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1. 发明申请

US20110090508A1 DEVICE AND METHOD FOR INTERFEROMETRIC VIBRATION MEASUREMENT OF AN OBJECT 有权
标题翻译：物体的非线性振动测量装置和方法
公开(公告)号：US20110090508A1
公开(公告)日：2011-04-21
申请号：US12907117
申请日：2010-10-19
申请人： Christian Rembe , Alexander Drabenstedt , Michael Gartner , Mike Herberich , Andreas Leonhardt
发明人： Christian Rembe , Alexander Drabenstedt , Michael Gartner , Mike Herberich , Andreas Leonhardt
IPC分类号： G01B9/02 , G01H9/00
CPC分类号： G01H9/00
摘要： A device for interferometric vibration measurement on an object (8), having a radiation source (1) for generating an original beam, a first beam splitter for dividing the original beam into a measuring beam and a reference beam (4, 5), a detector (10) and a focusing device (9). The device is implemented in such a way that the measuring beam at least partly reflected by the object and the reference beam are superimposed on a detection area of the detector, and the focusing device is arranged in the beam path of the measuring beam for focusing the measuring beam onto a measuring point (7) on the object. It is important that, by using the device, a measuring beam having a wavelength greater than 1100 nm can be generated and that the device additionally has an image unit (12) for two-dimensional imaging of at least a sub-region of the object surrounding the measuring point. The focusing device is arranged in the beam path between image unit and object and being constructed such that the focus of the measuring beam lies approximately in the focal plane of the image unit and, by use of the focusing device, the focal point of the measuring beam and the focal plane of the imaging unit are displaceable simultaneously. A method for interferometric vibration measurement on an object using the device is also provided.
摘要翻译：一种用于在物体（8）上进行干涉测量的装置，具有用于产生原始光束的辐射源（1），用于将原始光束分成测量光束的第一分束器和参考光束（4,5），检测器（10）和聚焦装置（9）。该装置的实现方式是将至少部分地由物体和参考光束反射的测量光束叠加在检测器的检测区域上，并且聚焦装置布置在测量光束的光束路径中，以便聚焦测量光束到物体上的测量点（7）上。重要的是，通过使用该装置，可以产生波长大于1100nm的测量束，并且该装置还具有用于对象的至少一个子区域的二维成像的图像单元（12）围绕测量点。聚焦装置布置在图像单元和物体之间的光束路径中，并且被构造成使得测量光束的焦点大致位于图像单元的焦平面中，并且通过使用聚焦装置，测量的焦点光束和成像单元的焦平面可同时移位。还提供了一种使用该装置对物体进行干涉测量的方法。

2. 发明授权

US07852487B2 Heterodyne interferometer device for optically measuring an object 有权
标题翻译：用于光学测量物体的异步干涉仪装置
公开(公告)号：US07852487B2
公开(公告)日：2010-12-14
申请号：US12040030
申请日：2008-02-29
申请人： Christian Rembe , Alexander Drabenstedt , Georg Siegmund
发明人： Christian Rembe , Alexander Drabenstedt , Georg Siegmund
IPC分类号： G01B9/02
CPC分类号： G01B9/02027 , G01B9/02002 , G01B9/02042 , G01B9/02045 , G01B9/0209 , G01B9/02091 , G01B2290/45
摘要： A device for the optic measuring of an object (1), including a signal processing unit (2) as well as an interferometer with a light source (3) and with at least one detector (4a, 4d). The interferometer is embodied such that a light beam (12) created by the light source (3) is split at least into a working beam (12a) and a reference beam (12b), with the working beam (12a) impinging the object (1) and the working beam (12a) is at least partially reflected by the object and interfered with the reference beam (12b) on the detector (4a, 4b). The signal processing unit (2) is connected to the detector (4a, 4b) and includes a vibrometer processing unit (2f), which detects the motion of the object (1) from the measuring signals of the detector (4a, 4d). It is essential that the light source (3) creates light with a coherence length shorter than 1 cm and that the interferometer comprises a device for changing the optic path length (11), and the signal processing unit comprises a focus control (2d) controlling a device for changing the optic path length which controls the device for changing the optic path length such that the optic path length of the working beam and the reference beam are approximately adjusted to each other.
摘要翻译：一种用于物体（1）的光学测量的装置，包括信号处理单元（2）以及具有光源（3）和至少一个检测器（4a，4d）的干涉仪。干涉仪被实施为使得由光源（3）产生的光束（12）至少分裂成工作光束（12a）和参考光束（12b），工作光束（12a）撞击物体（ 1），并且工作光束（12a）至少部分地被物体反射并且与检测器（4a，4b）上的参考光束（12b）干涉。信号处理单元（2）连接到检测器（4a，4b），并包括一个根据检测器（4a，4d）的测量信号检测物体（1）运动的振动计处理单元（2f）。重要的是，光源（3）产生具有短于1cm的相干长度的光，并且干涉仪包括用于改变光路长度（11）的装置，并且信号处理单元包括控制用于改变光路长度的装置，其控制用于改变光路长度的装置，使得工作光束和参考光束的光路长度彼此近似调整。

3. 发明授权

US07663764B2 Measuring device and method to optically measure an object 有权
标题翻译：用于光学测量物体的测量装置和方法
公开(公告)号：US07663764B2
公开(公告)日：2010-02-16
申请号：US11627124
申请日：2007-01-25
申请人： Christian Rembe
发明人： Christian Rembe
IPC分类号： G01B9/02
CPC分类号： G01B9/02012 , G01B9/02003 , G01B9/02069 , G01B2290/70 , G01S7/491 , G01S17/08 , G01S17/50
摘要： A measuring device for the optic measuring of an object 13a is provided, in particular for measuring a motion of the object. The device includes an interferometer 20 with a measuring beam exit 12, a reflection beam entry 14, an interfering beam exit 15, and a light source 1 for creating a light beam 8, an optic detector 16, which is arranged at the interfering beam exit 15 of the interferometer 20 such that a light beam exiting the interfering beam exit 15 impinges the detector and a signal processing unit 17 connected to the detector 16 being embodied such that they can measure measuring signals of the detector 16. The interferometer (20) is provided with a switched beam entry (18) and is embodied such that dependent on a switching signal connected to a switched beam entry (18) a light beam exits the measuring beam exit (12) essentially with a predetermined light intensity and at a predetermined angle, and that the signal processing unit (17) is provided with a switched beam exit, which is connected to the switched beam entry (18) of the interferometer, with the signal processing unit (17) controlling the interferometer such that a light beam exits the measuring beam exit (12) only during the measuring of measuring signals essentially with a predetermined light intensity and at a predetermined angle.
摘要翻译：提供了用于物体13a的光学测量的测量装置，特别是用于测量物体的运动。该装置包括具有测量光束出射12的干涉仪20，反射光束入口14，干涉光束出口15和用于产生光束8的光源1，光学检测器16，布置在干涉光束出射处 15，使得离开干扰光束出射口15的光束撞击检测器，并且实现与检测器16连接的信号处理单元17，使得它们可以测量检测器16的测量信号。干涉仪（20）是设置有切换光束入口（18）并且被实施为使得取决于连接到切换光束入口（18）的切换信号，光束基本上以预定的光强度并以预定角度离开测量光束出口（12）并且信号处理单元（17）设置有切换光束出口，其连接到干涉仪的切换光束入口（18），信号处理单元（17）控制i 使得光束仅在基本上以预定的光强度和预定角度测量测量信号期间光束离开测量光束出口（12）。

4. 发明授权

US08913247B2 Device and method for interferometric vibration measurement of an object 有权
标题翻译：物体的干涉振动测量装置及方法
公开(公告)号：US08913247B2
公开(公告)日：2014-12-16
申请号：US12907117
申请日：2010-10-19
申请人： Christian Rembe , Alexander Dräbenstedt , Michael Gartner , Mike Herberich , Andreas Leonhardt
发明人： Christian Rembe , Alexander Dräbenstedt , Michael Gartner , Mike Herberich , Andreas Leonhardt
IPC分类号： G01B9/02 , G01C3/08 , G01P3/36 , G01H9/00
CPC分类号： G01H9/00
摘要： A device for interferometric vibration measurement, having a radiation source for generating an original beam, a first beam splitter for dividing it into measuring and reference beams, a detector and a focusing device. The measuring beam at least partly reflected by the object and the reference beam are superimposed on a detection area of the detector, and the focusing device in the beam path of the measuring beam between the image unit and object focuses it onto a measuring point. Here, a measuring beam having a wavelength greater than 1100 nm is generated and the device has an image unit for two-dimensional imaging of the object surrounding the measuring point. The measuring beam focus lies in the focal plane of the image unit and, by use of the focusing device, the focal point of the measuring beam and the focal plane of the imaging unit are displaceable simultaneously.
摘要翻译：一种用于干涉测量的装置，具有用于产生原始光束的辐射源，用于将其分为测量和参考光束的第一分束器，检测器和聚焦装置。由物体和参考光束至少部分地反射的测量光束被叠加在检测器的检测区域上，并且在图像单元和物体之间的测量光束的光束路径中的聚焦装置将其聚焦到测量点上。这里，产生波长大于1100nm的测量光束，并且该装置具有用于围绕测量点的物体二维成像的图像单元。测量光束聚焦位于图像单元的焦平面中，并且通过使用聚焦装置，测量光束的焦点和成像单元的焦平面可以同时移位。

5. 发明授权

US07443513B2 Apparatus for optical measurement of an object 有权
标题翻译：用于物体光学测量的装置
公开(公告)号：US07443513B2
公开(公告)日：2008-10-28
申请号：US11136866
申请日：2005-05-25
申请人： Christian Rembe
发明人： Christian Rembe
IPC分类号： G01D5/32 , G01B11/02
CPC分类号： G02B21/006 , G02B21/0056 , G02B21/245
摘要： An apparatus for optical measurement of an object, especially for measuring movement, is provided, which includes an interferometer for measuring movements along the measurement beam of the interferometer, as well as a confocal auto-focus microscope. The interferometer is coupled in the beam path of the confocal auto-focus microscope, such that the measurement beam of the interferometer is simultaneously the focusing beam of the microscope. Here, it is guaranteed that the interferometric movement measurement is always performed at the focal point of the microscope that is used. This enables automatic correction of the Guoy effect for objectives with high numerical aperture. In addition, for the use of a scanning confocal auto-focus microscope, data sets of test objects can also be measured, which comprise their vibrational behavior, height profile, and optionally also their in-plane movement behavior.
摘要翻译：提供了一种用于物体的光学测量的装置，特别是用于测量运动的装置，其包括用于测量沿着干涉仪的测量光束的运动的干涉仪以及共聚焦自动对焦显微镜。干涉仪耦合在共焦自动对焦显微镜的光束路径中，使得干涉仪的测量光束同时是显微镜的聚焦光束。这里，确保干涉测量运动测量始终在使用的显微镜的焦点处进行。这使得能够自动校正具有高数值孔径的物镜的国际效应。此外，对于使用扫描共聚焦自动对焦显微镜，也可以测量测试对象的数据集，其包括它们的振动特性，高度分布以及可选的其平面内移动行为。

6. 发明授权

US08115933B2 Interferometer for optically measuring an object 有权
标题翻译：用于光学测量物体的干涉仪
公开(公告)号：US08115933B2
公开(公告)日：2012-02-14
申请号：US12768979
申请日：2010-04-28
申请人： Christian Rembe , Tobias Haist
发明人： Christian Rembe , Tobias Haist
IPC分类号： G01B9/021
CPC分类号： G01B9/02027 , G01B9/02003 , G01B2290/45 , G01B2290/70 , G02B5/32
摘要： An interferometer for optically measuring an object (10), including a light source (1), at least one beam splitter (2) and at least one detector (12a, 12b), with the beam splitter being arranged in the beam path of the light source such that a light beam created by the light source is split into a working beam (3) and a reference beam (4). The interferometer is embodied such that the working beam impinges on the object (10) to be measured and the working beam is at least partially reflected by the object and interfered with the reference beam on the detector (12a, 12b). Here it is essential that the interferometer is provided with a spatial light modulator, which comprises a hologram control unit (9) and a hologram reconstruction unit (8) connected thereto, with the hologram reconstruction unit being arranged in the beam path of the working beam between the beam splitter (2) and the object (10) and the hologram control unit (9) controlling the hologram reconstruction unit (8) such that the hologram reconstruction unit creates an optionally predetermined hologram such that the working beam is deflected and/or split by the hologram reconstruction unit.
摘要翻译：一种用于光学测量物体（10）的干涉仪，包括光源（1），至少一个分束器（2）和至少一个检测器（12a，12b），所述分束器布置在所述光束使得由光源产生的光束被分成工作光束（3）和参考光束（4）。干涉仪被实施为使得工作光束照射在待测量的物体（10）上，并且工作光束被物体至少部分地反射并且干扰参考光束在检测器（12a，12b）上。这里，干涉仪必须具有空间光调制器，其包括全息图控制单元（9）和与其连接的全息图重建单元（8），全息图重建单元布置在工作波束的光束路径中在分束器（2）和物体（10）和控制全息图重建单元（8）的全息图控制单元（9）之间，使得全息图重建单元产生任选预定的全息图，使得工作光束被偏转和/或由全息图重建单元分割。

7. 发明授权

US07808646B2 Interferometer for optically measuring an object 有权
标题翻译：用于光学测量物体的干涉仪
公开(公告)号：US07808646B2
公开(公告)日：2010-10-05
申请号：US12040073
申请日：2008-02-29
申请人： Christian Rembe , Tobias Haist
发明人： Christian Rembe , Tobias Haist
IPC分类号： G01B9/021
CPC分类号： G01B9/02027 , G01B9/02003 , G01B2290/45 , G01B2290/70 , G02B5/32
摘要： An interferometer for optically measuring an object (10), including a light source (1), at least one beam splitter (2) and at least one detector (12a, 12b), with the beam splitter being arranged in the beam path of the light source such that a light beam created by the light source is split into a working beam (3) and a reference beam (4). The interferometer is embodied such that the working beam impinges on the object (10) to be measured and the working beam is at least partially reflected by the object and interfered with the reference beam on the detector (12a, 12b). Here it is essential that the interferometer is provided with a spatial light modulator, which comprises a hologram control unit (9) and a hologram reconstruction unit (8) connected thereto, with the hologram reconstruction unit being arranged in the beam path of the working beam between the beam splitter (2) and the object (10) and the hologram control unit (9) controlling the hologram reconstruction unit (8) such that the hologram reconstruction unit creates an optionally predetermined hologram such that the working beam is deflected and/or split by the hologram reconstruction unit.
摘要翻译：一种用于光学测量物体（10）的干涉仪，包括光源（1），至少一个分束器（2）和至少一个检测器（12a，12b），所述分束器布置在所述光束使得由光源产生的光束被分成工作光束（3）和参考光束（4）。干涉仪被实施为使得工作光束照射在待测量的物体（10）上，并且工作光束被物体至少部分地反射并且干扰参考光束在检测器（12a，12b）上。这里，干涉仪必须具有空间光调制器，其包括全息图控制单元（9）和与其连接的全息图重建单元（8），全息图重建单元布置在工作波束的光束路径中在分束器（2）和物体（10）和控制全息图重建单元（8）的全息图控制单元（9）之间，使得全息图重建单元产生任选预定的全息图，使得工作光束被偏转和/或由全息图重建单元分割。

8. 发明申请

US20090251706A1 VIBROMETER AND METHOD FOR OPTICALLY MEASURING AN OBJECT 有权
标题翻译：用于光学测量对象的振动器和方法
公开(公告)号：US20090251706A1
公开(公告)日：2009-10-08
申请号：US12417107
申请日：2009-04-02
申请人： Christian Rembe , Georg Siegmund , Tian-Hua Xu
发明人： Christian Rembe , Georg Siegmund , Tian-Hua Xu
IPC分类号： G01B9/02
CPC分类号： G01H9/00 , G01B9/02002
摘要： A vibrometer and a method for optically measuring oscillations at an object, including a radiation source for creating a source beam, a beam splitter to split the source beam into a measuring beam and a reference beam, an optic interference device for interfering the reference beam with a measuring beam, at least partially reflected by the object, and a detector, with the interference device and the detector being embodied cooperating such that a measuring beam, at least partially deflected by the object, and the reference beam interfere on the detector. The vibrometer is embodied as a heterodyne vibrometer, having an optic frequency shift unit, which is arranged in the optical path of the vibrometer, to form a carrier frequency by creating a frequency difference between the measuring beam and the reference beam. The beam splitter and the frequency shift unit are embodied as an acousto-optic modulator in an optic construction element to deflect the source beam, with the acousto-optic modulator being embodied such that the source beam entering the acousto-optic modulator can be split into at least two diffraction beams: a first diffraction beam of diffraction order of 1 and a second diffraction beam of diffraction order of −1, and the acousto-optic modulator is arranged in the optical path of the vibrometer such that one of the two diffraction beams represents the measurement beam and the other diffraction beam represents the reference beam.
摘要翻译：一种振动计和一种用于光学测量物体上的振荡的方法，包括用于产生源光束的辐射源，用于将源光束分裂成测量光束的分束器和参考光束，用于干扰参考光束的光学干涉装置，至少部分地由物体反射的测量光束和检测器，其中所述干涉装置和检测器被配置为使得至少部分地被物体偏转的测量光束和参考光束干扰检测器。振动计被实施为外差式振动计，其具有布置在振动计的光路中的光学频移单元，以通过在测量光束和参考光束之间产生频率差而形成载波频率。分束器和频移单元被实现为光学构造元件中的声光调制器以偏转源束，其中声光调制器被实现为使得进入声光调制器的源束可以被分成至少两个衍射光束：衍射级为1的第一衍射光束和衍射级为-1的第二衍射光束，并且声光调制器布置在振动计的光路中，使得两个衍射光束表示测量光束，另一个衍射光束表示参考光束。

9. 发明申请

US20070177154A1 MEASURING DEVICE AND METHOD TO OPTICALLY MEASURE AN OBJECT 有权
标题翻译：测量设备和光学测量对象的方法
公开(公告)号：US20070177154A1
公开(公告)日：2007-08-02
申请号：US11627124
申请日：2007-01-25
申请人： Christian Rembe
发明人： Christian Rembe
IPC分类号： G01B11/02
CPC分类号： G01B9/02012 , G01B9/02003 , G01B9/02069 , G01B2290/70 , G01S7/491 , G01S17/08 , G01S17/50
摘要： A measuring device for the optic measuring of an object 13a is provided, in particular for measuring a motion of the object. The device includes an interferometer 20 with a measuring beam exit 12, a reflection beam entry 14, an interfering beam exit 15, and a light source 1 for creating a light beam 8, an optic detector 16, which is arranged at the interfering beam exit 15 of the interferometer 20 such that a light beam exiting the interfering beam exit 15 impinges the detector and a signal processing unit 17 connected to the detector 16 being embodied such that they can measure measuring signals of the detector 16. The interferometer (20) is provided with a switched beam entry (18) and is embodied such that dependent on a switching signal connected to a switched beam entry (18) a light beam exits the measuring beam exit (12) essentially with a predetermined light intensity and at a predetermined angle, and that the signal processing unit (17) is provided with a switched beam exit, which is connected to the switched beam entry (18) of the interferometer, with the signal processing unit (17) controlling the interferometer such that a light beam exits the measuring beam exit (12) only during the measuring of measuring signals essentially with a predetermined light intensity and at a predetermined angle.
摘要翻译：提供了用于物体13a的光学测量的测量装置，特别是用于测量物体的运动。该装置包括具有测量光束出射12的干涉仪20，反射光束入口14，干涉光束出口15和用于产生光束8的光源1，光学检测器16，布置在干涉光束出射处 15，使得离开干扰光束出射口15的光束撞击检测器，并且连接到检测器16的信号处理单元17被实现为使得它们可以测量检测器16的测量信号。干涉仪（20）设置有切换光束入口（18），并且被实施为使得取决于连接到切换光束入口（18）的切换信号，光束基本上以预定光线离开测量光束出口（12）强度和预定角度，信号处理单元（17）设置有与干涉仪的切换光束入口（18）连接的切换光束出口，信号处理单元（17）控制干涉仪使得光束仅在测量信号基本上以预定的光强度和预定角度测量时离开测量光束出口（12）。

10. 发明申请

US20050280830A1 Apparatus for optical measurement of an object 有权
标题翻译：用于物体光学测量的装置
公开(公告)号：US20050280830A1
公开(公告)日：2005-12-22
申请号：US11136866
申请日：2005-05-25
申请人： Christian Rembe
发明人： Christian Rembe
IPC分类号： G01B9/02 , G01B9/04 , G01B11/02 , G02B21/00
CPC分类号： G02B21/006 , G02B21/0056 , G02B21/245
摘要： An apparatus for optical measurement of an object, especially for measuring movement, is provided, which includes an interferometer for measuring movements along the measurement beam of the interferometer, as well as a confocal auto-focus microscope. The interferometer is coupled in the beam path of the confocal auto-focus microscope, such that the measurement beam of the interferometer is simultaneously the focusing beam of the microscope. Here, it is guaranteed that the interferometric movement measurement is always performed at the focal point of the microscope that is used. This enables automatic correction of the Guoy effect for objectives with high numerical aperture. In addition, for the use of a scanning confocal auto-focus microscope, data sets of test objects can also be measured, which comprise their vibrational behavior, height profile, and optionally also their in-plane movement behavior.
摘要翻译：提供了一种用于物体的光学测量的装置，特别是用于测量运动的装置，其包括用于测量沿着干涉仪的测量光束的运动的干涉仪以及共聚焦自动对焦显微镜。干涉仪耦合在共焦自动对焦显微镜的光束路径中，使得干涉仪的测量光束同时是显微镜的聚焦光束。这里，确保干涉测量运动测量始终在使用的显微镜的焦点处进行。这使得能够自动校正具有高数值孔径的物镜的国际效应。此外，对于使用扫描共聚焦自动对焦显微镜，也可以测量测试对象的数据集，其包括它们的振动特性，高度分布以及可选的其平面内移动行为。

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