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    • 3. 发明授权
    • Integrated nanomechanical sensor array chips
    • 集成纳米机械传感器阵列芯片
    • US07655269B2
    • 2010-02-02
    • US10423832
    • 2003-04-25
    • Theresa S. MayerChristine D. Keating
    • Theresa S. MayerChristine D. Keating
    • G01N1/33
    • G01N33/54373Y10S977/702Y10S977/877
    • The invention provides sensor, preferably biosensor devices and method of fabrication. The devices have significant advantages over the prior art methods having compatibility with future trends in clinical diagnostics and chemical detection. The underlying principle involves the integration of nanometer diameter, micron long metal or semiconductor rods onto a substrate to form a suspended nanomechanical cantilevers. The cantilever rods are rigidly attached to the substrate on one or both ends, and resonate at a characteristic frequency depending on the diameter, length, and stiffness of the rod. The metal or semiconductor rods are integrated onto the substrate using electrofluidic or fluidic assembly techniques. A receptor coating is placed on the metal or semiconductor rods prior to or following rod alignment using self-assembly chemistries. Sensing is accomplished when the target agent binds to the receptor substance, causing a change in the mass of the cantilever rod, and a corresponding change in the resonant frequency. This change in resonant frequency can be detected using an electrical readout. The sensing circuitry is integrated with CMOS or TFT technologies to form compact multi-analyte senor arrays on single crystal silicon, glass, or polymeric substrates. Circuits can also be included on the substrate to transmit the array data via wireless methods to a remote workstation for analysis. Devices may be integrated on chips with other analysis devices.
    • 本发明提供了传感器,优选地是生物传感器装置和制造方法。 与现有技术方法相比,这些装置具有与临床诊断和化学检测中的未来趋势相容的显着优点。 其基本原理涉及将纳米直径,微米长金属或半导体棒整合到基底上以形成悬浮的纳米机械悬臂。 悬臂杆在一端或两端刚性连接到基板上,并以取决于杆的直径,长度和刚度的特征频率共振。 使用电流或流体组装技术将金属或半导体棒集成到衬底上。 在使用自组装化学物质的杆对准之前或之后,将受体涂层放置在金属或半导体棒上。 当靶剂与受体物质结合时,可以实现感应,引起悬臂杆质量的变化以及谐振频率的相应变化。 可以使用电读出来检测谐振频率的这种变化。 感测电路与CMOS或TFT技术集成,以在单晶硅,玻璃或聚合物基板上形成紧凑的多分析物传感器阵列。 电路也可以包括在基板上,以通过无线方式将阵列数据传输到远程工作站进行分析。 设备可以与其他分析设备集成在芯片上。