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1. 发明授权

US11635449B2 Nanoscale dynamic mechanical analysis via atomic force microscopy (AFM-nDMA) 有权
公开(公告)号：US11635449B2
公开(公告)日：2023-04-25
申请号：US17722603
申请日：2022-04-18
申请人： BRUKER NANO, INC.
发明人： Sergey Osechinskiy , Anthonius Ruiter , Bede Pittenger , Syed-Asif Syed-Amanulla
IPC分类号： G01Q60/38 , G01Q10/04 , G01Q20/04 , G01Q30/04 , B82Y35/00
摘要： An atomic-force-microscope-based apparatus and method including hardware and software, configured to collect, in a dynamic fashion, and analyze data representing mechanical properties of soft materials on a nanoscale, to map viscoelastic properties of a soft-material sample. The use of the apparatus as an addition to the existing atomic-force microscope device.

2. 发明申请

US20230030991A1 METHOD OF IMAGING A SURFACE USING A SCANNING PROBE MICROSCOPE 有权
公开(公告)号：US20230030991A1
公开(公告)日：2023-02-02
申请号：US17767861
申请日：2020-10-23
申请人： INFINITESIMA LIMITED
发明人： Andrew Humphris
IPC分类号： G01Q20/02 , G01Q10/04 , G01Q10/06 , G01Q30/06 , G01Q40/00
摘要： A method includes scanning a probe laterally across a surface so that the probe follows a scanning motion across the surface and steering a detection beam onto the probe via a steering mirror, the detection beam reflecting from the probe in the form of a return beam. The method also includes moving the steering mirror so that the detection beam follows a tracking motion which is synchronous with the scanning motion and the detection beam remains steered onto the probe by the steering mirror and using the return beam to obtain image measurements, each indicative of a measured height of a respective point on the surface. An associated height error measurement is obtained for each point on the surface, each measurement being indicative of a respective error in the measured height. The height error measurements are used to correct the image measurements so as to generate corrected image measurements.

3. 发明授权

US11430647B2 Systems and approaches for semiconductor metrology and surface analysis using Secondary Ion Mass Spectrometry 有权
公开(公告)号：US11430647B2
公开(公告)日：2022-08-30
申请号：US17164499
申请日：2021-02-01
申请人： NOVA MEASURING INSTRUMENTS INC.
发明人： David A. Reed , Bruno W. Schueler , Bruce H. Newcome , Rodney Smedt , Chris Bevis
IPC分类号： H01J49/14 , H01L21/66 , H01J49/12 , G01N23/2258 , G01N23/22 , G01Q10/04 , H01J49/26
摘要： Systems and approaches for semiconductor metrology and surface analysis using Secondary Ion Mass Spectrometry (SIMS) are disclosed. In an example, a secondary ion mass spectrometry (SIMS) system includes a sample stage. A primary ion beam is directed to the sample stage. An extraction lens is directed at the sample stage. The extraction lens is configured to provide a low extraction field for secondary ions emitted from a sample on the sample stage. A magnetic sector spectrograph is coupled to the extraction lens along an optical path of the SIMS system. The magnetic sector spectrograph includes an electrostatic analyzer (ESA) coupled to a magnetic sector analyzer (MSA).

4. 发明申请

US20220244287A1 Arrangement Having a Measuring Apparatus for a Scanning Probe Microscope, Scanning Probe Microscope, and Method for Operating 有权
公开(公告)号：US20220244287A1
公开(公告)日：2022-08-04
申请号：US17620375
申请日：2020-06-18
申请人： Bruker Nano GmbH
发明人： Torsten Jahnke , Frederik Büchau-Vender , Marian Schücker
IPC分类号： G01Q10/04 , G01Q70/04
摘要： The invention relates to an arrangement having a measuring apparatus for a scanning probe microscope, comprising: a sample receptacle, which is designed to receive a measurement sample for an examination by scanning probe microscopy; a measuring probe, which is received on a probe holder; a relocating device, which has a drive and is designed to relocate the sample receptacle and the probe holder having the measuring probe relative to each another by means of the drive for the examination by scanning probe microscopy; and an active counterweight device having a counterweight and a drive device associated with the counterweight, the active counterweight device being designed to move the counterweight during the measuring operation by means of the drive device, counter to the movement of the probe holder having the measuring probe. The invention furthermore relates to a method for operating the arrangement.

5. 发明授权

US11346856B2 Scanning probe microscope and optical axis adjustment method in scanning probe microscope 有权
公开(公告)号：US11346856B2
公开(公告)日：2022-05-31
申请号：US17133847
申请日：2020-12-24
申请人： Shimadzu Corporation
发明人： Kenji Yamasaki
IPC分类号： G01Q20/02 , G01Q10/04
摘要： It is intended to save time for adjusting a position of a detection unit. In a position adjustment process of a detector, a control device moves the detector obliquely with respect to a boundary line partitioning photodiodes on a plane on which the detector moves and moves the detector so that the position of the center of gravity of a spot of a laser beam and the center of a light-receiving surface coincide in response to the incident of at least a part of the laser beam on the light-receiving surface.

6. 发明授权

US11087952B2 Linear structure for displacement transmission, and one-dimensional and three-dimensional micro movement device using same 有权
公开(公告)号：US11087952B2
公开(公告)日：2021-08-10
申请号：US16067564
申请日：2016-12-29
申请人： KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
发明人： Dal Hyun Kim , Byong Chon Park , Chae Ho Shin
IPC分类号： H01J37/20 , H01L41/00 , G01Q10/04 , H02N2/02 , H02N2/04 , G02B21/26
摘要： Provided is a linear structure for displacement transmission that can be bent in a second direction or a third direction when force in the second direction or the third direction is applied and can transmit a displacement in a first direction from an end of one side to an end of the other side when force in the first direction is applied. The linear structure includes a displacement transmission plate and a plurality of displacement transmission rods disposed radially on the displacement transmission plate to transmit the displacement in the first direction from the end of one side to the end of the other side.

7. 发明授权

US10928418B2 Scanning probe microscope 有权
公开(公告)号：US10928418B2
公开(公告)日：2021-02-23
申请号：US16626969
申请日：2018-06-28
申请人： INFINITESIMA LIMITED
发明人： Andrew Humphris , David Gray
IPC分类号： G01Q20/02 , G01Q10/00 , G01Q40/00 , G01Q10/04 , G01Q10/06
摘要： A scanning probe microscope with a first actuator (3) configured to move a feature in the form of a tip (2) so that the feature follows a scanning motion. A vision system (10) is configured to collect light from a field of view to generate image data. The field of view includes the feature and the light from the field of view travels from the feature to the vision system via the steering element (13). A tracking control system (15)bis configured to generate one or more tracking drive signals in accordance with stored reference data. A second actuator (14) is configured to receive the one or more tracking drive signals and move the steering element on the basis of the one or more tracking drive signals so that the field of view follows a tracking motion which is synchronous with the scanning motion and the feature remains within the field of view. An image analysis system (20) is configured to analyse the image data from the vision system to identify the feature and measure an apparent motion of the feature relative to the field of view. A calibration system is configured to adjust the stored reference data based on the apparent motion measured by the image analysis system.

8. 发明授权

US10910208B2 Systems and approaches for semiconductor metrology and surface analysis using secondary ion mass spectrometry 有权
公开(公告)号：US10910208B2
公开(公告)日：2021-02-02
申请号：US16856940
申请日：2020-04-23
申请人： NOVA MEASURING INSTRUMENTS INC.
发明人： David A. Reed , Bruno W. Schueler , Bruce H. Newcome , Rodney Smedt , Chris Bevis
IPC分类号： H01J49/14 , H01L21/66 , H01J49/12 , G01N23/22 , G01Q10/04 , H01J49/26
摘要： Systems and approaches for semiconductor metrology and surface analysis using Secondary Ion Mass Spectrometry (SIMS) are disclosed. In an example, a secondary ion mass spectrometry (SIMS) system includes a sample stage. A primary ion beam is directed to the sample stage. An extraction lens is directed at the sample stage. The extraction lens is configured to provide a low extraction field for secondary ions emitted from a sample on the sample stage. A magnetic sector spectrograph is coupled to the extraction lens along an optical path of the SIMS system. The magnetic sector spectrograph includes an electrostatic analyzer (ESA) coupled to a magnetic sector analyzer (MSA).

9. 发明授权

US10890427B2 Nozzle inspection method and apparatus 有权
公开(公告)号：US10890427B2
公开(公告)日：2021-01-12
申请号：US16116835
申请日：2018-08-29
申请人： SUGINO MACHINE LIMITED
发明人： Hiroki Haremaki
IPC分类号： G01B5/008 , B05B15/555 , B08B3/04 , B08B9/049 , G01Q10/04 , G01Q70/02 , B08B5/02 , G01B5/20 , B08B3/02 , G01N35/10
摘要： A method for inspecting a nozzle includes producing a jet from the nozzle, moving the nozzle to cause the jet to approach a stylus of a touch probe, generating a contact signal under a force acting on the stylus, and determining that the jet is appropriate in response to a contact signal received first after the jet has an axis at a distance from the stylus that is equal to or less than a first normal distance calculated from a normal jet shape.

10. 发明授权

US10712364B2 Metrology devices for rapid specimen setup 有权
公开(公告)号：US10712364B2
公开(公告)日：2020-07-14
申请号：US15773327
申请日：2016-11-03
申请人： BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM
发明人： Michael Cullinan , Tsung-Fu Yao , Andrew Duenner
IPC分类号： G01Q10/00 , G01Q30/00 , G12B5/00 , G01Q10/04 , G01Q60/24
摘要： An example metrology device can include a first stage including a microelectromechanical (MEMS) device having a probe, and a second stage configured to hold a sample. The metrology device can also include a kinematic coupler for constraining the first stage in a fixed position relative to the second stage. The probe of the MEMS device can be aligned with a portion of the sample when the first stage is constrained in the fixed position relative to the second stage.

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