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    • 1. 发明授权
    • Detector assembly for use in environments containing background magnetic noise and method thereof
    • 用于包含背景磁噪声的环境的检测器组件及其方法
    • US08249820B2
    • 2012-08-21
    • US12829712
    • 2010-07-02
    • Alan S. Edelstein
    • Alan S. Edelstein
    • G01R23/16
    • G01V3/081
    • A method and system for detecting a signal source at a specified frequency in the presence of background noise includes a processor; a first sensor mounted at a first location operatively connected to the processor; a second sensor mounted at a second location operatively connected to the processor; the processor operating to compute the amplitudes of the first and second Fourier transforms of the outputs of the first and second sensors, respectively, the difference in the amplitudes of the first and second Fourier transforms being determinative of the existence of a signal being generated at the predetermined frequency.
    • 用于在存在背景噪声的情况下以指定频率检测信号源的方法和系统包括处理器; 安装在可操作地连接到处理器的第一位置的第一传感器; 安装在可操作地连接到所述处理器的第二位置处的第二传感器; 所述处理器分别操作以计算所述第一和第二传感器的输出的第一和第二傅里叶变换的幅度,所述第一和第二傅立叶变换的幅度差决定于在所述第一和第二传感器处产生的信号的存在 预定频率。
    • 2. 发明授权
    • MEMS structure support and release mechanism
    • MEMS结构支持和释放机制
    • US07655996B1
    • 2010-02-02
    • US11345542
    • 2006-02-02
    • Alan S. Edelstein
    • Alan S. Edelstein
    • H01L29/84
    • G01P15/08B81C1/00896G01P15/0802G01P15/125
    • A MEMS device and method comprising a MEMS structure adjacent to a SOI base; a sacrificial support operatively connecting the base to the MEMS structure; a suspension member operatively connecting the base to the MEMS structure, wherein the suspension member is longer than the sacrificial support; and an electrode operatively connected to the base. The device may further comprise a current pulse generator adapted to send a current pulse through the sacrificial support, wherein the current pulse causes the sacrificial support to detach from the MEMS structure. Moreover, the sacrificial support structures may be electrically resistive.
    • 一种MEMS器件和方法,包括与SOI基底相邻的MEMS结构; 将基座可操作地连接到MEMS结构的牺牲支撑件; 悬架构件,其将所述底座可操作地连接到所述MEMS结构,其中所述悬挂构件比所述牺牲支撑件长; 以及可操作地连接到基座的电极。 器件还可以包括电流脉冲发生器,其适于通过牺牲支撑件发送电流脉冲,其中电流脉冲使得牺牲支撑件与MEMS结构分离。 此外,牺牲支撑结构可以是电阻的。
    • 3. 发明授权
    • Minimizing the effect of 1/ƒ noise with a MEMS flux concentrator
    • 最小化MEMS通量集中器1 / f噪声的影响
    • US07195945B1
    • 2007-03-27
    • US11226403
    • 2005-09-15
    • Alan S. EdelsteinJeffrey S. PulskampMichael Pedersen
    • Alan S. EdelsteinJeffrey S. PulskampMichael Pedersen
    • H01L21/00
    • G01R33/093B82Y25/00G01R33/095
    • A method of fabricating a MEMS device includes forming a magnetic sensor over a SOI wafer which may include an epoxy layer; forming a pair of MEMS flux concentrators sandwiching the magnetic sensor; connecting an electrostatic comb drive to each of the flux concentrators; connecting a spring to the flux concentrators and the comb drive; performing a plurality of DRIE processes on the SOI wafer; and releasing the flux concentrators, the comb drive, and the spring from the SOI wafer. Another embodiment includes forming adhesive bumps and a magnetic sensor on a first wafer; forming a second wafer; forming a pair of MEMS flux concentrators, a pair of electrostatic comb drives, and at least one spring on the second wafer; bonding the second wafer to the adhesive bumps; and compressing the adhesive bumps using non-thermal means such as pressure only.
    • 制造MEMS器件的方法包括在可包括环氧树脂层的SOI晶片上形成磁传感器; 形成夹着磁传感器的一对MEMS通量集中器; 将静电梳驱动器连接到每个通量集中器; 将弹簧连接到磁通集中器和梳齿驱动器; 在SOI晶片上执行多个DRIE处理; 并从SOI晶片释放集流器,梳状驱动器和弹簧。 另一实施例包括在第一晶片上形成粘合剂凸块和磁传感器; 形成第二晶片; 形成一对MEMS通量集中器,一对静电梳状驱动器和在第二晶片上的至少一个弹簧; 将第二晶片接合到粘合剂凸块; 并使用诸如仅压力的非热装置压缩粘合剂凸块。
    • 4. 发明授权
    • Magnetic sensor with modulating flux concentrator having minimized air resistance for 1/f noise reduction
    • 具有调节通量集中器的磁传感器具有最小的空气阻力,可降低1 / f噪声
    • US06670809B1
    • 2003-12-30
    • US10135392
    • 2002-05-01
    • Alan S. EdelsteinDavid Hull
    • Alan S. EdelsteinDavid Hull
    • G01R3302
    • G01R33/02G01R33/0286Y10S977/838Y10S977/96
    • A magnetic sensing transducer device that senses low frequency magnetic fields by using flux concentrators that modulate the observed low frequency signal, thereby shifting this observed signal to higher frequencies and minimizing 1/f-type noise. This is accomplished by the oscillatory motion of a microelectromechanical (MEMS)-type magnetic flux concentrator operated with a magnetic sensor, preferably made on a common substrate. Such a combined device can be used in a magnetometer. Such a device is small, low-cost and has low-power-consumption requirements. The magnetic sensor can be a Hall effect or other type of magnetic sensor. At least one MEMS-type fabricated flux concentrator is used with the magnetic sensor. The concentrator oscillates at a modulation frequency much greater than the observed magnetic field being sensed by the device.
    • 一种磁感测传感器装置,其通过使用调制观察到的低频信号的磁通集中器来感测低频磁场,从而将该观测信号转换为较高频率并使1 / f型噪声最小化。 这是通过用优选在公共衬底上制造的磁传感器操作的微机电(MEMS)型磁通集中器的振荡运动来实现的。 这种组合装置可用于磁强计。 这种设备体积小,成本低,功耗低。 磁传感器可以是霍尔效应或其他类型的磁传感器。 与磁传感器一起使用至少一个MEMS型制造的磁通集中器。 集中器以比设备感测到的观察到的磁场大得多的调制频率振荡。
    • 5. 发明授权
    • Oxidation resistant copper
    • 耐氧化铜
    • US5639318A
    • 1997-06-17
    • US519007
    • 1995-08-24
    • Alan S. EdelsteinForrest H. KaatzVincent G. Harris
    • Alan S. EdelsteinForrest H. KaatzVincent G. Harris
    • B22F9/22C22C1/04H01B1/02B22F9/24
    • H01B1/026B22F9/22C22C1/0425Y10S977/777
    • Oxidation resistant particles composed of copper and at least one metal hng a valence of +2 or +3 and having an intermediate lattice energy for the metal in its hydroxide form. The metal is selected from nickel, cobalt, iron, manganese, cadmium, zinc, tin, magnesium, calcium and chromium. In one embodiment, the phases of copper and at least one metal in the particles are separate and the concentration of the metal is greater near the surface of the particles than inwardly thereof. Process for making the oxidation resistant copper particles includes the steps of dissolving a copper salt and a salt of at least one of the metals in a suitable solvent or diluent; forming primary particles of copper and at least one metal in basic form by mixing a base and the salt solution; separating, washing and drying the primary particles; reducing the primary particles to metallic form; and heat treating the particles in metallic form at an elevated temperature.
    • 由铜和至少一种价态为+2或+3的金属组成的具有中间晶格能的金属氧化物形式的耐氧化颗粒。 金属选自镍,钴,铁,锰,镉,锌,锡,镁,钙和铬。 在一个实施方案中,铜和颗粒中的至少一种金属的相分离,并且在颗粒表面附近的金属浓度比其内部更浓。 制造抗氧化铜颗粒的方法包括将铜盐和至少一种金属的盐溶解在合适的溶剂或稀释剂中的步骤; 通过混合碱和盐溶液形成铜和至少一种碱性形式的初级颗粒; 分离,洗涤和干燥初级颗粒; 将初级粒子还原为金属形式; 并在升高的温度下以金属形式热处理颗粒。
    • 9. 发明申请
    • MEMS NOTCH FILTER AND METHOD
    • MEMS凹槽过滤器和方法
    • US20120062339A1
    • 2012-03-15
    • US12343906
    • 2008-12-24
    • Alan S. Edelstein
    • Alan S. Edelstein
    • H03H9/02H01R43/00
    • H03H9/462Y10T29/49117
    • A MEMS notch filter comprises a frame; a movable mass; resilient members connecting the mass to the frame; electrodes connected to the frame; and a comb drive connected to the frame and the mass which operates to drive the mass, wherein the filter is adapted to oscillate at least one resonant frequency. A mechanism is positioned below the mass, wherein the mechanism is adapted to maintain a neutral position of the mass and to expel fluid onto the mass. The comb drive is adapted to receive an applied voltage signal from the electrodes. This voltage signal is applied to the comb drive at a resonant frequency of the notch filter and induces the mass to oscillate in a geometric plane of the frame (or optionally in some other resonant mode); resulting in dissipation of energy and voltage attenuation. Other voltage components not at the notch frequency are not attenuated.
    • MEMS陷波滤波器包括一个框架; 移动体; 将质量件连接到框架的弹性构件; 连接到框架的电极; 以及连接到所述框架的组合驱动器和用于驱动所述质量块的所述质量块,其中所述滤波器适于振荡至少一个谐振频率。 机构位于质量下方,其中机构适于保持质量的中性位置并将流体排出到质量块上。 梳状驱动器适于从电极接收施加的电压信号。 该电压信号以陷波滤波器的谐振频率施加到梳状驱动器,并且引导质量在框架的几何平面中振荡(或者可选地以某种其它谐振模式)振荡。 导致能量和电压衰减的耗散。 不在陷波频率的其他电压分量不衰减。