域的压电基板相接触的指数间换能器(IDT)电极,交替设置的区域,其中第一电极 手指交替地设置有IDT电极的第二电极指,以及包括第一电极指和第二电极指中的一个的中间区。 电介质膜形成在中间区域的至少一部分中并与IDT电极的上表面接触。 电介质膜包括其中在电介质膜中传播的横波的声速低于交替设置区域的主弹性波的声速的介质。 电介质膜不形成在交替设置的区域中。